Datasheet

SMU INSTRUMENTS
A Greater Measure of Confidence
www.keithley.com
1.888.KEITHLEY
(U.S. only)
2651A
50A, High Power System
SourceMeter
®
SMU Instrument
Specification Conditions
This document contains specifications and supplemental information for the Model 2651A High
Power System SourceMeter SMU instrument. Specifications are the standards against which the
Model 2651A is tested. Upon leaving the factory, the Model 2651A meets these specifications.
Supplemental and typical values are non-warranted, apply at 23°C, and are provided solely as
useful information.
Accuracy specifications are applicable for both normal and high-capacitance modes.
Source and measurement accuracies are specified at the Model 2651A terminals under
these conditions:
• 23° ±5°C, <70 percent relative humidity
• After two-hour warm-up
• Speed normal (1 NPLC)
• A/D autozero enabled
• Remote sense operation or properly zeroed local operation
• Calibration period: One year
VOLTAGE ACCURACY SPECIFICATIONS
1, 2
SOURCE MEASURE
Range
Programming
Resolution
Accuracy
±(% reading + volts)
N
oise (Vpp) (typical)
0.1 Hz to 10 Hz
Default
Display
Resolution
Integrating ADC Accuracy
3
±(% reading + volts)
H
igh-Speed ADC Accuracy
4
±(% reading + volts)
100.000 mV 5 µV 0.02% + 500 µV 100 µV 1 µV 0.02% + 300 µV 0.05% + 600 µV
1.00000 V 50 µV 0.02% + 500 µV 500 µV 10 µV 0.02% + 300 µV 0.05% + 600 µV
10.0000 V 500 µV 0.02% + 5 mV 1 mV 100 µV 0.02% + 3 mV 0.05% + 8 mV
20.0000 V 500 µV 0.02% + 5 mV 1 mV 100 µV 0.02% + 5 mV 0.05% + 8 mV
40.0000 V 500 µV 0.02% + 12 mV 2 mV 100 µV 0.02% + 12 mV 0.05% + 15 mV
CURRENT ACCURACY SPECIFICATIONS
5
SOURCE MEASURE
Range
Programming
Resolution
Accuracy
±(% reading + amps)
Noise (Ipp) (typical)
0.1Hz to 10Hz
Default
Display
Resolution
Integrating ADC Accuracy
3
±(% reading + amps)
High-Speed ADC Accuracy
4
±(% reading + amps)
100.000 nA 2 pA 0.1
% + 500 pA 50 pA 1 pA 0.08% + 500 pA 0.08% + 800 pA
1.00000 µA 20 pA 0.1
% + 2 nA 250 pA 10 pA 0.08% + 2 nA 0.08% + 4 nA
10.0000 µA 200 pA 0.1
% + 10 nA 500 pA 100 pA 0.08% + 8 nA 0.08% + 10 nA
100.000 µA 2 nA 0.03% + 60 nA
5 nA 1 nA 0.02% + 25 nA 0.05% + 60 nA
1.00000 mA 20 nA 0.03% + 300 nA
10 nA 10 nA 0.02% + 200 nA 0.05% + 500 nA
10.0000 mA 200 nA 0.03% + 8 µA 500 nA 100 nA 0.02% + 2.5 µA 0.05% + 10 µA
100.000 mA 2 µA 0.03% + 30 µA
1 µA 1 µA 0.02% + 20 µA 0.05% + 50 µA
1.00000 A 200 µA 0.08% + 3.5 mA 300 µA
10 µA 0.05% + 3 mA 0.05% + 5 mA
5.00000 A 200 µA 0.08% + 3.5 mA 300 µA
10 µA 0.05% + 3 mA 0.05% + 5 mA
10.0000 A 500 µA 0.15% + 6 mA 500 µA 100 µA 0.12% + 6 mA 0.12% + 12 mA
20.0000 A 500 µA 0.15% + 8 mA 500 µA 100 µA 0.08% + 8 mA 0.08% + 15 mA
50.0000 A
6
2 mA 0.15% + 80 mA N/A 100 µA 0.05% + 50 mA
7
0.05% + 90 mA
8
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0.15 × accuracy specification)/°C.
High-capacitance mode accuracy is applicable at 23° ±5°C only.
3. Derate accuracy specification for NPLC setting <1 by increasing error term.
Add appropriate typical percent of range term for resistive loads using the table below.
NPLC Setting 100mV Range 1V to 40V Ranges 100nA Range 1µA to 100mA Ranges 1A to 20A Ranges
0.1 0.01% 0.01% 0.01% 0.01% 0.01%
0.01 0.08% 0.07% 0.1 % 0.05% 0.1 %
0.001 0.8 % 0.6 % 1 % 0.5 % 1.8 %
4. 18-bit ADC. Average of 1000 samples taken at 1µs intervals.
5. At temperatures 0° to 18°C and 28° to 50°C; 100nA to 10µA accuracy is degraded by ±(0.35 × accuracy specification)/°C.
100µA to 50A accuracy is degraded by ±(0.15 × accuracy specification)/°C.
High-capacitance mode accuracy is applicable at 23° ±5°C only.
6. 50A range accessible only in pulse mode.
7. 50A range accuracy measurements are taken at 0.008 NPLC.
8. Average of 100 samples taken at 1µs intervals.
Model 2651A specifications Model 2651A specifications