Hardware manual

3-18 Agilent 7500 Series ICP-MS Hardware Manual
3 Startup, Shutdown and Status
Typical Meter Values for the Vacuum System
Refer to the following meter values when the error occurs.
1 After the vacuum is ON
The Agilent 7500 goes back to Shutdown mode.
2 After the plasma is OFF
The Agilent 7500 goes back to Shutdown mode.
3 After the plasma is OFF
The Agilent 7500 goes back to Shutdown mode.
Table 4
Parameters Limit Conditions
Backing pressure
(IF/BK)
> 100 Pa if BK is higher, even 60 seconds after the vacuum is ON.
Backing pressure
(IF/BK)
> 25 Pa if BK is higher, even 70 minutes after the vacuum is ON.
Analyzer pressure (AN) > 5 x 10
-4
Pa if AN is higher, even 5 hours after the vacuum is ON.
Table 5
Parameters Limit Conditions
Interface pressure
(IF/BK)
> 450 Pa if IF is higher, even 2 minutes after the IF pump is ON.
Analyzer pressure (AN) > 1.2 x 10
-3
Pa if AN is higher, even 3 minutes after the gate valve is
opened.
Table 6
Parameters Limit Conditions
Analyzer pressure (AN) > 5 x 10
-4
Pa if AN is higher, even 15 seconds after the gate valve is
closed.