Owner's manual

Page 79 of 197
Work Area Air Cleanliness Test (optional)
If the customer wants to verify air cleanliness in the work area, use the following
procedure:
1. Mark test points at the geometric center of the work surface, and midway
between the center test point and each side wall.
2. Place a particle counter pickup a test point, at a height of 16 inches above the
work surface, pointing into the airflow, as shown in Figure 5-19. Take three
samples of 1.0 ft
3
. Repeat for each test point.
3. Average the results.
Figure 5-19
Acceptance
The average count should be less than 100 particles 0.5um in size per ft
3
.