Manual

Table of Contents xiii
Table of Tables
Table 1-1 Typical Dispensing Applications ...................................................................................... 1-2
Table 2-1 Standard Filename Conventions...................................................................................... 2-4
Table 3-1 Position Control Keyboard Commands............................................................................3-9
Table 3-2 Teach Window Functional Areas and Buttons............................................................... 3-19
Table 3-3 Tools Menu ....................................................................................................................3-25
Table 4-1 Feature Access ................................................................................................................4-6
Table 4-2 Machine Offsets Parameters ......................................................................................... 4-15
Table 4-3 Local Machine Offset Options........................................................................................ 4-21
Table 4-4 E-10 Equipment States .................................................................................................. 4-22
Table 4-5 E-10 Equipment States - Configuration Options............................................................ 4-25
Table 4-6 Asymtek Valves.............................................................................................................. 4-29
Table 4-7 Height Sensor Setup Options ........................................................................................4-31
Table 4-8 Scale Setup Options ...................................................................................................... 4-36
Table 4-9 Reticle Size Ranges....................................................................................................... 4-39
Table 4-10 Setup Vision Options......................................................................................................4-40
Table 4-11 Conveyor Configuration Options.................................................................................... 4-44
Table 4-12 Setup Dispenser Options ...............................................................................................4-51
Table 4-13 Setup Procedures ..........................................................................................................4-55
Table 5-1 Purge Parameter Options ..............................................................................................5-13
Table 5-2 Flow Rate Maintenance Options.................................................................................... 5-15
Table 5-3 Pot Life/Low Fluid Check Options.................................................................................. 5-17
Table 5-4 Model Fiducial Ratings and Characteristics...................................................................5-20
Table 6-1 Process Commands.........................................................................................................6-8
Table 7-1 Step and Repeat Options............................................................................................... 7-33
Table 8-1 Manual Run Commands .................................................................................................. 8-8
Table 8-2 Run Control Buttons.......................................................................................................8-10
Table 8-3 Run Status Tab .............................................................................................................. 8-11
Table 9-1 Heater Loop Parameters - Run Time Tab Options .......................................................... 9-8
Table 10-1 SECS/GEM Setup Options ............................................................................................ 10-5
Table B-1 Error Messages................................................................................................................B-1