Specifications
Selection Guide
Accuracy
3+3ML/1,000μmp-p
5+5ML/1,000μmp-p
3+3ML/1,000μmp-p
5+5ML/1,000μmp-p
Measurement length
(ML: mm)
70mm-2,040mm
140mm-3,040mm
Type
SR77
SR75
SR74
SR87
SR85
SR84
Linear scale
Rotary
Output signal
Absolute serial
bidirectional signal
Incremental serial
bidirectional signal
A quad B signal Ref.
point.
Line driver signal
Absolute serial
bidirectional signal
Incremental serial
bidirectional signal
A quad B signal Ref.
point.
Line driver signal
Absolute serial
bidirectional signal
Resolution
0.01μm, 0.05μm,
0.1μm, 0.5μm, 1μm
0.01μm, 0.05μm,
0.1μm, 0.5μm, 1μm
Maximum output
pulse counts
2
25
=33,554,432p.p.r
Cross section
17.6
57.9
29
78
42
ø110
Page
30
34
34
22
26
26
RU77
38
360°
±2.5
second
6 7