Hardware manual

Maintenance 4
Agilent 7500 Series ICP-MS Hardware Manual 4-77
* Use clean and degreased tools.
* Use gloves that are powder- free and tolerant to acetone.
Working Inside the Vacuum Chamber
The vacuum chamber must be sealed completely to achieve the high vacuum
required by the quadrupole. Poor vacuum affects performance. This section
explains how to break vacuum and how to achieve a good vacuum after the
chamber has been opened. The chamber must be kept clean by wearing gloves
and covering the unsealed chamber when not working on it.
Opening the Vacuum Chamber
Wear gloves when working inside the vacuum chamber. To correctly open the
vacuum chamber, complete the following steps:
1 Shut down the instrument.
See Chapter 3, “Startup, Shutdown and Status”.
2 Slowly loosen the vacuum vent valve on the front right side of the
vacuum chamber. (For location, see Figure 70)
Loosen the vent valve (only 1 turn) to let air into the vacuum chamber. A
hissing sound begins as the air rushes in.
NOTE
Pure water used for cleaning is indicated as water that has been generated using the
ion-exchange method and a membrane filter, and has an electrical resistance of at least
18 MΩ.
CAUTION
• The parts in the vacuum chamber don't like stains. Be sure to wear clean gloves and
handle them in a dust-free place.
• Work in a well-ventilated place due to the use of organic solvents.
• Do not soil or damage the surface of the O-ring. This will cause a vacuum leak.
NOTE
It is not necessary to open and close the vacuum chamber when removing the extraction
lenses. It is necessary only when removing the Einzel lens and the Omega lenses. For
removing the extraction lens, the Einzel lens, and the Omega lens, refer to “Removing the
Extraction Lenses”, “Removing the Einzel Lens - Omega Lens Assembly” and “Removing
Plate Bias Lens” in this section.