Datasheet

TEK.COM 19
2600B System SourceMeter
®
SMU Instruments
Contact Check
11
(not available on 2614B)
Speed
Maximum Measurement Time to
Memory For 60 Hz (50 Hz)
Accuracy (1 Year), 23°C ±5°C
±(%rdg. + ohms)
FAST 1 (1.2) ms 5% + 10 Ω
MEDIUM 4 (5) ms 5% + 1 Ω
SLOW 36 (42) ms 5% + 0.3 Ω
NOTES
1. Add 50 µV to source accuracy specifications per volt of HI lead drop.
2. Derate accuracy specifications for NPLC setting <1 by increasing error term.
Add appropriate % of range term using table below.
NPLC Setting 200 mV Range 2 V–200 V Ranges 100 nA Range 1 µA–100 mA Ranges 1 A–1.5 A Ranges
0.1 0.01% 0.01% 0.01% 0.01% 0.01%
0.01 0.08% 0.07% 0.1% 0.05% 0.05%
0.001 0.8% 0.6% 1% 0.5% 1.1%
3. Applies when in single channel display mode.
4. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
5. Accuracy specifications do not include connector leakage. De-rate accuracy by V
out
/2E11 per °C when operating between 18°–28°C. Derate accuracy by V
out
/2E11 + (0.15 · V
out
/2E11) per
°C when operating <18° and >28°C
6. Applies when in single channel display mode.
7. Four-wire remote sense only with current meter mode selected. Voltage measure set to 200 mV or 2 V range only.
8. 10 A range accessible only in pulse mode.
9. Compliance equal to 100 mA.
10. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
11. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
High Capacitance Mode
1, 2, 3
Voltage Source Output Time required to reach 0.1% of final value after source level command is processed on a fixed range.
Settling Time Current limit = 1 A.
Voltage Source Range Settling Time with C
load
= 4.7 µF
200 mV 600 µs (typical)
2 V 600 µs (typical)
20 V 1.5 µs (typical)
200 V 20 ms (typical)
Current Measure Settling Time Time required to reach 0.1% of final value after voltage source is stabilized on a fixed range. Values below
for V
out
= 2 V unless noted.
Current Measure Range Settling Time
1.5 A – 1 A <120 µs (typical) (R
load
> 6 Ω)
100 mA – 10 mA <100 µs (typical)
1 mA < 3 ms (typical)
100 µA < 3 ms (typical)
10 µA < 230 ms (typical)
1 µA < 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C Scripts
4
Load = 5 µF||10 MΩ. Test: 5 V step and measure. 200 ms (typical) @ 50 nA.
NOTES
1. High Capacitance Mode specifications are for DC measurements only.
2. 100 nA range is not available in High Capacitance Mode.
3. High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
4. Part of KI Factory scripts. See reference manual for details.