Automated IC Inspection Microscope L200A Automated IC Inspection Microscope
The next generation in automated IC inspection microscopy The Eclipse L200A has scored major advances in the standardization of inspection and safeguards against contamination. In a new design that combines motorized control with automated operation, observation conditions can be programmed for each individual objective or for each substrate to be inspected. Focus position, objective magnification, illumination control and other microscope methods are fully programmable and can be recalled instantly.
Easy configuration into an automated inspection system Programmed settings As an inspection process varies depending on substrate, layer, and even the operator, it has been necessary to readjust settings for each inspection process. The L200A's programming feature eliminates this process. You just select the settings-such as observation method, objective magnification, point to be checked, focus position, aperture, and light intensity-and save them by attaching appropriate file names.
Top-notch basic performance facilitates inspections Optical System SEMI S2-93A, S8-95 compliant design ECLIPSE L200A Nikon's renowned CFI60 optics are the fusion of CF design and infinity optics. These new optics feature longer working distances and high N.A.'s. They also produce brighter images with more contrast and reduced flare. High-contrast darkfield images A new illumination system produces a Signal to Background (S/B) ratio that is nearly three times greater than former models.
Dimensional diagram (When AF Module is mounted) 798-816 (31.4-32.1) 324-342 (12.8-13.5) 160 (6.3) 180 (7.1) 175 (6.9) 360 (14.2) 157 (6.2) 798-816 (31.4-32.1) 430 (16.9) 244 (9.6) 662 (26.1) 429-544 (16.9-21.4) E.P. 373 (14.7) 649 (25.6) 653 (25.7) max. 189 (7.4) 473 (18.6) max. Unit: mm (inch) Specifications Observation method Brightfield, darkfield, DIC, simple polarizing Main body Episcopic stand, Power supply built-in Focusing mechanism Stroke: 29mm, Coarse: 12.
