Hardware manual

4-94 Agilent 7500 Series ICP-MS Hardware Manual
4Maintenance
Working Inside the Vacuum Chamber
The vacuum chamber must be completely sealed to achieve high vacuum
required by the Q- pole. Poor vacuum will affect its performance. This procedure
explains how to break vacuum and how to achieve a good vacuum after the
chamber has been opened. The vacuum chamber must be kept clean by wearing
laboratory gloves while performing maintenance. When you are not working
directly inside the vacuum chamber, keep the cover on.
Opening the Vacuum Chamber
Wear laboratory gloves when working inside the vacuum chamber. The
following procedure describes how to open the vacuum chamber:
1 Place the Agilent 7500 in shutdown mode and switch off the power.
Refer to Chapter 3, “Startup, Shutdown and Status”.
2 Loosen the vacuum vent valve on the right side.
Loosen the vent valve located on the front right side of the vacuum chamber
1 turn. This allows air to slowly enter the chamber. (See Figure 77 for the
location of the vent valve) While air is flowing into the chamber, you should
hear a soft hissing sound.
Figure 77 Vent Valve
NOTE
It is necessary to open the vacuum chamber when removing the Reaction cell. It is not
necessary to open the vacuum chamber when you are removing the Extraction Lens-Omega
Lens assembly. For more information on removing the Extraction Lens-Omega Lens and
Reaction cell assemblies, refer to procedures titled “Removing the Extraction Lens-Omega
Lens Assembly” on page 4-97 and “Removing the Reaction Cell Assembly” on page 4-102.
Vent Valve