Capacitance Diaphragm Gauge 160 °C heated Operating Manual Incl.
Product Identification In all communications with Nor-Cal Products, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below. Nor-Cal Products Inc.
Validity This document applies to products with the following part numbers: Part number Flange CDG160-T31 ½" tube CDG160-T31-NW1 DN 16 ISO-KF CDG160-T31-CF DN 16 CF-R CDG160-T31-VCR 8 VCR CDG160-T21 ½" tube CDG160-T21-NW1 DN 16 ISO-KF CDG160-T21-CF DN 16 CF-R 10-1 … 1000 (F.S.) ® 10-2 … 100 (F.S.
If not indicated otherwise in the legends, the illustrations in this document correspond to Capacitance Diaphragm Gauges with the DN 16 ISO-KF vacuum connection. They apply to gauges with other vacuum connections by analogy. We reserve the right to make technical changes without prior notice. All dimensions in mm. Intended Use The temperature controlled Capacitance Diaphragm Gauges are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 3).
Patents EP 1070239, 1040333 US Patents 6528008, 6591687, 7107855, 7140085 Scope of Delivery 1× Capacitance Diaphragm Gauge 1× Insulation shell 1× Pin 1× Calibration Test Report 1× Operating Manual CDG160-OP-LIT (2010-06) 5
Contents Product Identification Validity Intended Use Functional Principle Trademark Patents Scope of Delivery 2 3 4 4 4 5 5 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 8 8 8 9 9 2 6 Technical Data 10 3 Installation 3.1 Vacuum Connection 3.2 Power Connection 15 15 19 4 Operation 4.1 Status Indication 4.2 Zeroing the Gauge 4.2.1 Adjustment 4.2.2 Adjustment with Ramp Function 4.3 Switching Functions 4.3.
Further Information 36 ETL Certification 36 Declaration of Contamination 37 EC Declaration of Conformity 38 For cross-references within this document, the symbol (→ XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→ [Z]).
1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice 1.
1.3 General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. • Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document. • Before beginning to work, find out whether any vacuum components are contaminated.
2 Technical Data Measurement range Accuracy 1) Temperature effect on zero Temperature effect on span Resolution Gas type dependence Output signal analog (measurement signal) Measurement range Voltage range Relationship voltage-pressure Output impedance Loaded impedance Response time 2) Identification Resistance RIdent Voltage 1) 2) 10 → "Validity" 0.4% of reading 0.005% F.S./ °C 0.02% of reading / °C 0.003% F.S. none 0 … +10 V –5 … +10.24 V (limited to +10.
Switching functions Setting range Hysteresis Relay contact SP1, SP2 0 … 99% F.S. (0 … 9.9 V) 1% F.S. 30 VDC/ ≤0.5 ADC floating (n.o.) p ≤ pSP (LED lit solid) p ≥ pSP (LED off) closed open Switching time ≤50 ms Status relay closed measurement mode warning no supply voltage warming up error open RS232C interface Transmission rate Data format 9600 baud binary 8 data bits one stop bit no parity bit no handshake → "Power Connection" For further information on the RS232C interface → [1].
Supply voltage at the gauge Class 2 / LPS +21 … +30 VDC or ±15 V (±5%) ≤1 Vpp Ripple Power consumption while being heated ≤18 W at operating ≤12 W The gauge is protected against reverse polarity of the supply voltage and overload. Electrical connection Sensor cable Cable length Supply voltage 24 V 15-pin D-Sub, male 15-pin plus shielding ≤ 5 m (0.14 mm²/conductor) ≤ 8 m (0.25 mm²/conductor) ≤ 9 m (0.14 mm²/conductor) ≤17 m (0.
Admissible temperatures Storage Operation Bakeout –40 °C … +65 °C +10 °C … +50 °C ≤200 °C at the flange ≤80% at temperatures ≤+31 °C, decreasing to 50% at +40°C indoors only, altitude up to 2000 m NN IP 40 Relative humidity Use Degree of protection 82 13 31.5 110.4 3.
Analog Measurement Signal vs. Pressure Pressure p 1.1×F.S. 1.0×F.S. 0.9×F.S. 0.8×F.S. 0.7×F.S. 0.6×F.S. 0.5×F.S. 0.4×F.S. 0.3×F.S. 0.2×F.S. 0.1×F.S. 0.0×F.S. 0 1 2 3 4 5 6 7 8 9 10 Measuring signal Uout [V] p = (Uout / 10 V) × p (F.S.) Conversion Torr ↔ Pascal Torr c 1.00 mbar 3) Pa 3) 1013.25 / 760 = 1.3332… 101325 / 760 = 133.3224… Example: Gauge with 10 Torr F.S. Measurement signal Uout = 6 V p = (6 V / 10 V) × 10 Torr = 0.
3 Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use the type clamps which are suited to overpressure.
DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010: • CF and VCR flanges fulfill this requirement. • For gauges with a KF flange, use a conductive metallic clamping ring. • For gauges with a ½" tube, take appropriate measures to fulfill this requirement.
Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position. If adjustment should be possible after the gauge has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 23). Remove the protective lid and connect the product to the vacuum system.
Mount the insulation shell.
3.2 Power Connection Make sure the vacuum connection is properly made (→ 15). DANGER The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused. Ground loops, differences of potential, or EMC problems may affect the measurement signal.
If no sensor cable is available, make one according to the following diagram (cable length and conductor crosssections → 12). Status SP1 SP2 Ident TxD RxD 1M 100nF 18 V 10 3 4 1 8 9 10 13 14 2 12 7 11 5 6 Remote Zero Adjust 21…30 V 15 V 15 V 15 case Electrical connection Pin 1, 4 Relay SP1, closing contact Pin 2 Signal ouput (measurement signal) or thresholds SP1/2 1 9 Pin 3 Status Pin 5 Supply common Pin 6 Supply (-15 V) Pin 7, 11 Supply (+21 ...
Connect the sensor cable to the gauge and secure it using the lock screws. Connect the sensor cable to the controller.
4 Operation Put the gauge into operation. If you are using a Nor-Cal controller, define the measurement range. A warm-up time of at least 2 hours should be allowed; for precise pressure measurements a warm-up time of at least 4 hours is required. 4.
4.2 Zeroing the Gauge The gauge is factory calibrated while "standing upright" (→ "Calibration Test Report"). We recommend performing a zero adjustment, when the gauge is operated for the first time. Due to long time operation or contamination, a zero drift could occur and zero adjustment may become necessary. For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation as normally.
Evacuate the gauge to a pressure according to the table below: F.S. 1000 100 20 10 2 1 Torr Torr Torr Torr Torr Torr Recommended final pressure for zero adjustment <5×10-2 Torr <5×10-3 Torr <1×10-3 Torr <5×10-4 Torr <1×10-4 Torr <5×10-5 Torr If the final pressure is too high for zero adjustment (>25% of the F.S.), the zero cannot be reached and the LED blinks green. If this is the case, activate the factory setting and adjust the zero again (→ 30).
After zero adjustment, the gauge automatically returns to the measurement mode. The LED blinks green if • the signal output is negative (< -20 mV) when the final pressure has been attained • the zero adjustment has failed. 4.2.2 Adjustment with Ramp Function The ramp function allows to adjust the zero at a known reference pressure within the measurement range of the gauge.
Keep the button depressed max. ø1.1 mm Push the button again: Fine adjustment within 0...3 s: Change of direction within 3...5 s: the zero adjustment value changes by one unit (push button in intervals of 1 s) the zero adjustment changes its direction (the blinking frequency of the LED changes briefly) If the button is released for more than 5 s, the gauge returns to the measurement mode. The LED blinks green if the signal output is negative (< -20 mV).
4.3 Switching Functions The two switching functions can be set to any pressure within the measurement range of the gauge (→ 14). The current setpoint setting • is output at the D-Sub connector instead of the measurement signal (→ 20) and can be measured with a voltmeter after the button is pressed, or • can be read/written via the RS232C interface. If the pressure is lower than the setpoint, the corresponding LED ( or ) is lid solid and the corresponding relay (→ 20) is energized.
4.3.1 Adjusting the Setpoints The setpoints can be adjusted via • the buttons on the gauge, • the RS232C interface (→ [1]). DANGER DANGER: malfunction If processes are controlled via the signal output, keep in mind that by pushing the button the measurement signal is suppressed and the corresponding threshold value is output instead. This can cause malfunctions. Push the button only if you are sure that no damages can arise from a malfunction.
For changing the threshold value, push the button and keep it depressed. The threshold keeps changing from the current value (ramp) until the button is released or until the limit of the setting range is reached. Keep the button depressed max. ø1.1 mm Push the button again: Fine adjustment within 0...3 s: Change of direction within 3...
4.4 Activating the Factory Setting (Factory Reset) All user defined parameters (e.g. zero, filter) are restored to their default values. Loading of the default parameters is irreversible. Loading the default parameters: 30 Put the gauge out of operation. Keep the button depressed for at least 5 s while the gauge is being put into operation (Power ON).
5 Deinstallation Preconditions: • Vacuum system vented • Vacuum system cooled to <50 °C 5.1 Power Connection 5.2 Put the gauge out of operation. Unfasten the lock screws and disconnect the sensor cable. Vacuum connection DANGER DANGER: hot surface Touching the hot surface (>50 °C) can cause burns. Put the product out of operation and allow it to cool down. WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts.
DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.
Remove the insulation shell. Insulation shell both sides open Remove the gauge from the vacuum system and install the protective lid.
6 Maintenance, Repair Under clean operating conditions, the product requires no maintenance. Gauge failures due to contamination are not covered by the warranty. We recommend checking the zero at regular intervals (→ 23). Nor-Cal assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. 7 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g.
8 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING N WARNING: substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Further Information [1] www.n-c.com Communication Protocol RS232C Interface tnra49e1 Nor-Cal Products, Inc., Yreka, CA 96097, USA ETL Certification 3103457 36 ETL LISTED The product Capacitance Diaphragm Gauge complies with the requirements of the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22 CAN/CSA C22.
Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff. Description of product Reason for return Type Part number Serial number Operating fluid(s) used (Must be drained before shipping.
EC Declaration of Conformity We, Nor-Cal Products, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
Notes CDG160-OP-LIT (2010-06) 39
1967 South Oregon St. Yreka, CA 96097, USA Tel: 800-824-4166 Fax: 530-842-9130 Original: English CDG160-OP-LIT (2009-11) t nna53e1 www.n-c.
