Owner manual

I-4 Index
V
Vision System ...................................................... 3-16–3-20
specifications ........................................................... 7-11
troubleshooting .......................................................... 5-5
W
Wafer Handling System ................................................ 3-46
Warning Labels ........................................................ 2-4–2-5
Water Trap
draining ...................................................................... 6-8
location ..................................................................... 3-13
Weigh Station ................................................................ 3-35
cup and wiper replacement ......................................... 6-6
location/description .................................................... 3-5
scale specifications ..................................................... 7-8