Specifications

STATION NO.
X10 X1
5
0
1
4
6
2
3
5
0
1
46
9
2
3
7
8
0
1
4
2
3
A
J65BTB1-16D
0
PW
123456789ABCDEF
L RUN SD RDL ERR.
DA DG
DB SLD
(FG)
135
79111315
17
19
21 23
25 27
2
468
10
12
14 16 18 20
22 24
26
+24V
24G
B RATE
STATION NO.
X10 X1
5
0
1
4
6
2
3
5
0
1
4
6
9
2
3
7
8
0
1
4
2
3
A
J65BTB1-16D
0
PW
123456789ABCDEF
L RUN SD RDL ERR.
DA DG
DB SLD
(FG)
135
7 9 11 13 15
17
19
21 23
25 27
2
468
10
12
14 16 18 20
22 24
26
+24V
24G
B RATE
STATION NO.
X10 X1
5
0
1
46
2
3
5
0
1
46
9
2
37
8
0
1
4
2
3
A
J65BTB1-16D
0
PW
123456789ABCDEF
L RUN SD RDL ERR.
DA DG
DB SLD
(FG)
135
7 9 11 13 15
17
19
21 23
25 27
2
468
10
12
14 16 18 20
22 24
26
+24V
24G
B RATE
QJ71NES96
Q06UDHCPU
MODE
RUN
ERR
USER
BAT
BOOT
USB
USB
PULL
RS-232
PULL
POWER
Q64P
QJ61BT11N
QI60
B
Sample application /// Semiconductor fabrication /// Sample application /// Semiconductor /// Automation solutions /// Automation solutions /// Automation solutions /// Automation
14
Mitsubishi offer a wide range of automation equipment from PLCs and HMIs to CNC and EDM machines
A name to trust
Since its beginnings in 1870, some
45 companies use the Mitsubishi name,
covering
a spectrum of finance, commerce
and industry.
The Mitsubishi brand name is recognized
around the world as a symbol of premium
quality.
Mitsubishi Electric Corporation represents
space development, transportation, semi
-
conductors, energy systems, communi-
cations and information processing,
audio
visual
equipment, home electron
-
ics, building and energy management and
automation systems, and has 237 factories
and laboratories worldwide in over
121 countries.
Robots
Motion control and servos
Inverters
HMI and GOTs
Micro PLCs
EDM machines
CNC
controllers
Laser machines
LV circuit protection
Modular PLCs
A world of
automation solutions
ThisiswhyyoucanrelyonaMitsubishi
automation solution – because we know
first hand about the need for reliable,
efficient, easy-to-use automation and
control.
As one of the world’s leading companies
with a global turnover of 3.4 trillion Yen
(approximately $30.8 billion), employing
over 100,000 people, Mitsubishi Electric
has the resource and the commitment to
deliver the ultimate in service and support
as well as the best products.
Platen
Carrier/chuck
Pad (polish)
Wafer
Pad conditioner
World wide market
challenges with
productronic
Today electronic is an important part of our
daily life. It helps to make our life more con-
venient, safe and ensure the energy supply
for tomorrow. Faster smaller and cheaper
components will lead the trend of pene-
trating our world even more than today. In
order to do so, an enormous pressure for
extremely fast development of technology
and integration is not only the challenge
for the electronic developer but also for the
designer of the production facilities. Need-
less to say that such facilities can be build
only with the necessary know how and
automation components which are out-
standing in performance and quality.
Mitsubishi Electric is the market leader in
the area where electronic production is
established. As one of the target markets
Mitsubishi offers as well the know how as
the products for reliable, stable and high
efficiency productronic systems.
Semiconductor
fabrication
Chemical mechanical
polishing (CMP)
In the sample application shown above
Mitsubishi servo motors rotate the polish-
ing pads and wafer platens, and they are
also used in the handling devices and the
axes that move the polishing pads.
The exceptionally dynamic performance of
the servo motors enables faster handling, in-
creasing the throughput of the entire system.
As processing progresses the wafers get
thinner and their diameters simultaneously
increase, making them increasingly fragile.
The movements executed by the wafer
handling drives must thus be fast but very
smooth, without any sudden shocks or
vibrations. The positioning precision of the
axes that move the polishing pads must be
very high to prevent unnecessary stresses
on the wafers. In addition to this the polish-
ingpadsabovemustbeperfectlysynchro-
nised with the wafer platens below to meet
the exacting specifications of the polishing
process. The servo components from
Mitsubishi Electric pass all these tests with
flying colours.
Systems of this kind are installed in clean
rooms, which means that the size of the
system is a key factor in the total cost of
operation (TCO). The Mitsubishi compo-
nents are so compact that the switchgear
cabinet can be integrated in the machine
bed, saving valuable space. Quick and easy
wiring and an optimum price-performance
ratio are added benefits.
Wafer
Cleaning fluid
Wafer deposit
ERP/MES
Ethernet
QD Motion CPU
Universal model QnUD CPU
Power supply
MES interface
CC-Link Master
CC-Link IE
Q BUS
CC-Link IE
Sensor s Temperature
controller
Valves
Polish and cleaning control
Transfer
control
Loader
control
Carrier
control