Specifications

Providing solutions specific to IT industry
Semiconductor (CMP system) solution example
Following the semiconductor industry’s trend to
300mm technology
LCD (CVD system) solution example
Leading the manufacturing trends of LCD panels
which continue to increase in size.
CMP system configuration example
Host computer
Transfer/loader controller
Bus connection
GOT (HMI)
MELSECNET/H
Servo for wafer transfer
mechanism
Servo
amplifier
Servo motor
Polish controller Washing controller
Digital I/O
Bridge module etc.
Pressure sensor Digital I/O
Temperature controller Vibration sensor
Solenoid valve Optical thickness sensor
Sensor
Valve
Temperature controller
MFC