Families Product Lines Models PHOENIX PHOENIX All models that use wafers AML User Guide Document Number: 9026908-000 Revision: AA Status: Released Distribution Type: Internal Use Only Revision History: KLA requires users of this document to make sure they use the latest released version. The details of the Revision History are located on the final page of this document.
Table of Contents 1. 1.1. 1.2. 2. 3. 3.1. 3.2. 3.3. 4. 4.1. 4.2. 4.3. 5. 6. 7. 8. 9. 9.1. 9.2. 9.3. 9.4. 9.5. 9.6. Overview: AML User Guide.................................................................................................... 3 AML: Equipment Description............................................................................................... 4 AML: Leveling UI.................................................................................................................
1. Overview: AML User Guide The AML is a leveling wafer tool that works with a dedicated laptop or tablet, or with the FEC of the tool whose leveling is being checked. Throughout this Guide, "computer" refers to whichever option you are using: laptop, tablet, or FEC. The AML can be used: • To check the leveling status of stations • As a digital level during the leveling process of a station In addition, the results of earlier leveling sessions can be viewed on the computer. A typical work flow: 1.
1.1. AML: Equipment Description The AML system consists of the following: • • • • The AML (leveling wafer) The AML charging shell, including power supply The AML router (dongle) that is installed on the computer (optional) Dedicated laptop computer or tablet Equipment Rating Equipment Rating AML charger output 5V max 1A max AML charger input 12VDC max 3.3A max The AML wafer is for use only with batteries that have built-in protection. Wafer batteries must not be replaced by an operator.
Input and Output Ports Equipment Ports AML wafer 3.7V input (from battery) Environmental Conditions Equipment Environmental Parameter Condition AML wafer Temperature 0°C - 60°C Pressure 760 Torr (atmospheric only) Air, CDA Temperature 0°C - 85°C AM Leveling Charger Clean the AML wafer only with a lint-free cloth dampened with water and IPA in a 10:1 ratio.
If the AML is connected to the computer, the wafer status is displayed at the top of the window. The main window lists every tool that has been defined on the computer, including the pre-defined QuickLevel (used when using the AML as a digital level). The right side of the window has 2 tabs: • Preview (default): Displays the results of the last session for the selected tool • Tool: Shows which stations are defined for the selected tool 9026908-000, Rev.
• Leveling Window: 2. Safety: AML User Guide Warning: Cut and Sever Hazard Consequence: Sharp objects could result in serious injury or death. Mitigation: Keep hands and arms clear. Turn off and lockout the subsystem before servicing. • Handle the AML with care. • If the AML breaks, the broken pieces can be a cut or sever hazard. 9026908-000, Rev.
3. Prepare to Check Leveling Using the AML 3.1. Power Up the AML Steps to follow 1. Open the charging shell. 2. Install the AML in the charging shell so that the notch of the AML aligns with the notch of the charging shell. 3. Close the charging shell. 4. Connect the power supply cable to the charging shell. Result: The AML beeps, indicating that it is powered up. 5. Remove the AML from the charging shell. 3.2.
Steps to follow 1. Install the AML dongle in the USB port that was used when the AML router was configured on the computer. If the dongle is not installed in the USB port that was used when the router was configured, the AML UI might not function. 2. Power up the computer (unless it is already powered up). 3. On the computer, start the Leveling UI (unless it is already running): The specific steps depend on the computer's Operating System (OS): Windows 7 or Windows 10.
4. In the Leveling UI, click the Leveling button that corresponds to the Tool Name. If you are going to use the AML as a Digital Level, click the Leveling button that corresponds to QuickLevel. Troubleshooting: If the tool is not listed, add a new tool. 5. If a previous session for that tool was not completed, the system asks whether you want to resume that session or start a new session. Click New session or Resume, as applicable. 6.
Postrequisites • To check the absolute leveling of one or more stations, continue with Check the Leveling (Absolute Mode). • To check the leveling of one or more stations relative to another station, continue with Check the Leveling (Relative Mode). • To use the AML as a digital level during the leveling process of a station, continue with Use the AML as a Digital Level (QuickLevel). 3.3. Calibrate the AML Required conditions • • • • The AML was powered up. The Leveling UI was started.
CAUTION: Equipment Damage Consequence: Not following the procedure can damage the system. Mitigation: Follow all instructions below. • The 0° calibration and the 180° calibration must be performed while the AML is in the same place on the surface. • If the AML is not in the same place, the calibration will not be accurate and the leveling performed using the AML will not be accurate. 5. While keeping the AML in the same place on the flat surface, rotate the AML 180°. 6. Click OK.
• The Leveling UI displays ABS, showing that the AML is calibrated. 4.1. Check the Leveling (Absolute Mode) About this task In Absolute mode, the AML checks the leveling of each station individually. After the AML is calibrated, it is in Absolute mode by default. Steps to follow 1. Place the AML on the first station so that the notch faces away from you (in the "12 o'clock" position). 2. In the Leveling UI, click the station. 3. Click Play.
4. Click Pause. 9026908-000, Rev.
5. Repeat for all the other stations you need to check. 9026908-000, Rev.
6. To add comments about the leveling session: a) Click Add a Note. b) Write the comments. 7. At the end of the leveling session, click Complete. 8. At the prompt, click OK. 9. To return to the main Leveling UI window, click Back. 9026908-000, Rev.
4.2. Check the Leveling (Relative Mode) About this task Checking leveling in Relative modes has two parts: 1. Checking the Reference station in Absolute mode. 2. Changing to Relative mode to measure the subsequent stations with X and Y offsets defined by the leveling values of the Reference station. Steps to follow 1. 2. 3. Place the AML on the reference station so that the notch faces away from you (in the "12 o'clock" position). In the Leveling UI, click the station. Click Play.
4. Click Pause. 5. Click Relative. 6. At the prompt, click OK. Result: The Leveling UI goes into REL (Relative) mode and displays the X and Y offsets that will be used during the session. 9026908-000, Rev.
7. Measure the other stations relative to the reference station: a) Place the AML on the first station to measure relative to the referece station. b) In the Leveling UI, click the station. c) Click Play. Result: The results for the station relative to the reference station are displayed numerically and graphically. d) Click Pause. 9026908-000, Rev.
e) Repeat for the other stations you want to check. 8. To add comments about the leveling session: a) Click Add a Note. b) Write the comments. 9. At the end of the leveling session, click Complete. 9026908-000, Rev.
10. At the prompt, click OK. 11. To return to the main Leveling UI window, click Back. 4.3. Use the AML as a Digital Level (QuickLevel) About this task The QuickLevel leveling window displays a single, generic station, which displays the results for whichever station you are adjusting. Steps to follow 1. Place the AML on the station you are adjusting so that the notch faces away from you (in the "12 o'clock" position). 9026908-000, Rev.
2. Click Play. Result: The X and Y results for the station are displayed numerically and graphically. 3. Adjust the leveling of the station until the display shows the leveling is within spec. 9026908-000, Rev.
4. Click Pause. 5. Repeat for all the other stations you need to adjust. 6. At the end of the leveling session, click Complete. 7. At the prompt, click OK. 8. To return to the main Leveling UI window, click Back. 5. AML: View History About this task It is not necessary to connect the AML to the computer in order to view History. Steps to follow 1. Power up the computer (unless it is already powered up). 2.
OS Step(s) Windows 7 Double-click Leveling App. Windows 10 a. Right-click Leveling App. b. Select More > Run as administrator. Result: The Leveling UI opens. 3. To view the results of a tool's last session, click the tool. In the example in the figure, A500 is clicked. 9026908-000, Rev.
Result: The results of the tool's last session are displayed in the Preview tab. 4. To view the results of an earlier session: a) In the Leveling UI, click the Leveling button that corresponds to the tool. b) Under History, click the session that you want to view. Result: The results for the selected session are displayed numerically and graphically. 9026908-000, Rev.
6. AML: Add a New Tool Steps to follow 1. Power up the computer (unless it is already powered up). 2. On the computer, start the Leveling UI (unless it is already running): The specific steps depend on the computer's Operating System (OS): Windows 7 or Windows 10. OS Step(s) Windows 7 Double-click Leveling App. Windows 10 a. Right-click Leveling App. b. Select More > Run as administrator. Result: The Leveling UI opens. 3. In the Leveling UI, click Add New Tool.
4. Type the name of the new tool. In the example in the figure, the name of the new tool is A700. 5. Select the stations to be included in the tool definition: When a station is included in a tool definition, it is included in the list of stations whose leveling can be checked by the AML during the leveling operation. a) Click the stations to include in the tool definition. Result: The indicator next to the selected station changes from red to green.
c) To add a station that is not listed: 1. In Name new station here, type the name of the new station. 2. Click + (Add). In the example in the figure, the name of the new station is Flipper. Result: The new station is added to the list of stations and another Name new station here field is displayed. d) When you have selected all the stations you want to include in the tool definition, click Done. Result: The name of the new tool is listed in the Tool Name column of the main Leveling UI window. 7.
Steps to follow 1. Power up the computer (unless it is already powered up). 2. On the computer, start the Leveling UI (unless it is already running): The specific steps depend on the computer's Operating System (OS): Windows 7 or Windows 10. OS Step(s) Windows 7 Double-click Leveling App. Windows 10 a. Right-click Leveling App. b. Select More > Run as administrator. Result: The Leveling UI opens. 3. Click Settings. Settings is located in the top right of the Leveling UI.
4. Change the spec: a) Type the new value for the Leveling spec. b) (Optional) Change the value for Number Of Decimal Digits [2-3]. c) Click Save. Do not change the SSID, otherwise the AML will not be able to communicate with the computer. 8. AML Troubleshooting Symptom / Problem Cause Fix The AML does not connect to the UI The AML is not powered up (the LED is not blinking) Power Up the AML The IP address is incorrect. In a CMD window, run ipconfig to check the IP address.
3. Click Change adapter settings. 4. Right-click the Local Area Connection that corresponds to the AML dongle. 5. 6. Click Properties. Click Internet Protocol Version 4 (TCP/IPv4). 9026908-000, Rev.
7. 8. Click Properties. Click Use the following IP address. 9. 10. 11. 12. 13. In IP address, type 192.168.100.1. In Subnet mask, type 255.255.255.0. In Default gateway, type 192.168.100.200. Click OK. Close the Control Panel. 9026908-000, Rev.
Reset the AML 1. Place the AML on a flat surface. 2. Using the point of a pen or similar implement, press the Reset button on the AML. 9. Additional Information 9.1. Glossary 9.1.1. Glossary: AML User Guide Leveling Wafer (leveling tool) AML Front End Controller The computer that controls the system. FEC Front Opening Unified Pod FOUP Isopropyl Alcohol IPA Substrate ID SSID User Interface UI 9.2. Revision History: AML User Guide This is the revision history of this document.
Rev Date Changes Author Reviewer Approver AA 11/2019 Initial Release Caroline BenAri Eran Bachinski Avi Zaban 9.3. Copyright Copyright © 2019 by KLA Corporation. All rights reserved worldwide.
