Capacitance Diaphragm Gauge Unheated Operating Manual Incl.
Product Identification In all communications with Nor-Cal Products, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below. Nor-Cal Products Inc.
Validity This document applies to products with the following part numbers: Part number Flange CDG025-T31 ½" tube CDG025-T31-NW1 DN 16 ISO-KF CDG025-T31-CF DN 16 CF-R CDG025-T31-VCR 8 VCR CDG025-T21 ½" tube CDG025-T21-NW1 DN 16 ISO-KF CDG025-T21-CF DN 16 CF-R 10-1 … 1000 (F.S.) ® 10-2 … 100 (F.S.
If not indicated otherwise in the legends, the illustrations in this document correspond to Capacitance Diaphragm Gauges with the DN 16 ISO-KF vacuum connection. They apply to other vacuum connections by analogy. We reserve the right to make technical changes without prior notice. All dimensions in mm. Intended Use The Capacitance Diaphragm Gauges are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 3).
Scope of Delivery 1× Capacitance Diaphragm Gauge 1× Pin 1× Calibration Test Report 1× Operating Manual CDG025-OP-LIT (2010-1) 5
Contents Product Identification Validity Intended Use, Function Trademarks, Patents Scope of Delivery 2 3 4 4 5 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 7 7 7 8 8 2 Technical Data 9 3 Installation 3.1 Vacuum Connection 3.2 Electrical Connection 14 14 17 4 Operation 4.1 Displays 4.2 Zeroing the Gauge 4.2.1 Adjustment 4.
1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice 1.
1.3 General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. • Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document. • Before beginning to work, find out whether any vacuum components are contaminated.
2 Technical Data Measurement range Accuracy 1) Temperature effect on zero ≥10 Torr (F.S.) 1 / 2 Torr (F.S.) Temperature effect on span Resolution Gas type dependence Output signal analog (measuring signal) Voltage range Measuring range Relationship voltage-pressure Output impedance Loaded impedance Response time Gauge identification RS232C interface Transmission rate Data format Connection → "Validity" 0.20% of reading 0.0050% F.S./ °C 0.015% F.S./ °C 0.01% of reading / °C 0.003% F.S. none –5 … +10.
Supply DANGER The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused. Supply voltage at the gauge ripple Current consumption +14 … +30 VDC Class 2 / LPS ≤1 Vpp <500 mA (max.
Materials exposed to vacuum Flange, tube Sensor and diaphragm Sensor–diaphragm connection Ceramics–metal connection stainless steel AISI 316L ceramics (Al2O3 ≥99.5%) glass ceramics solder AgTiCu hard solder, Vacon 70 (28% Ni, 23% Co, 49% Fe) Internal volume ≤3.6 cm3 Admissible pressure (absolute) ≥200 Torr (F.S.) 1 … 100 Torr (F.S.
55 26 44 69 3.
Analog Measuring Signal vs. Pressure Pressure p 1.1×F.S. 1.0×F.S. 0.9×F.S. 0.8×F.S. 0.7×F.S. 0.6×F.S. 0.5×F.S. 0.4×F.S. 0.3×F.S. 0.2×F.S. 0.1×F.S. 0.0×F.S. 0 1 2 3 4 5 6 7 8 9 10 Measuring signal Uout [V] p = (Uout / 10 V) × p (F.S.) Conversion Torr ↔ Pascal Torr c 1.00 mbar 2) 1013.25 / 760 = 1.3332… Pa 2) 101325 / 760 = 133.3224… Example: Gauge with 10 Torr F.S. Measuring signal Uout = 6 V p = (6 V / 10 V) × 10 Torr = 0.
3 Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use the type clamps which are suited to overpressure.
DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010: • CF and VCR flanges fulfill this requirement. • For gauges with a KF flange, use a conductive metallic clamping ring. • For gauges with a ½" tube, take appropriate measures to fulfill this requirement.
Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 19). Remove the protective lid and connect the product to the vacuum system.
3.2 Electrical Connection Make sure the vacuum connection is properly made (→ 14). DANGER The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused. Ground loops, differences of potential, or EMC problems may affect the measurement signal.
If no sensor cable is available, make one according to the following diagram. Ident TxD RxD 100k 100nF 18 V 10 10 13 14 2 12 7 11 5 15 case Electrical connection Pin 2 Signal Output 1 9 Pin 5 Supply common, GND Pin 7, 11 Supply Pin 10 Gauge identification Inficon 15 8 Pin 12 Signal common Pin 13 RS232, TxD Pin 14 RS232, RxD D-Sub,15-pole Pin 15 Housing (Chassis Ground) female case Connector case soldering side 18 Connect the sensor cable to the gauge and secure it using the lock screws.
4 Operation Put the gauge into operation. If you are using a Nor-Cal controller, select the measurement range. A warm-up time of at least 15 minutes should be allowed; for exact pressure measurements a warm-up time of at least 2 hours is required. 4.1 Displays RUN LED 4.2 ZERO State lit Meaning Measurement mode flashing Other mode, error Zeroing the Gauge The gauge is factory calibrated while "standing upright" (→ "Calibration Test Report").
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical and horizontal mounting orientation is: F.S. ∆U / 90° 1000 Torr 100 Torr 10 Torr 1 Torr ≈2 mV ≈10 mV ≈50 mV ≈300 mV If the gauge is operated via a controller, the zero of the whole measuring system has to be adjusted on the controller: first, adjust the zero of the gauge and then, the zero of the controller. 4.2.
Briefly press the button with a pin (max. ø1.1 mm). The zero adjustment runs automatically. The LED flashes until the adjustment (duration ≤8 s) is completed. Press the button briefly max. ø1.1 mm After zero adjustment the gauge automatically returns to measurement mode. The LED lits. The zero can also be adjusted via the RS232C interface (→ [1]).
It also permits to adjust an offset of the characteristic curve in order to • compensate for the offset of the measuring system or • obtain a slightly positive zero for a 0 … 10 V AD converter. The offset should not exceed 2% of the F.S. (+200 mV). At a higher positive offset, the upper limit of the measurement range is exceeded. Recommended procedure for adjusting the offset of a measuring system: → Notice 20. Operate the gauge for at least ¼ hour (until the signal is stable).
Push the button again: Fine adjustment within 0...3 s: Change of direction within 3...5 s: the zero adjustment value changes by one unit (push button in intervals of 1 s) the zero adjustment changes its direction (the flashing frequency of the LED changes briefly) If the button is released for more than 5 s, the gauge returns to the measurement mode. The zero with Base-Pressure-Offset can also be adjusted via the RS232C interface (→ [1]).
5 Deinstallation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Vent the vacuum system. Put the gauge out of operation. Unfasten the lock screws and disconnect the sensor cable. Remove the gauge from the vacuum system and install the protective lid.
6 Maintenance, Repair Under clean operating conditions, the product requires no maintenance. Gauge failures due to contamination are not covered by the warranty. We recommend checking the zero at regular intervals (→ 20). Nor-Cal assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. 7 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g.
8 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING N WARNING: substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Further Information [1] 28 www.n-c.com Communication Protocol RS232C Interface tnra49e1 Nor-Cal Products, Inc.
Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff. Description of product Reason for return Type Part number Serial number Operating fluid(s) used (Must be drained before shipping.
ETL Certification 3103457 30 ETL LISTED The Capacitance Diaphragm Gauge complies with the requirements of the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22 CAN/CSA C22.
EC Declaration of Conformity We, Nor-Cal Products, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
1967 South Oregon St. Yreka, CA 96097, USA Tel: 800-824-4166 Fax: 530-842-9130 Original: English tnna49e1 (2009-11) t nna49e1 www.n-c.
