Installation Manual

Troubleshooting 8-85

Interlock Verification

1. If open, close the Front Hatch.

2. Does the green Beacon light illuminate when the Front Hatch is closed?

Go to Step 14 of “Main Power Verification” in 8.1.4,

Interlock Fault Isolation Procedure

Go to Step 3

3. Locate the power LEDs on the XY Servo Interface PWA.

4. Is the red SRVO_PWR LOW LED on the XY Servo Interface PWA illuminated when the Front

Hatch is closed?

Go to Servo Controller (PMAC) Verification in

this subsection.

Go to 8.1.4, Interlock Fault Isolation Procedure

Servo Controller (PMAC) Verification

1. Is FmNT open?

Go to Step 3

Go to Step 2

2. Exit FmNT.

3. Open FmNT by double clicking on the

FmNT icon.

4. Does FmNT message “30753 The motor failed to close” appear on screen while initializing FmNT?

Go to Step 5

Go to 8.3.2, Z Servo Amplifier Fault Isolation Procedure

Yes