User guide

8-4
Chapter 8 Specifications
8
Characteristics
Measurement Range and Accuracy
81
40
(30)
30±5
2
4
4
6
Receiver
Transmitter
Unit: mm
±1.5μm
±0.5μm
Receiver
80
35.5
Transmitter
Unit: mm
10
±5μm
±2μm
20
20
30
80±40
LS-7030
LS-7010