Owner's manual

CDG025-OP-LIT (2010-1) 11
Materials exposed to vacuum
Flange, tube
Sensor and diaphragm
Sensor–diaphragm connection
Ceramics–metal connection
stainless steel AISI 316L
ceramics (Al
2
O
3
≥99.5%)
glass ceramics solder
AgTiCu hard solder, Vacon 70
(28% Ni, 23% Co, 49% Fe)
Internal volume
≤
3.6 cm
3
Admissible pressure (absolute)
≥200 Torr (F.S.)
1 … 100 Torr (F.S.)
3 bar
2 bar
Bursting pressure (absolute)
5 bar
Admissible temperatures
Storage
Operation
Bakeout (not in operation)
–40 °C … +65 °C
+5 °C … +50 °C
≤
110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection
IP 30