Adaptive Pressure Controller IQ+ OP-LIT 9/08 Nor-Cal Products, Inc. 1967 So. Oregon Yreka, CA 96097 USA Tel: 800-824-4166 or 530-842-4457 Fax: 530-842-9130 www.n-c.
Intellisys Adaptive Pressure Controllers Table of Contents 1.0............. Introduction...............................................................................................................................................4 2.0............. Device Specification...................................................................................................................................5 3.0............. Unpacking and Installation..................................................................
Intellisys Adaptive Pressure Controllers List of Tables 2.1....... IQ+ Controller General Equipment Specification..............5 2.2 ...... IQ+ Controller Analog TTL I/O..........................................5 2.3....... IQ+ Controller RS-232 Serial I/O.......................................5 2.4....... IQ+ Controller Performance.............................................5 2.5....... IQ+ Controller Reliability..................................................5 3.1.......
Intellisys Adaptive Pressure Controllers 1.0 - Introduction Thank you for purchasing the new Intellisys™ IQ+ downstream adaptive pressure controller from Nor-Cal Products. Before installing and operating the product, please read this manual thoroughly as it contains critical correction, interface and operating tips. If you encounter any problems, or if you have any questions, please contact our Intellisys Customer Service Support at 800-824-4166, ext. 186 or visit our web site at www.n-c.com.
Intellisys Adaptive Pressure Controllers 2.0 - Device Specification The following tables summarize specifications essential to the installation and hook-up of the IQ+ product. Please note that the information herein is limited to the IQ+ controller. For valve installation instructions and guidelines, please refer to the appropriate Valve Operating Manual. Table 2.1 – IQ+ Controller General Equipment Specifications Feature Specification Dimensions Please refer to the diagram specific to sections 3.
Intellisys Adaptive Pressure Controllers 3.0 - Unpacking and Installation Inspect the shipping box before unpacking. Any damage should be reported to Nor-Cal Products or directly to the transportation carrier. Carefully remove the product from the box and visually inspect it for damage. If return of the product to Nor-Cal Products should become necessary, please contact Intellisys Customer Service to obtain a Return Materials Authorization (RMA) Number.
Intellisys Adaptive Pressure Controllers 3.1 - Master Buried Box Controllers Table 3.
Intellisys Adaptive Pressure Controllers 3.2 - Slave Buried Box Controllers Table 3.
Intellisys Adaptive Pressure Controllers 3.3 - Master On-Board Controllers Table 3.
Intellisys Adaptive Pressure Controllers 3.4 - Slave On-Board Controllers Table 3.4 - On-Board Controllers (Slave) Power (XLR) Service Port Pin Function Pin 1 +24VDC Power Input 1 Authorized Technicians Only 2 Power Return 2 Authorized Technicians Only 3 Drain 3 Authorized Technicians Only 1 Function 2 4 N-C Net Hi 5 NC- Net Low 2 Figure 3.
Intellisys Adaptive Pressure Controllers 4.0 - Theory of Operation All IQ+ controllers are designed for downstream pressure control (see Fig 4.1 and 4.2). As such, it is one of several important components in a pressure control system. Other essential components include a host system computer, a throttle valve and one or two vacuum gauges, such as a Capacitance Diaphragm Gauge (CDG), and a pump system.
Intellisys Adaptive Pressure Controllers 5.0 - IQ+ Controller Module Interfaces IQ+ controllers have several interfaces available for communications and connectivity to peripheral devices, depending on model. These are described by function below. Please also refer to Figures 3.1 – 3.4 and their associated Tables for the specific connectors and their pin assignments.
Intellisys Adaptive Pressure Controllers 6.0 - RS-232 Serial Interface and Commands Interface basics All IQ+ controllers support RS-232 serial communications available though auxiliary port. A full description of the communications protocol and a listing of all active serial commands follows in this section. A three-wire connection needs to be completed to provide the communications lines, with Rxd (data from the IQ+), Txd (data to the IQ+) as well as signal common on. See Section 3.0 for details.
Intellisys Adaptive Pressure Controllers 6.0 - RS-232 Serial Interface and Commands (continued) Modifying the Setpoint The IQ+ controller normally has five programmable set point selectable to be either pressure control or valve position control. Before using the set point to control either pressure or valve position, the set point value must be programmed. This is done by the following command: S1xx.xx where xx.xx is a number from 0.00 to 100.00. One or no decimal places may also be used i.e. x.x or x.
Intellisys Adaptive Pressure Controllers 6.0 - RS-232 Serial Interface and Commands (continued) Activating Dual Pressure Sensor Configuration When two pressure gauges are attached to the IQ+ controller, the controller can operate in three distinct modes of operation. Dedicated to the first gauge: (This is the power-on default mode) In that mode the controller only considers CDG1 for pressure control as well as reporting.
Intellisys Adaptive Pressure Controllers 6.1 - How to Configure IQ+ for Your System System Configuration Parameters Figure 6.2 .1– Volume too High There are three parameters to adjust that will affect how the valve will react to changes in gas flow and pressure set points. The parameters only need to be set once and will cover the full range of process pressure setpoints.
Intellisys Adaptive Pressure Controllers 6.1 - How to Configure IQ+ for Your System (continued) Figure 6.5 – Speed Too low Figure 6.4 – Speed Too High System Configuration Commands DeviceNet Commands Class ID 33 hex Instance ID 1 (Process Control) Table 6.4 – DeviceNet Commands Attribute ID hex Access Code Name Format Value 64 OE (get) 10 (set) Volume INT 1-100, default = 0 65 OE (get) 10 (set) Delay INT 0-10, default = 0 66 OE (get) 10 (set) Speet INT 1-100, default = 100 Table 6.
Intellisys Adaptive Pressure Controllers 7.0 - DeviceNet Interface 7.1. Overview and setup DeviceNet is a network communication protocol that provides a cost-effective solution to low-level device networking for semiconductor equipment tools. Process data and other information such as configuration parameters can be communicated for up to 64 nodes per network at data rate up to 500K baud. The DeviceNet pressure controller conforms to the ODVA & ControlNet International, Ltd.
Intellisys Adaptive Pressure Controllers 7.1. Overview and setup (continued) Required Hardware: General Considerations for Valve Operation Using DeviceNet Interface and bus system part numbers are given as indication only. The IQD Controllers come ready to plug into any qualified DeviceNet network. DeviceNet is an object oriented communications protocol. The Process Control Valve device type encompasses several objects from the Hierarchy of Semiconductor Equipment Device Objects (see figure 9.1).
Intellisys Adaptive Pressure Controllers 7.2 - DeviceNet Communications This section describes how to communicate with and control the controller using the DeviceNet port. DeviceNet has two basic message types: Explicit and I/O messaging Explicit Messaging: Explicit messages are used to read or write an individual piece of information in the device. They are mainly used for initial configuration.
Intellisys Adaptive Pressure Controllers 7.2 - DeviceNet Communications (continued) How to read system pressure and valve position: • • • • • • • Select the service code 0E (get attribute) Select class ID 31 (select the s-analog sensor object) Select instance ID 1 (process input low range) Select attribute ID 6 (value attribute) The device will respond with data bytes 00 00 meaning that the measured pressure is 0 Select instance ID 3 (valve position) Select attribute ID 6 (value attribute).
Intellisys Adaptive Pressure Controllers 8.0 - DeviceNet Device Profile Figure 8.
Intellisys Adaptive Pressure Controllers 8.1 - Identity Object Class ID 1 hex Instance ID 1 Table 8.1.1 – IDENTITY OBJECT ATTRIBUTES AND SERVICES Attribute ID hex Service ID hex • Vendor ID: Assigned number to Nor-Cal Products Inc. is 612 1 0E (get) Vendor ID Name 2 0E (get) • Device type: The value of 1Dhex is used for process control valve (cf. specification One, Edition 3.
Intellisys Adaptive Pressure Controllers 8.5 - I/O Assembly Instances Table 8.5.1 – Output Assembly Instances Instance hex Byte The control instance indicates the significance of the control setpoint: 1 = pressure control 20 04 24 07 30 03 2 = position control.
Intellisys Adaptive Pressure Controllers 8.6 - Connection Object Class ID 5 hex Instance ID 1, 2 (1=EC, 2=IO) • Attribute 0E &10: Setting of this attribute is allowed only when in configure I/O state. • Attempt to set unsupported EPATH returns an “invalid attribute value” error. • The current assembly path is stored in the device’s NVRAM and restored on power up.
Intellisys Adaptive Pressure Controllers 8.8 - Device Supervisor Object (continued) TABLE 8.8.
Intellisys Adaptive Pressure Controllers Power on Reset Diagnostic request Self test failed Figure 8.2 - Object State Transition Diagram Self-Test Exception Self-Testing Condition cleared Abort request Self-test passed Abort request Abort Idle Recover request Start request Or first valid IO data Stop request Time out Connection deleted Abort request Critical Fault from any state Critical Fault Executing 8.9 - S-Analog Sensor Object Class ID 31 hex Table 8.9.
Intellisys Adaptive Pressure Controllers 8.10 - S-Analog Actuator Object Table 8.10.1 – S-Analog Actuator Object Attributes Class ID 32 hex Instance ID 1 Attribute ID hex SERVICE ID hex Format 3 0E (get) 10 (set) Data type USINT 4 0E (get) 10 (set) Data units UINT 1001h = Counts (default) 1007h = Percent 1703h = Degrees 5 0E (get) 10 (set) Override USINT Specifies the operational mode of the controller, see table 8.10.
Intellisys Adaptive Pressure Controllers 8.11 - S-Single Stage Controller Object (continued) Table 8.11.2 – S-Single Stage Controller Object Attributes; Instance 2 Attribute ID hex Instance ID 2 (position control) NOTE: There is no subclass for instance 2 Table 8.11.
Intellisys Adaptive Pressure Controllers 8.12 - Selection Object Class ID 2E hex Instance ID 1 (setpoint) • Attribute 0E determines the selection between pressure control or valve control (1 for pressure control, 2 for position control), default is 1 after reset.
Intellisys Adaptive Pressure Controllers 8.13 - Master/Slave Object Table 8.13.1 – master/slave object attributes Class ID 64 he Attribute ID hex Instance ID 1 (master) Name Format 0E (get) 10 (set) Number of Slaves USINT Range 0-10 73 0E (get) 10 (set) Individual valve control (address) USINT Range 0 - nn = total number of Slaves (invalid value = no individual control) 74 0E (get) 10 (set) Individual valve control (action) USINT See table 8.13.
Intellisys Adaptive Pressure Controllers 8.13 - Master/Slave Object (continued) Table – 8.13.5 Slave Network LED Status LED status Flashing Green Network OK device online Green Network OK connection established Flashing Red Connection timed out NOTE: If a Slave valve has a problem of any kind, the Master will indicate this by flashing the fault LED. For all other conditions, the Master LEDs operate the same as a standard IQ+ controller. 9.
Intellisys Adaptive Pressure Controllers 10.0 - Product Support WARNING: When working with or troubleshooting Nor-Cal APC products extreme care must be taken to avoid putting bodily parts in or near the valve gate mechanism or other moving parts. These may move suddenly and unexpectedly, and many of them are driven with sufficient force so as to cause significant harm and possibly even dismemberment.
Intellisys Adaptive Pressure Controllers 10.0 - Product Support (continued) Table 10.2 – Valid Status LED Combinations Table 12.2 Key O G FG R FR A = = = = = = LED Off Green Flashing Green Red Flashing Red Amber Mod Net Ctrl Fault OPEN/ CLOSE O O O O O/O All LEDs off. IQ+ is not receiving power, or internal software is corrupt. G G G A G/G All LEDs on. This is valid for about 1 second after power-up for initial check-up sequence.
Intellisys Adaptive Pressure Controllers APPENDIX I – Spare Parts and Ordering Information To make the completion of an Intellisys downstream pressure control system easy, Nor-Cal Products offers a comprehensive selection of cables and related accessories. These include signal and communications cables, power cords, power supplies as well as spare parts.
Intellisys Adaptive Pressure Controllers Appendix II - Limited Warranty and Intellectual Property Coverage Products manufactured by Nor-Cal Products, Inc. (hereinafter referred to as “Nor-Cal”) are warranted against defects in material and workmanship for a period of twelve (12) months from the date of shipment from Nor-Cal to the buyer. Any modification to the product by the buyer or their agent voids this warranty.
