Datasheet

TEK.COM 7
2470 Graphical SourceMeter
®
SMU Instrument Data Sheet
Specifications
Voltage Specifications
1, 2
Source Measure
3
Range
4
Resolution
Accuracy
5
23°C ± 5°C, 1 Year
±(% setting + volts)
Noise (RMS)
<10 Hz Resolution
Input
Resistance
Accuracy
23°C ± 5°C, 1 Year
±(% reading + volts)
200.0000 mV 5 µV 0.015% + 200 µV 2 µV 100 nV > 10 GΩ 0.012% + 200 µV
2.000000 V 50 µV 0.020% + 300 µV 10 µV 1 µV > 10 GΩ 0.012% + 300 µV
20.00000 V 500 µV 0.015% + 2.4 mV 100 µV 10 µV > 10 GΩ 0.015% + 1 mV
200.0000 V 5 mV 0.015% + 24 mV 1 mV 100 µV > 10 GΩ 0.015% + 10 mV
1000.000 V 50 mV 0.02% + 100 mV 20 mV 10 mV > 10 GΩ 0.015% + 50 mV
Temperature Coefficient ± (0.15 × accuracy specification)/°C, 0°C to 18°C and 28°C to 50°C
Current Specifications
1, 2
Source Measure
3
Range
4
Resolution
Accuracy
5
23°C ± 5°C, 1 Year
±(% setting + amps)
Noise (RMS)
<10 Hz Resolution
Voltage
Burden
Accuracy
23°C ± 5°C, 1 Year
±(% reading + amps)
10.00000 nA
6
500 fA 0.100% + 200 pA 500 fA 10 fA < 100 µV 0.10% + 250 pA
100.0000 nA
6
5 pA 0.060% + 250 pA 500 fA 100 fA < 100 µV 0.060% + 300 pA
1.000000 μA 50 pA 0.025% + 400 pA 5 pA 1 pA < 100 µV 0.025% + 300 pA
10.00000 μA 500 pA 0.025% + 1.5 nA 40 pA 10 pA < 100 µV 0.025% + 700 pA
100.0000 μA 5 nA 0.020% + 15 nA 400 pA 100 pA < 100 µV 0.02% + 6 nA
1.000000 mA 50 nA 0.020% + 150 nA 5 nA 1 nA < 100 µV 0.02% + 60 nA
10.00000 mA 500 nA 0.020% + 1.5 μA 40 nA 10 nA < 100 µV 0.02% + 600 nA
100.0000 mA 5 μA 0.025% + 15 μA 100 nA 100 nA < 100 µV 0.025% + 6 μA
1.000000 A 50 μA 0.067% + 900 μA 10 μA 1 μA < 100 µV 0.03% + 500 μA
Temperature Coefficient ± (0.15 × accuracy specification)/°C, 0°C to 18°C and 28°C to 50°C
Notes
1. Speed = 1 PLC.
2. All specifications are guaranteed with output ON.
3. Accuracies apply to 2-wire and 4-wire modes when properly zeroed. For the 200 mV and 1 A ranges, the voltage burden may exceed the specification in 2-wire mode.
4. Maximum display and programmming ranges are 5% overrange for voltage, except for the 1000 V range, which is 10% overrange (1100 V), and 5% overrange for current (for example,
1.05A on the 1 A range).
5. For sink mode, accuracy is ±(0.15% + offset × 4) except for 1 A range, accuracy is: ± (1.5% + offset × 8).
6. Rear-panel triaxial connections only.
Resistance Measurement Accuracy (Local Or Remote Sense)
7, 8, 9
Range Default Resolution
10
Default Test Current
Normal Accuracy
23°C ± 5°C, 1 Year
± (% reading + ohms)
Enhanced Accuracy
11
23°C ± 5°C, 1 Year
± (% reading + ohms)
< 2.000000 Ω
12
1 µΩ User-dened Source I
ACC
+ Meas V
ACC
Meas I
AC
C + Meas V
ACC
20.00000 Ω 10 µΩ 100 mA 0.098% + 0.003 Ω 0.073% + 0.001 Ω
200.0000 Ω 100 µΩ 10 mA 0.077% + 0.03 Ω 0.053% + 0.01 Ω
2.000000 kΩ 1 mΩ 1 mA 0.066% + 0.3 Ω 0.045% + 0.1 Ω
20.00000 kΩ 10 mΩ 100 µA 0.063% + 3 Ω 0.043% + 1 Ω
200.0000 kΩ 100 mΩ 10 µA 0.065% + 30 Ω 0.046% + 10 Ω
2.000000 MΩ 1 Ω 1 µA 0.11% + 300 Ω 0.049% + 100 Ω
20.00000 MΩ 10 Ω 1 µA 0.11% + 1 kΩ 0.052% + 500 Ω
200.0000 MΩ
13
100 Ω 100 nA 0.655% + 10 kΩ 0.349% + 5 kΩ
> 200.0000 MΩ
12, 13
— User-dened Source I
ACC
+ Meas V
ACC
Meas I
ACC
+ Meas V
ACC