Hardware manual

5-26 Agilent 7500 Series ICP-MS Hardware Manual
5 Troubleshooting
• The connector of the turbomolecular pump (A) came off.
• Faulty turbomolecular pump power (S75).
• Faulty turbomolecular pump (A) or turbomolecular pump controller (A).
• There is a fault in the System I/O Board.
1147 Error: Gate valve did not close when Plasma off.
The gate valve does not close when plasma is extinguished.
Check the operation of the gate valve. The following causes are inferred.
• Faulty gate valve.
• There is a fault in the System I/O Board or the gate valve connector board.
1148 Error: Turbo pump cooling fan malfunction.
The number of revolutions of the turbomolecular pump cooling fan went down
abnormally or stopped (In Standby Mode).
1149* Error: Vacuum pressure (BK) is too high to keep the turbos on.
As vacuum pressure (BK) exceeds the limit, the turbomolecular pump cannot
be kept on (In Standby Mode).
Check the backing line pressure. The following causes are inferred.
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
(When the instrument is changing from Analysis Mode to Standby Mode).
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring).
• There is a fault in the backing Pirani gauge or the System I/O Board.
1149* Error: Vacuum pressure (IF/BK) is too high to keep the turbos ON.
As vacuum pressure (IF/BK) exceeds the limit, the turbomolecular pump
cannot be kept on (In Standby Mode).
Check the vacuum pressure (IF/BK). The following causes are inferred.
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
• The rotary pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring).
• There is a fault in the Pirani gauge (IF/BK) or the System I/O Board.