User`s guide

9 Design Case Studies
9-34
The model data for each axis is summarized below.
Model Data for the x-Axis
Model Data for the y-Axis
LQG Design for the x-Axis
As a first approx ima tio n, ig no re the cros s-co u pling between the - and -axes
and treat each axis independentl y. That is, de si gn one SISO LQ G regulato r for
each axis. The des ig n ob je ctive is to reduce the thick nes s var iat ions and
due to eccentricity and input thi ckness disturbances.
H
x
s()
2.4 10
8
×
s
2
72s 90
2
++
-------------------------------------=
F
ix
s()
10
4
s 0.05+
--------------------=
F
ex
s()
310
4
× s
s
2
0.125s 6
2
++
------------------------------------------=
g
x
10
6–
=
H
y
s()
7.8 10
8
×
s
2
71s 88
2
++
-------------------------------------=
F
iy
s()
210
4
×
s0.05+
--------------------=
F
ey
s()
10
5
s
s
2
0.19s 9.4
2
++
--------------------------------------------=
g
y
0.5 10
6–
×=
x
y
δ
x
δ
y