Hardware manual

1-20 Agilent 7500 Series ICP-MS Hardware Manual
1Overview
Interface Chamber
The interface chamber is located between the sampling cone and the skimmer
cone. A rotary pump evacuates the interface chamber.
Ion Lens Chamber
The ion lenses are located in the ion lens chamber. A turbomolecular pump
evacuate the ion lens chamber.
Analyzer Chamber
The mass filter and the detector are located in the analyzer chamber. A
turbomolecular pump evacuates the analyzer chamber.
The rotary pump is also used for pumping the interface chamber
turbomolecular pump.
RF Generator
This system supplies RF power to the work coil to generate plasma.
The RF generator consists of a RF driver, RF power amplifier, and an
impedance matching circuit.
The driver generates the 27.12 MHz RF.
The impedance matching circuit is located between the work coil and the RF
power amplifier. This circuit matches the impedance of the work coil to supply
maximum RF power to the plasma. The impedance matching is controlled
automatically.