Hardware manual

Troubleshooting 5
Agilent 7500 Series ICP-MS Hardware Manual 5-11
1102* Error: Vacuum (BK) time out, vacuum too high to switch on Penning
gauge (AN).
The Penning gauge cannot be turned on because the vacuum pressure (BK) was
not managed below the limit within the prescribed time (When the instrument
is changing from Shutdown Mode to Standby Mode).
Check the backing line pressure. The following causes are inferred.
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
• The rotary pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring).
• There is a fault in the backing Pirani gauge or the System I/O Board.
1102* Error: Vacuum (IF/BK) time out, vacuum too high to switch on
Penning gauge (AN).
The Penning gauge cannot be turned on because the vacuum pressure (IF/BK)
was not managed below the limit within the prescribed time (When the
instrument is changing from Shutdown Mode to Standby Mode).
Check the vacuum pressure (IF/BK). The following causes are inferred.
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
• The rotary pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring.)
• There is a fault in the Pirani gauge (IF/BK) or the System I/O Board
1103* Error: Vacuum pressure (BK) increased above turbo ON limit.
The turbomolecular pump cannot be turned ON because the vacuum pressure
(BK) exceeds the limit or the turbomolecular pump was turned OFF because
the vacuum pressure rose abnormal (When the instrument is changing from
Shutdown Mode to Standby Mode).