Instruction manual

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1. FUNCTIONS AND CONFIGURATION

1.1 Introduction

In fields of semiconductor and liquid crystal related equipment, installed machine, etc. with strong demands

for high accuracy, high-speed and high efficiency, the system using the linear servo motor for drive shaft is

increasing. Since the linear servo system can obtain the characteristics of the high-speed and the high

acceleration/deceleration greater than the ballscrew drive system, and does not have a ballscrew wear

which is a weak point in the ballscrew drive system, it can extend the life of the equipments. In addition, a

response error does not occur and so the high accuracy system can be established.

The following shows the differences between the linear servo motor and the rotating servo motor.