Owner manual

Table of Contents ix
Table of Figures
Figure 2-1 Typical Warning Label Locations, Front View ....................................................2-5
Figure 2-2 Warning Label Locations, Rear View ................................................................2-6
Figure 2-3 EMO Locations .................................................................................................2-7
Figure 2-4 Earthquake Protection, Side View ................................................................... 2-10
Figure 2-5 Laser Height Sensor ....................................................................................... 2-13
Figure 2-6 System Lockout .............................................................................................. 2-15
Figure 3-1 Front View - Typical ..........................................................................................3-2
Figure 3-2 Dispensing Chamber Close-up (X-1020 shown) ...............................................3-4
Figure 3-3 Conveyor Close-up (X-1020 with Contact Heaters) ...........................................3-6
Figure 3-4 Lower Front Cabinet Close-up ..........................................................................3-8
Figure 3-5 Rear View (Typical) ......................................................................................... 3-10
Figure 3-6 Rear Panel Close-up ....................................................................................... 3-12
Figure 3-7 Computer Control Panel .................................................................................. 3-14
Figure 3-8 Vision System Components ............................................................................ 3-16
Figure 3-9 Camera Lighting Adjustment ........................................................................... 3-19
Figure 3-10 Lens Removal ................................................................................................. 3-20
Figure 3-11 Height Sensor Location (mechanical shown) .................................................. 3-21
Figure 3-12 Mechanical Height Sensor .............................................................................. 3-23
Figure 3-13 Laser Height Sensor ....................................................................................... 3-23
Figure 3-14 Height Sensor Micrometer Setup and Adjustment ........................................... 3-25
Figure 3-15 Probe-to-Needle Alignment ............................................................................. 3-27
Figure 3-16 Height Sensor Probe Adjustment .................................................................... 3-29
Figure 3-17 Needle Sensor Features ................................................................................. 3-31
Figure 3-18 Typical Fluid Heater Operation ........................................................................ 3-32
Figure 3-19 Needle Heater Location .................................................................................. 3-33
Figure 3-20 DJ-9000 Thermal Control Assembly................................................................ 3-34
Figure 3-21 Weigh Station and Purge Station Location ...................................................... 3-35
Figure 3-22 Dual Action Dispensing Head (DV-8000/DP-3000 shown)
.............................. 3-36
Figure 3-23 Typical Heater Tooling Operation .................................................................... 3-37
Figure 3-24 Contact Heater Close-up ................................................................................. 3-38
Figure 3-25 Impingement Heater Close-up ........................................................................ 3-39
Figure 3-26 Process Development Hot Plate ..................................................................... 3-40
Figure 3-27 SECS/GEM Tab in FmNT Run Window .......................................................... 3-41
Figure 3-28 Capacitive Fluid Level Sensor ......................................................................... 3-42
Figure 3-29 Magnetic Fluid Level Sensor ........................................................................... 3-43
Figure 3-30 Under-Board Support System ......................................................................... 3-44
Figure 3-31 Upstream (left) and Downstream (right) FSLs ................................................. 3-45
Figure 3-32 Wafer Handler System .................................................................................... 3-46
Figure 4-1 Typical Dispensing Process (X-1020) ...............................................................4-3
Figure 4-2 Fluidmove Message 30416 ...............................................................................4-5
Figure 4-3 Fluidmove Main Window (FmXP shown) ...........................................................4-5
Figure 4-4 Dispenser Jog Window .....................................................................................4-8
Figure 4-5 Conveyor Jog Window .................................................................................... 4-10
Figure 4-6 Operator Accessible Switches and Buttons ..................................................... 4-13
Figure 4-7 Main Air Pressure Regulator and Gauge ......................................................... 4-16
Figure 4-8 Pneumatic Controls in the Lower Front Cabinet .............................................. 4-17
Figure 4-9 Dispensing Head Bulkhead Connectors - Pneumatics .................................... 4-22
Figure 4-10 Dispensing Head Bulkhead Connectors - Electrical ........................................ 4-23