Operation Manual

48. Failure Mode Request
Function
The external control equipment inquires the detection of failures of the plasma
monitor.
Transmission Data
1FH 80H 60H 3FH 00H CKS
ACK
The plasma monitor returns the following ACK:
7FH 60H 80H 3FH 02H DATA00 DATA01 CKS
DATA00: FAILURE MODE 1
Bit 0 : PDP MODULE
0: Abnormal
1: Normal
Bit 1 : 1: fixed (backup)
Bit 2 : TEMPERATURE
0: Abnormal
1: Normal
Bit 3 : FAN
0: Abnormal
1: Normal
Bit 4 : TEMPERATURE SENSOR
0: Abnormal
1: Normal
Bit 5 : 1: fixed (backup)
Bit 6 : 1: fixed (backup)
Bit 7 : 1: fixed (backup)
DATA01: FAILURE MODE 2
Bit 0-7 : 1: fixed (backup)
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