User's Guide

Input and Output Ports
Equipment Ports
AML wafer 3.7V input (from battery)
Environmental Conditions
Equipment
Environmental Parameter Condition
AML wafer Temperature 0°C - 60°C
Pressure 760 Torr (atmospheric only) Air,
CDA
AM Leveling Charger Temperature 0°C - 85°C
Clean the AML wafer only with a lint-free cloth dampened with water and IPA in a 10:1 ratio.
Supplier and Manufacturer
Name
Address
Supplier SensArray division of KLA
Corporation
One Technology Drive
Milpitas, California 95035
USA
Manufacturer Flex Ltd. HaMatechet 2
Migdal HaEmek 2307037
Israel
1.2. AML: Leveling UI
This section gives an overview of the 2 primary windows of the Leveling UI: the main window and the
Leveling window. For operational information, refer to the sections of the document that discuss the task
you want to perform.
• Main Window:
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AML User Guide