Hardware manual

4-78 Agilent 7500 Series ICP-MS Hardware Manual
4Maintenance
Figure 70 Vent Valve
3 Unscrew the vacuum cover.
Using an Allen wrench, unscrew the cover while waiting for the pressure to
equalize (this may take up to 5 minutes).
4 When the pressure is equalized, open the cover.
After the hissing sound is finished, open the cover of the vacuum chamber.
5 Refit the vacuum vent valve.
Screw the vent valve back into the side of the vacuum chamber.
6 Place the cover on the vacuum chamber unless working inside it.
If the cover is left open, dust enters into the vacuum chamber. To maintain
a clean vacuum environment, keep the vacuum chamber covered with the
chamber cover when you are not actually working inside it.
Vent Valve
NOTE
During long maintenance periods such as when cleaning the ion lens, place the cover on
the vacuum chamber and pump down the system to the Standby mode.