Specifications

DRAFT

Normal start up movement

(when the program timer is activated.)

During the Program timer

(“32 minutes later after the close down check” to “The time to

start the temperature adjustment”)

(The time to start the temperature adjustment)

The power supply is ON. (200V supply) The power supply of

peripheral CPU is ON.

The PC is started up.

“The processing solution temperatures are being adjusted” is displayed (on the

monitor).

After the temperature adjustment is completed, “Would you like to proceed to the

operation mode?” is displayed (on the monitor).

Press [YES] key to go to the operation mode.

QSS-30-3