Hardware manual

5-6 Agilent 7500 Series ICP-MS Hardware Manual
5 Troubleshooting
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an
incomplete seal such as a pin hole or a defective O- ring.)
• A drop of water was introduced into the vacuum chamber.
• There is a fault in the Pirani gauge (IF/BK) or the System I/O Board.
1011 Execution Error: Can not execute because the Gate valve is open.
Attempted to execute a command that cannot be executed when the gate valve
is open. The gate valve is open now.
1012* Execution Error: Can not execute because the Turbo pump (A) is
ON.
Attempted to execute a command that cannot be executed when the
turbomolecular pump (A) is ON. The turbomolecular pump (A) is ON.
1012* Execution Error: Can not execute because the Turbo pump is ON.
Attempted to execute a command that cannot be executed when the
turbomolecular pump is ON. The turbomolecular pump is ON.
1013 Execution Error: Can not execute because the Turbo pump (I) is ON.
Attempted to execute a command that cannot be executed when the
turbomolecular pump (I) is ON. The turbomolecular pump (I) is ON.
1014 Execution Error: Can not execute because the 24V power supply is
ON.
Attempted to execute a command that cannot be executed when the 24V power
supply is ON. The 24V power supply is ON.
1015 Execution Error: Can not execute while the Spray chamber control
is ON.
Attempted to execute a command that cannot be executed when the spray
chamber temperature control is ON. The spray chamber temperature control is
ON now.
1016* Execution Error: Vacuum pressure (BK) is too high to turn on the
Penning gauge (AN).
The Penning gauge cannot work because the vacuum pressure (BK) exceeds the
limit (When the instrument is changing from the Shutdown Mode to the
Standby Mode).
Check the back line pressure. The following causes are inferred.
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the rotary pump is not connected or the breaker is OFF.
• The rotary pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.