Hardware manual

Overview 1
Agilent 7500 Series ICP-MS Hardware Manual 1-11
Figure 6 Water and Gas Flow Diagram
P
T
DP
BP
TP
P
P
P
DP
BP
P
DP
BP
DP
BP
DP
BP
Exhaust Duct
SAMPLE
INTRODUCTION
AREA
Nebulizer
Spray
Chamber
Peristaltic
Pump
Peristaltic
Pump
Sample Inlet
Drain Vessel
Drain Tray
ICP
TORCH BOX AREA
GAS
CONTROL
ASSY
WATER VALVE AND
SENSOR ASSY
Work
Coil
3rd Gas
Inlet
He Inlet
H
2 Inlet
7500ce/cs/cx (with H
2
upgrade)
Stop
Solenoid
Valve (Opt)
Stop
Solenoid
Valve
3rd Mass Flow
Controller
Bypass
Solenoid
Valve
Pressure Gauge :
Thermo Sensor :
Back Pressure Gauge :
Defferential Pressure Gauge :
PSVProportional Solenoid Valve :
Vacuum Exhaust Line :
Gas Line :
Cooling Water Line :
Drain
Agilent 7500
ICP-MS
Option Gas
Inlet
Argon Gas
Inlet
Argon
Gas
Solenoid
Valve
Option Gas
Solenoid Valve
Mass Flow
Controller
Filter
Filter
Spray
Chamber
RF Generator
Water
Solenoid
Valve 1
Cooling
Water
Inlet
Cooling
Water
Outlet
Water
Solenoid
Valve 2
Flow
Sensor
Backing &
I/F
Pirani
Sensor
I/F
Solenoid
Valve
Backing
Solenoid
Valve
Interface
Chamber
Ion Lens
Chamber
Analyzer
Chamber
Turbo
Molecular
Pump
EM
Gate
Valve
Purge Valve
Filter
Vent
Valve
ANALYZER ASSY AREA
VAC
VALVE
ASSY
Penning
Gauge
Rotary
Pump
Exhaust
Inlet
Drain
Vessel
Steam
Inlet
Rotary Pump
Makeup
PSV
Orifice
Auxiliary
PSV
PSV Restrictor
PSV Restrictor
Carrier
PSV
Plasma
PSV
Evacuation Assist
Valve
(on 7500cx with
H
2
upgrade)