Hardware manual

5-22 Agilent 7500 Series ICP-MS Hardware Manual
5 Troubleshooting
Check the number of revolutions and the current of the turbomolecular pump
(A), vacuum pressure (AN), vacuum pressure (BK), and S75 power voltage. The
following causes are inferred.
• A rise in the vacuum pressure.
• The connector of the turbomolecular pump (A) came off.
• Faulty turbomolecular pump power (S75).
• Faulty turbomolecular pump (A) or turbomolecular pump controller (A).
• There is a fault in the System I/O Board.
1133* Error: Turbo pump not at desired speed.
The number of revolutions of the turbomolecular pump went below the limit
(When the instrument is changing from Shutdown Mode to Standby Mode).
Check the number of revolutions and the current of the turbomolecular pump,
vacuum pressure (AN), vacuum pressure (IF/BK), and S75 power voltage. The
following causes are inferred.
• A rise in the vacuum pressure.
• The connector of the turbomolecular pump came off.
• Faulty turbomolecular pump power (S75).
• Faulty turbomolecular pump or turbomolecular pump controller.
• There is a fault in the System I/O Board.
1134 Error: Gate valve did not open.
When the instrument transits the Standby mode to Analysis mode, it failed to
open the gate valve (When the instrument is changing from Standby Mode to
Analysis Mode).
Check the operation of the gate valve. The following causes are inferred.
• The gate valve connector came off.
• The gate valve is defective.
• There is a fault in the System I/O Board or the gate valve connector board.
1135 Error: Gate valve malfunction, Valve closed after open.
The gate valve closes when the instrument is changing from Standby Mode to
Analysis mode.
This could happen when the plasma is suddenly extinguished and the interlock
system automatically closes the gate valve. If the gate valve closes while the
plasma is on, check the gate valve operation. The following causes are inferred.
• The optical cable of the plasma sensor came off.
• The optical cable of the plasma sensor is defective.
• The gate valve connector came off.
• There is a fault in the System I/O Board or the gate valve connector board.
1136 Error: Turbo Pump (I) not at desired speed.
The number of revolutions of the turbomolecular pump (I) went below the limit
(When the instrument is changing from Standby Mode to Analysis Mode).