Capacitance Diaphragm Gauge 45 °C heated Operating Manual Incl.
Product Identification In all communications with Nor-Cal Products, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below. Nor-Cal Products Inc.
Validity This document applies to products with the following part numbers: Part number Flange CDG045-T31 ½" tube CDG045-T31-NW1 DN 16 ISO-KF CDG045-T31-CF DN 16 CF-R CDG045-T31-VCR 8 VCR CDG045-T21 ½" tube CDG045-T21-NW1 DN 16 ISO-KF CDG045-T21-CF DN 16 CF-R 10-1 … 1000 (F.S.) ® 10-2 … 100 (F.S.
The part number (P/N) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document correspond to Capacitance Diaphragm Gauges with the DN 16 ISO-KF vacuum connection. They apply to other vacuum connections by analogy. We reserve the right to make technical changes without prior notice. All dimensions in mm.
Patents EP 1070239, 1040333 US Patents 6528008, 6591687, 7107855, 7140085 Scope of Delivery 1× Capacitance Diaphragm Gauge 1× Pin 1× Calibration Test Report 1× Operating Manual CDG045-OP-LIT (2010-1) 5
Contents Product Identification Validity Intended Use Functional Principle Trademark Patents Scope of Delivery 2 3 4 4 4 5 5 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 8 8 8 9 9 2 6 Technical Data 10 3 Installation 3.1 Vacuum Connection 3.2 Power Connection 15 15 18 4 Operation 4.1 Status Indication 4.2 Zeroing the Gauge 4.2.1 Adjustment 4.2.2 Adjustment with Ramp Function 4.3 Switching Functions 4.3.
Further Information 35 ETL Certification 35 Declaration of Contamination 36 EC Declaration of Conformity 37 For cross-references within this document, the symbol (→ XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→ [Z]).
1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice 1.
1.3 General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. • Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document. • Before beginning to work, find out whether any vacuum components are contaminated.
2 Technical Data Measurement range Accuracy 1) Temperature effect on zero 0.1 Torr (F.S.) 1 … 1000 Torr (F.S.) Temperature effect on span Resolution Gas type dependence Output signal analog (measurement signal) Measurement range Voltage range Relationship voltage-pressure Output impedance 0.0050% F.S./ °C 0.0025% F.S./ °C 0.01% of reading / °C 0.003% F.S. none 0 … +10 V –5 … +10.24 V (limited to +10.24 V) linear 0 Ω (short-circuit proof) Loaded impedance >10 kΩ Response time 2) ≥1 Torr (F.S.) 0.
Switching functions Setting range Hysteresis Relay contact SP1, SP2 0 … 99% F.S. (0 … 9.9 V) 1% F.S. 30 VDC/ ≤0.5 ADC floating (n.o.) p ≤ pSP (LED lit solid) p ≥ pSP (LED off) closed open Switching time ≤50 ms Status relay closed measurement mode warning no supply voltage warming up error open RS232C interface Transmission rate Data format 9600 baud binary 8 data bits one stop bit no parity bit no handshake → "Power Connection" For further information on the RS232C interface → [1].
Supply voltage at the gauge Class 2 / LPS +14 … +30 VDC or ±15 V (±5%) ≤1 Vpp Ripple Power consumption while being heated ≤12 W at operating temperature ≤8 W The gauge is protected against reverse polarity of the supply voltage and overload. Electrical connection Sensor cable Cable length Supply voltage 15 V Supply voltage 24 V 15-pin D-Sub, male 15-pin plus shielding ≤ 8 m (0.14 mm²/conductor) ≤15 m (0.25 mm²/conductor) ≤43 m (0.14 mm²/conductor) ≤75 m (0.25 mm²/conductor) ≤88 m (0.
Admissible temperatures Storage Operation Bakeout –40 °C … +65 °C +10 °C … +40 °C ≤110 °C at the flange ≤80% at temperatures ≤+31 °C, decreasing to 50% at +40°C indoors only, altitude up to 2000 m NN IP 40 Relative humidity Use Degree of protection 82 13 31.5 110.4 3.
Analog Measurement Signal vs. Pressure Pressure p 1.1×F.S. 1.0×F.S. 0.9×F.S. 0.8×F.S. 0.7×F.S. 0.6×F.S. 0.5×F.S. 0.4×F.S. 0.3×F.S. 0.2×F.S. 0.1×F.S. 0.0×F.S. 0 1 2 3 4 5 6 7 8 9 10 Measuring signal Uout [V] p = (Uout / 10 V) × p (F.S.) Conversion Torr ↔ Pascal Torr c 1.00 mbar 3) Pa 3) 1013.25 / 760 = 1.3332… 101325 / 760 = 133.3224… Example: Gauge with 10 Torr F.S. Measurement signal Uout = 6 V p = (6 V / 10 V) × 10 Torr = 0.
3 Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use the type clamps which are suited to overpressure.
DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010: • CF and VCR flanges fulfill this requirement. • For gauges with a KF flange, use a conductive metallic clamping ring. • For gauges with a ½" tube, take appropriate measures to fulfill this requirement.
Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position. If adjustment should be possible after the gauge has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 22). Remove the protective lid and connect the product to the vacuum system. Seal with centering ring Protective lid Clamp Keep the protective lid.
3.2 Power Connection Make sure the vacuum connection is properly made (→ 15). DANGER The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused. Ground loops, differences of potential, or EMC problems may affect the measurement signal.
If no sensor cable is available, make one according to the following diagram (cable length and conductor crosssections → 12). Status SP1 SP2 Ident TxD RxD 1M 100nF 18 V 10 3 4 1 8 9 10 13 14 2 12 7 11 5 6 Remote Zero Adjust 14…30 V 15 V 15 V 15 case Electrical connection Pin 1, 4 Relay SP1, closing contact Pin 2 Signal ouput (measurement signal) or thresholds SP1/2 1 9 Pin 3 Status Pin 5 Supply common Pin 6 Supply (-15 V) Pin 7, 11 Supply (+14 ...
20 Connect the sensor cable to the gauge and secure it using the lock screws. Connect the sensor cable to the controller.
4 Operation Put the gauge into operation. If you are using a Nor-Cal controller, define the measurement range. A warm-up time of at least ½ hour should be allowed; for precise pressure measurements a warm-up time of at least 2 hours is required. 4.
4.2 Zeroing the Gauge The gauge is factory calibrated while "standing upright" (→ "Calibration Test Report"). We recommend performing a zero adjustment, when the gauge is operated for the first time. Due to long time operation or contamination, a zero drift could occur and zero adjustment may become necessary. For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation as normally.
4.2.1 Adjustment The zero can be adjusted via • the button on the gauge, • the digital input "Remote Zero" (briefly apply the supply voltage (+14 … +30 V) to pin 10), • the RS232C interface (→ [1]), • a Nor-Cal Vacuum Gauge Controller. While the gauge is being heated and/or under atmospheric pressure, the zeroing function is locked in order for operating errors to be prevented. Evacuate the gauge to a pressure according to the table below: F.S. 1000 100 20 10 2 1 0.
Briefly press the button with a pin (max. ø1.1 mm). The zero adjustment runs automatically. The LED blinks until the adjustment (duration ≤8 s) is completed. Press the button briefly max. ø1.1 mm After zero adjustment, the gauge automatically returns to the measurement mode. The LED blinks green if • the signal output is negative (< -20 mV) when the final pressure has been attained • the zero adjustment has failed.
4.2.2 Adjustment with Ramp Function The ramp function allows to adjust the zero at a known reference pressure within the measurement range of the gauge. It also permits to adjust an offset of the characteristic curve in order to • compensate for the offset of the measuring system or • obtain a slightly positive zero for a 0 … 10 V AD converter. The offset should not exceed 2% of the F.S. (+200 mV). At a higher positive offset, the upper limit of the measurement range is exceeded.
Keep the button depressed max. ø1.1 mm Push the button again: Fine adjustment within 0...3 s: Change of direction within 3...5 s: the zero adjustment value changes by one unit (push button in intervals of 1 s) the zero adjustment changes its direction (the blinking frequency of the LED changes briefly) If the button is released for more than 5 s, the gauge returns to the measurement mode. The LED blinks green if the signal output is negative (< -20 mV).
4.3 Switching Functions The two switching functions can be set to any pressure within the measurement range of the gauge (→ 14). The current setpoint setting • is output at the D-Sub connector instead of the measurement signal (→ 19) and can be measured with a voltmeter after the button is pressed, or • can be read/written via the RS232C interface. If the pressure is lower than the setpoint, the corresponding LED ( or ) is lit solid and the corresponding relay (→ 19) is energized.
4.3.1 Adjusting the Setpoints The setpoints can be adjusted via • the buttons on the gauge, • the RS232C interface (→ [1]). DANGER DANGER: malfunction If processes are controlled via the signal output, keep in mind that by pushing the button the measurement signal is suppressed and the corresponding threshold value is output instead. This can cause malfunctions. Push the button only if you are sure that no damages can arise from a malfunction.
For changing the threshold value, push the button and keep it depressed. The threshold keeps changing from the current value (ramp) until the button is released or until the limit of the setting range is reached. Keep the button depressed max. ø1.1 mm Push the button again: Fine adjustment within 0...3 s: Change of direction within 3...
4.4 Activating the Factory Setting (Factory Reset) All user defined parameters (e.g. zero, filter) are restored to their default values. Loading of the default parameters is irreversible. Loading the default parameters: 30 Put the gauge out of operation. Keep the button depressed for at least 5 s while the gauge is being put into operation (Power ON).
5 Deinstallation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. 6 Vent the vacuum system. Put the gauge out of operation. Unfasten the lock screws and disconnect the sensor cable. Remove the gauge from the vacuum system and install the protective lid. Maintenance, Repair Under clean operating conditions, the product requires no maintenance.
7 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimental to health and environment. Products returned to Nor-Cal should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination.
8 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING N WARNING: substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Further Information [1] www.n-c.com Communication Protocol RS232C Interface tnra49e1 Nor-Cal Products, Inc., Yreka, CA 96097, USA ETL Certification 3103457 CDG045-OP-LIT (2010-1) ETL LISTED The product Capacitance Diaphragm Gauge complies with the requirements of the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22 CAN/CSA C22.
Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff. Description of product Reason for return Type Part number Serial number Operating fluid(s) used (Must be drained before shipping.
EC Declaration of Conformity We, Nor-Cal Products, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
Notes 38 CDG045-OP-LIT (2010-1)
Notes CDG045-OP-LIT (2010-1) 39
1967 South Oregon St. Yreka, CA 96097, USA Tel: 800-824-4166 Fax: 530-842-9130 Original: English tnna51e1 (2009-11) t nna51e1 www.n-c.
