Manual

SECS/GEM Interface 10-1
10 SECS/GEM Interface
Overview
FmNT can be configured to interface with a Generic Equipment Model (GEM) system. This is a factory-
set option. If your dispensing system is not equipped with the optional SECS/GEM Interface, the
SECS/GEM interface button in the FmNT Main Window will be grayed and disabled.
The SEMI Equipment Communication Standard (SECS) is published by Semiconductor Equipment and
Materials International (SEMI). It defines a computer-to-computer communications interface between a
unit of factory equipment and a host computer.
Below is a description of the user interface for the SECS/GEM option. It is intended as an Operator
Guide. Detailed interface programming information and terminology are contained in the SECS/GEM
Interface Option for Fluidmove for Windows NT Reference Manual.
Safety First
Please review the Safety section of the manual for your particular dispensing system before proceeding.
It is important for you to familiarize yourself with the safety features and precautions before attempting
the tutorials in this manual.
SECS/GEM interface Window
To access the SECS/GEM Interface Window, click on SECS/GEM in the FmNT Main Window. The
SECS/GEM Setup Window opens. There are four tabs:
Control
Terminal
Setup
Communication
The
Control tab is displayed.
Control Tab
This dialog box allows you to change the control state, the communication state, and the spooling state of
the SECS/GEM Interface. You can also request the current date and time from the host computer. Click
the
Control, Communication, and Spooling buttons to change the settings. Otherwise, the system uses
the default settings on the
Setup tab. The current settings are listed at in the bottom portion of the
screen. See Figure 10-1.