No. 99MBC094A SERIES No. 544 LSM-500S/501S/503S/ 506S/512S/516S Laser Scan Micrometer (Measuring Unit) User’s Manual Read this User’s Manual thoroughly before operating the instrument. After reading, retain it close at hand for future reference.
CONVENTIONS USED IN USER’S MANUAL Mitutoyo manuals use various safety signs. The visual cues and the contents of description appended to each cue are described below. Safety Precautions To ensure that instruments are operated correctly and safely, Mitutoyo manuals use safety signs (Signal Words and Safety Alert Symbols) to identify and warn against hazards and potential accidents.
CONVENTIONS USED IN USER’S MANUAL Various Types of Notes The following types of notes are provided to help the operator obtain reliable measurement data through correct instrument operation. IMPORTANT • An important note is a type of note that provides information essential to the completion of a task. You cannot disregard this note to complete the task. • An important note is a type of precaution, which if neglected could result in a loss of data, decreased accuracy or instrument malfunction/failure.
NOTES FOR EXPORTING Before exporting this product confirm the final purpose of use at the export destination to prevent the product from being used for developing weapons of mass destruction or military affairs. In the case of export to the U.S., this product requires an application for prior approval of CDRH (Center for Devices and Radiological Health) in FDA (Food and Drug Administration). An additional cost generates in application procedure. For detailed information consult a Mitutoyo sales office.
INSTALLATION CONDITIONS The Mitutoyo Laser Scan Micrometer LSM-500H series is an instrument for indoor use. Also, this series is a precision optical instrument and a precision electronic instrument. Therefore, it must be carefully installed and the following conditions must be taken into account to attain the highest possible accuracy. Mitutoyo assumes no liability for any accident or damage caused by use of this instrument not conforming to these conditions. iv 1.
WARRANTY This instrument has been manufactured under rigorous Mitutoyo quality control. Should it malfunction under normal use within one year from the date of original purchase, it will be repaired or replaced, at our option, free of charge. Contact your dealer or the nearest Mitutoyo representative for more information. However, the following damages may be subject to a repair charge even if damage occurs within the warranty period: 1.
CONTENTS CONVENTIONS USED IN USER’S MANUAL....................................................................................................i NOTES FOR EXPORTING................................................................................................................................iii INSTALLATION CONDITIONS.........................................................................................................................iv WARRANTY .............................................................
4.4.2 4.5 4.6 5. Confirming the optical axis with an oscilloscope...........................................................4-5 Measurement with Two Measuring Units ...................................................................................4-6 4.5.1 DXY type..............................................................................................................................4-6 4.5.2 DF type ................................................................................................
MEMO viii No.
1 1 INTRODUCTION This chapter describes the maintenance and inspecton of the Laser Scan Micrometer (LSM) measuring unit. 1.1 Outline The Laser Scan Micrometer is a high-precision laser measuring system that performs non-contact dimensional measurements with a high-speed scanning laser beam.
1.3 Inspection and Maintenance This section describes the inspection and maintenance procedures of the measuring unit. 1.3.1 Laser emission display LED The Laser Emission Display LED that is provided on the rear side lights while the laser is being emitted to call the operator’s attention for safety. Do not look the laser beam. Laser emission display LED 1.3.2 Cleaning optical parts To clean the optical parts, turn off the power switch and disconnect the signal cable for safety.
1. INTRODUCTION 1.3.3 Replacing the protective glass and the condenser lens Follow the procedures below to remove the protective glass for replacement or cleaning. To replace the protective glass, first turn off the power switch, then disconnect the signal cable for safety. Model LSM-501S/LSM-503S/LSM-506S/LSM-512S/LSM-516S Removing steps Unscrew the screws that secure the protective glass. Remove the protective glass and the rubber packing.
MEMO 1-4 No.
2 2 CALIBRATION The accuracy of the instrument has been verified by two-point calibration using two reference gages. High-precision calibration is possible and simple to perform, as mentioned in the User’s Manual attached to the display unit. Calibrate the instrument properly. Types and sizes of the calibration gages are as follows: Model LSM-500S LSM-506S LSM-512S φ 1mm φ 2mm φ 10mm With-holder Straight φ 30mm Straight type LSM-516S φ 20mm With-holder With-holder type No.
2.1 Calibration Gage 2.1.1 With-holder type： z z The center point of the gage, which is indicated by an arrow (Æ), is the calibration point. Set up the gage on the stand so that the laser beam is aligned with the vertical line ( | ) marked on the side of the gage holder. 2.1.2 Straight type： z z The center point of the marks ( || ) of the gage, which is indicated by an arrow (Æ), is the calibration point. Set up the gage on the stand so that the mark ( | ) on the end face of the gage comes to vertical.
3 SPECIFICATIONS OF MEASURING UNIT 3 This chapter gives the specifications of the following models. Model No. 99MBC094A Measuring range Code No. LSM-500S φ 0.005mm to φ 2mm 544-532 LSM-501S φ 0.05mm to φ 10mm 544-534 LSM-503S φ 0.
3.1LSM-500S （1）Specifications MODEL Order No.
3. SPECIFICATIONS OF MEASURING UNIT （4）External dimensions Unit：mm (inch) 【Mass】 z Measuring unit z Signal cable No. 99MBC094A ： 1.0 kg ： 0.
3.2LSM-501S （1）Specifications MODEL Order No.
3. SPECIFICATIONS OF MEASURING UNIT （4）External dimensions Unit：mm (inch) 【Mass】 z Emission unit z Reception unit z Base z Signal cable No. 99MBC094A ： ： ： ： 0.7 kg 0.4 kg 0.3 kg 0.
3.3LSM-503S （1）Specifications MODEL Order No.
3. SPECIFICATIONS OF MEASURING UNIT （4）External dimensions Unit：mm (inch) 【Mass】 z Emission unit z Reception unit z Base z Signal cable No. 99MBC094A ： 1.1 kg ： 0.6 kg ： 0.5 kg ： 0.
3.4LSM-506S （1）Specifications MODEL Order No.
3. SPECIFICATIONS OF MEASURING UNIT （4）External dimensions Unit：mm (inch) 【Mass】 z Emission unit z Reception unit z Base z Signal cable No. 99MBC094A ： 1.4 kg ： 0.8 kg ： 0.8 kg ： 0.
3.5LSM-512S （1）Specifications MODEL Order No.
3. SPECIFICATIONS OF MEASURING UNIT （4）External dimensions Unit：mm (inch) 【Mass】 z Emission unit z Reception unit z Base z Signal cable No. 99MBC094A ： 3.0 kg ： 1.2 kg ： 1.8 kg ： 0.
3.6LSM-516S （1）Specifications MODEL Order No.
3. SPECIFICATIONS OF MEASURING UNIT （4）External dimensions Unit：mm (inch) 【Mass】 z Emission unit z Reception unit z Base z Signal cable No. 99MBC094A ： 7.6 kg ： 3.7 kg ： 2.8 kg ： 0.
MEMO 3-14 No.
4 4 DESIGNING THE FIXTURES This chapter describes precautions to be observed when attaching the emission unit and the reception unit, which have been detached from the support base of the measuring unit, to a specially arranged dedicated fixture. 4.1 Outline In application, the emission unit and the reception unit may have to be detached from the support base of the measuring unit and attached to a dedicated fixture.
4.2.2 On measuring gap For measuring segment 1, as in the case of measuring the runout, be sure to arrange a reference pin or knife-edge at the focal point, as shown on the right. The inclination of the reception signal becomes large, resulting in degraded repeatability, unless the reference pin is provided. 4-2 Reference pin or knife-edge Segment 1 Workpiece No.
4. DESIGNING THE FIXTURES 4.3 Optical Axis Alignment The optical axis of each measuring unit should be aligned to within the limits shown below. 4.3.1 Optical axis alignment in horizontal plane b. Angular deviation in reference lines C and D by θx in angle. a. Parallel deviation in reference lines C and D by X in width direction. Reference line C Reference line D Reference line C θx X 4.3.2 Optical axis alignment in vertical plane c. Parallel deviation in reference planes A and B by Y in height.
4.4 Confirming the Optical Axis The optical axis of a measuring unit can be confirmed by the following methods. 4.4.1 Confirming with the laser beam As shown on the right, the red laser beam is visible on a piece of white paper placed on the reception window. Adjust it so that the incidence of the laser beam is in the center of the reception window. The incidence should be in the center horizontally and at the position where “a” is equal to “b” vertically.
4. DESIGNING THE FIXTURES 4.4.2 Confirming the optical axis with an oscilloscope To monitor with an oscilloscope, use the two monitor connectors provided on the rear panel of the display unit, “SCAN SIG.-1” and “SCAN SIG.-2”, for measuring unit 1 and measuring unit 2, respectively. Oscilloscope setting: Vertical sensitivity : 0.1V/DIV for a probe of 1/10 Horizontal sensitivity : 50μs/DIV Among the waveforms shown below, (a) represents the waveform of normal light reception.
4.5 Measurement with Two Measuring Units To perform dual measurement with a combination of two measuring units, each measuring unit must have been optically aligned. Refer to “4.3 Optical Axis Alignment” for more information. Also note that the appropriate considerations must be taken into account according to the type of dual measurement, DXY type or DF type. 4.5.
4. DESIGNING THE FIXTURES (3) Confirming the presence of reflecting light With the segment set to 1, close the shutter of the emission unit on the X axis, then check that the reflection light from the Y axis will not be directed into the reception window of the X axis. Allow 5 to 10 minutes for this check of the reflecting light as scanning beams from the X axis and the Y axis are asynchronous. Under the normal state, the Err-0 message will be displayed. Perform the same check with the Y axis.
4.5.2 DF type In a DF-type setup shown below, a workpiece of a larger diameter can be measured by measuring the gap between two measuring units 1 and 2 and referring to the predetermined offset value of the reference gage. (1) Improvement of the measurement accuracy ・ To ensure better measuring accuracy of gap measurement, use reference pins or knife-edges as located at the focal point.
4. DESIGNING THE FIXTURES ・ Size of reference pins The diameter of the reference pin should be such that it can block the laser beam by more than 2 mm and the beam will not cross the pin. A pin of about 10 mm diameter would meet such a requirement. The setup must also be fairly robust so that the gap between the reference pins will not change while in service.
(3) Precautions for transparent object measurement To measure a larger diameter transparent glass rod, the external diameter of a plastic object, or the width of a transparent sheet, arrange the measuring units with the support bases fitted so the scanning laser beams are opposing one another, and set the segment to (1 + 5). If the laser scanning direction of each unit is reversed to the direction shown below, measurement will be disabled.
4. DESIGNING THE FIXTURES 4.6 Radius of Cable Bend The signal cables and the connecting cable will break if bent to an excessively small radius. Allow sufficient space for bending cables according to the figures below. Cable space : more than 80 (3.2”) Cable space : more than 70 (2.8”) Signal cable R20 (.79”) or more Signal cable R10 (.4”) or more R20 (.
MEMO 4-12 No.
5 5 SAFETY PRECAUTIONS FOR LASER BEAM 5.1 Caution CAUTION The LSM-500S series uses a low powered, visible laser beam which has been designed for safe operation. However, observe the following points when setting up and operating. 1) This measuring unit conforms to IEC 60825-1, the safety code for lasers. This code was established in January, 2001. 2) This unit is a “Class 2 laser product”, as defined by IEC code.(Maximum output power: 1.
5.2 Safety Precaution Labels Located on LSM-500S Series Laser Emission LED 5-2 Shutter No.
SERVICE NETWORK Mitutoyo America Corporation Illinois Repair Service 958 Corporate Blvd., Aurora, IL. 60504, U.S.A. TEL: (630) 820-3334 FAX: (630) 820-2530 Michigan Repair Service 45001 Five Mile Rd., Plymouth, MI 48170, U.S.A. TEL: (734) 459-2810 FAX: (734) 459-0455 Los Angeles Repair Service 16925 East Gale Ave., City of Industry, CA 91745, U.S.A.
[MEMO]
[MEMO]
Mitutoyo Corporation 20-1, Sakado 1-chome, Takatsu-ku, Kawasaki, Kanagawa 213-8533, Japan Phone: 81-44-813-8230 Fax: 81-44-813-8231 Home page: http://www.mitutoyo.co.jp/global.
