Datasheet

SMU INSTRUMENTS
A Greater Measure of Confidence
www.keithley.com
1.888.KEITHLEY
(U.S. only)
2651A
50A, High Power System
SourceMeter
®
SMU Instrument
ADDITIONAL SOURCE SPECIFICATIONS
NOISE (10Hz to 20MHz): <100mV peak-peak (typical), <30mV RMS (typical), 10V range with a
20A limit.
OVERSHOOT:
Voltage: <±(0.1% + 10mV) (typical). Step size = 10% to 90% of range, resistive load, maximum
current limit/compliance.
Current: <±(0.1% + 10mV) (typical). Step Size = 10% to 90% of range, resistive load. See
Current Source Output Settling Time specifications for additional test conditions.
RANGE CHANGE OVERSHOOT:
Voltage: <300mV + 0.1% of larger range (for <20V ranges) (typical).
<400mV + 0.1% of larger range (for ≥20V ranges) (typical).
Overshoot into a 100kW load, 20MHz bandwidth.
Current: <5% of larger range + 360mV/R
load
(for >10µA ranges) (typical). I
out
× R
load
= 1V.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range.
1
Range Settling Time (typical)
1 V < 70 µs
10 V <160 µs
20 V <190 µs
40 V <175 µs
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Values below for I
out
× R
load
.
Current Range R
load
Settling time (typical)
20 A
0.5 W
<195 µs
10 A
1.5 W
<540 µs
5 A
5 W
<560 µs
1 A
1 W
< 80 µs
100 mA
10 W
< 80 µs
10 mA
100 W
<210 µs
1 mA
1 kW
<300 µs
100 µA
10 kW
<500 µs
10 µA
100 kW
< 15 ms
1 µA
1 MW
< 35 ms
100 nA
10 MW
<110 ms
TRANSIENT RESPONSE TIME:
10V and 20V Ranges: <70µs for the output to recover to within 0.1% for a 10% to 90% step
change in load.
40V Range: <110µs for the output to recover to within 0.1% for a 10% to 90% step change in load.
GUARD OFFSET VOLTAGE: <4mV, current <10mA.
REMOTE SENSE OPERATING RANGE
2
:
Maximum Voltage between HI and SENSE HI: 3V.
Maximum Voltage between LO and SENSE LO: 3V.
MAXIMUM IMPEDANCE PER SOURCE LEAD:
Maximum impedance limited by 3V drop by remote sense operating range.
Maximum resistance = 3V/source current value (amperes) (maximum of 1W per source lead).
3V = L di/dt.
VOLTAGE OUTPUT HEADROOM:
5A Range: Maximum output voltage = 48.5V – (Total voltage drop across source leads).
10A Range: Maximum output voltage = 24.5V – (Total voltage drop across source leads).
20A Range: Maximum output voltage = 15.9V – (Total voltage drop across source leads).
OVERTEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
LIMIT/COMPLIANCE: Bipolar limit (compliance) set with single value.
Voltage
3
: Minimum value is 10mV; accuracy is the same as voltage source.
Current
4
: Minimum value is 10nA; accuracy is the same as current source.
NOTES
1. With measure and compliance set to the maximum current for the specified voltage range.
2. Add 50µV to source accuracy specifications per volt of HI lead drop.
3. For sink mode operation (quadrants II and IV), add 0.6% of limit range to the corresponding voltage source
accuracy specifications. For 100mV range add an additional 60mV of uncertainty. Specifications apply with sink
mode enabled.
4. For sink mode operation (quadrants II and IV), add 0.6% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode enabled.
Model 2651A specifications Model 2651A specifications
ADDITIONAL MEASUREMENT SPECIFICATIONS
CONTACT CHECK
1
Speed
Maximum Measurement
Time to Memory
for 60Hz (50Hz)
Accuracy (1 Year)
23° ±5°C
±(% reading + ohms)
Fast 1.1 ms (1.2 ms)
5% + 15 W
Medium 4.1 ms (5 ms)
5% + 5 W
Slow 36 ms (42 ms)
5% + 3 W
NOTES
1. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
ADDITIONAL METER SPECIFICATIONS
MAXIMUM LOAD IMPEDANCE:
Normal Mode: 10nF (typical), 3µH (typical).
High-Capacitance Mode: 50µF (typical), 3µH (typical).
COMMON MODE VOLTAGE: 250V DC.
COMMON MODE ISOLATION: >1GW, <4500pF.
MEASURE INPUT IMPEDANCE: >10GW.
SENSE HIGH INPUT IMPEDANCE: >10GW.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
OVERRANGE: 101% of source range, 102% of measure range.
HIGH-CAPACITANCE MODE
1,2
ACCURACY SPECIFICATIONS
3
: Accuracy specifications are applicable in both normal and high-
capacitance modes.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1 % of final value
after source level command is processed on a fixed range.
4
Voltage Source
Range
Settling Time with
C
load
= 4.7µF (typical)
1 V 75 µs
10 V 170 µs
20 V 200 µs
40 V 180 µs
MODE CHANGE DELAY:
100µA Current Range and Above:
Delay into High-Capacitance Mode: 11ms.
Delay out of High-Capacitance Mode: 11ms.
1µA and 10µA Current Ranges:
Delay into High-Capacitance Mode: 250ms.
Delay out of High-Capacitance Mode: 11ms.
MEASURE INPUT IMPEDANCE: >10GW in parallel with 25nF.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <400mV + 0.1% of larger range (typical).
Overshoot into a 100kW load, 20MHz bandwidth.
NOTES
1. High-capacitance mode specifications are for DC measurements only and use locked ranges. Autorange is dis-
abled.
2. 100nA range is not available in high-capacitance mode.
3. Add an additional 2nA to the source current accuracy and measure current accuracy offset for the 1µA range.
4. With measure and compliance set to the maximum current for the specified voltage range.