Hardware manual

Troubleshooting 5
Agilent 7500 Series ICP-MS Hardware Manual 5-21
Check the pressure of the analyzer chamber and the interface line. The
following causes are inferred.
• The diameter of the hole in the sampling cone is too big.
• The seal of the sampling cone is incomplete (Defective O- ring).
• The plasma is too far from the sampling cone.
• The diameter of the hole in the skimmer cone is too big.
• Installation of the skimmer cone and skimmer base is incomplete.
• Installation of the ion lenses is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
• The rotary pump oil level is low or the oil is dirty.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring).
• The vacuum pressure (AN) cannot measure correctly due to the failure of
the Penning gauge.
• A drop of water was introduced into the vacuum chamber.
1130 Error: Penning gauge (AN) malfunction.
The Penning gauge is working abnormally (When the instrument is changing
from Analysis Mode to Standby Mode).
1131 Error: Vacuum pressure (AN) time out, Vacuum too high after the
gate valve closed.
The vacuum pressure (AN) exceeds the limit. The instrument cannot transit to
Standby mode (When the instrument is changing from the Analysis Mode to
Standby Mode).
Check the pressure of the analyzer chamber. The following causes are inferred.
• There is a leak in the gate valve.
1132 Error: Turbo pump (I) not at desired speed.
The number of revolutions of the turbomolecular pump (I) went below the limit
(When the instrument is changing from Shutdown Mode to Standby Mode).
Check the number of revolutions and the current of the turbomolecular pump
(I), vacuum pressure (IF), vacuum pressure (BK), and S75 power voltage. The
following causes are inferred.
• A rise in the vacuum pressure
• The connector of the turbomolecular pump (I) came off.
• Faulty turbomolecular pump power (S75).
• Faulty turbomolecular pump (I) or turbomolecular pump controller (I).
• There is a fault in the System I/O Board.
1133* Error: Turbo pump (A) not at desired speed.
The number of revolutions of the turbomolecular pump (A) went below the
limit (When the instrument is changing from Shutdown Mode to Standby
Mode).