Datasheet

TEK.COM 27
2600B System SourceMeter
®
SMU Instruments
Additional Meter Specifications
Maximum Load Impedance Normal Mode: 10 nF (typical). High Capacitance Mode: 50 µF (typical).
Common Mode Voltage 250 VDC.
Common Mode Isolation >1 G Ω, <4500 pF.
Overrange 101% of source range, 102% of measure range.
Maximum Sense Lead Resistance 1 kΩ for rated accuracy.
Sense Input Impedance >10
14
Ω.
Contact Check
1
(not available on 2634B)
Speed
Maximum Measurement Time to
Memory For 60 Hz (50 Hz)
Accuracy (1 Year), 23°C ±5°C
±(%rdg. + ohms)
FAST 1 (1.2) ms 5% + 10 Ω
MEDIUM 4 (5) ms 5% + 1 Ω
SLOW 36 (42) ms 5% + 0.3 Ω
High Capacitance Mode
2, 3, 4
Voltage Source Output Time required to reach 0.1% of final value after source level command is processed on a fixed range.
Settling Time Current limit = 1 A.
Voltage Source Range Settling Time with C
load
= 4.7 µF
200 mV 600 µs (typical)
2 V 600 µs (typical)
20 V 1.5 µs (typical)
200 V 20 ms (typical)
Current Measure Settling Time Time required to reach 0.1% of final value after voltage source is stabilized on a fixed range. Values below
for V
out
= 2 V unless noted.
Current Measure Range Settling Time
1.5 A – 1 A <120 µs (typical) (R
load
> 6 Ω)
100 mA – 10 mA <100 µs (typical)
1 mA < 3 ms (typical)
100 µA < 3 ms (typical)
10 µA < 230 ms (typical)
1 µA < 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C Scripts
5
Load = 5 µF||10 MΩ. Test: 5 V step and measure. 200 ms (typical) @ 50 nA.
NOTES
1. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
2. High Capacitance Mode specifications are for DC measurements only.
3. 100 nA range is not available in High Capacitance Mode.
4. High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
5. Part of KI Factory scripts. See reference manual for details.
Mode Change Delay
100 µA Current Range Delay into High Capacitance Mode: 10 ms.
and Above Delay out of High Capacitance Mode: 10 ms.
1 µA and 10 µA Delay into High Capacitance Mode: 230 ms.
Current Ranges Delay out of High Capacitance Mode: 10 ms.
Voltmeter Input Impedance 30 GΩ in parallel with 3300 pF.
Noise, 10 Hz–20 MHz (20 V Range) <30 mV peak-peak (typical).
Voltage Source Range Change Overshoot (for 20 V range and below)
<400 mV + 0.1% of larger range (typical). Overshoot into a 200 kΩ load, 20 MHz BW.