Owner manual

I-2 Index
H
Heaters, fluid
DJ-9000 thermal control assembly ........................... 3-34
needle heater ............................................................ 3-32
operation .................................................................. 4-24
Heaters, substrate
contact ...................................................................... 3-38
controller ........................................................... 3-9, 3-37
impingement ............................................................ 3-39
location/description .................................................... 3-7
operation .................................................................. 4-28
process development hot plate ................................. 3-40
specifications ........................................................... 7-13
troubleshooting ........................................................ 5-12
Height Sensor
description ................................................................ 3-21
laser ........................................................ 2-13, 3-22, 7-12
location/description .................................................... 3-5
maintenance ............................................................... 6-3
mechanical ............................................................... 3-22
probe adjustments ........................................... 3-24–3-29
probe replacement .................................................... 6-10
specifications ........................................................... 7-12
troubleshooting .......................................................... 5-6
I
Impingement Flowmeters ............................................... 3-9
Impingement Heaters ......................... See Heaters, substrate
Interlock ................................................ Se e Safety Interlock
J
Jog Controls ........................................................... 4-7–4-12
Jog Distances ................................................................ 7-10
L
Lens System .................................................................. 3-17
Lift Table ........................................................................ 3-7
Light Beacon
color indications ................................................ 2-12, 5-2
location ...................................................................... 3-3
Lighting
adjustment ................................................................ 3-18
description ......................................................... 3-4, 3-17
work light locaton ...................................................... 3-3
Lockout/Tagout............................................................. 2-14
Low Fluid Sensor .......................................................... 3-42
Lower Front Cabinet ....................................................... 3-8
M
Main Air Inlet ................................................................ 3-11
Main Air Regulator .............................................. 3-13, 4-16
Main Circuit Breaker ............................................ 3-13, 4-13
Main Power Inlet ........................................................... 3-11
Maintenance
cooling fan filters ...................................................... 6-13
Purge Station ....................................................... 6-4, 6-6
record keeping ............................................................ 6-2
safety precautions ....................................................... 6-1
schedule ...................................................................... 6-3
sensor probe replacement ......................................... 6-10
surface cleaning .......................................................... 6-3
water trap .................................................................... 6-3
Water Trap.................................................................. 6-8
weigh station .............................................................. 6-6
Monitor ......................................................................... 3-17
location ....................................................................... 3-3
maintenance ................................................................ 6-3
troubleshooting ........................................................... 5-5
MSDS ............................................................... 2-2, 2-3, 6-1
N
Needle Heater
description/installation ............................................. 3-32
operation ................................................................... 4-24
specifications ............................................................ 7-13
troubleshooting ........................................................... 5-9
Needle Sensor
location/description .................................................... 3-5
specifications ............................................................ 7-12
tactile sensor error ...................................................... 5-8
theory of operation ................................................... 3-30
troubleshooting ........................................................... 5-7
O
On/Off Button ........................................................ 3-3, 4-13
Options
development hot plate............................................... 3-40
dual-action dispense head ......................................... 3-36
free-standing loader .................................................. 3-45
low fluid sensors ....................................................... 3-42
software .................................................................... 3-41
substrate heaters ....................................................... 3-37
under-board support ................................................. 3-44
wafer handler ............................................................ 3-46