Hardware manual

Troubleshooting 5
Agilent 7500 Series ICP-MS Hardware Manual 5-15
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring).
• There is a fault in the Pirani gauge (IF/BK) or the System I/O Board.
1112* Error: Pirani gauge (BK) malfunction (Open).
There is a fault in the backing Pirani gauge or the System I/O Board (In
Analysis Mode).
1112* Error: Pirani gauge (IF/BK) malfunction (Open).
There is a fault in the Pirani gauge (IF/BK) or the System I/O Board (In
Analysis Mode).
1113* Error: Vacuum pressure (BK) is too high to keep the Penning gauge
(AN) ON.
The Penning gauge cannot be turned ON because the vacuum pressure (BK)
exceeds the limit or the Penning gauge was turned OFF because the vacuum
pressure rose abnormally (In the Analysis Mode).
Check the backing line pressure. The following causes are inferred.
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
• The rotary pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring).
• There is a fault in the backing Pirani gauge or the System I/O Board.
1113* Error: Vacuum pressure (IF/BK) is too high to keep the Penning
gauge (AN) ON.
The Penning gauge cannot be turned ON because the vacuum pressure (IF/BK)
exceeds the limit or the Penning gauge was turned OFF because the vacuum
pressure rose abnormally (In Analysis Mode).
Check the vacuum pressure (IF/BK). The following causes are inferred.
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
• The rotary pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring).
• There is a fault in the Pirani gauge (IF/BK) or the System I/O Board.