Datasheet

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A Tektronix Company

The Series 2600B System SourceMeter SMU Instruments

are the industry’s leading current/voltage source and

measure solutions, and are built from Keithley’s third

generation SMU technology. The Series 2600B offers

single- and dual-channel models that combine the

capabilities of a precision power supply, true current

source, 6½-digit DMM, arbitrary waveform generator,

pulse generator, and electronic load – all into one tightly

integrated instrument. The result is a powerful solution

that signiﬁcantly boosts productivity in applications

ranging from bench-top I-V characterization through

highly automated production test. Built-in web browser

based software enables I-V testing through any computer

from anywhere in the world. Or, use your Android smart

device to perform plug & play I-V testing with ﬁngertip

control with the Keithley IVy application. For automated

system applications, the Series 2600B’s Test Script

Processor (TSP

) runs complete test programs from

inside the instrument for industry-best throughput. In

larger, multi-channel applications, Keithley’s TSP-Link

Technology works together with TSP Technology to

enable high-speed, SMU-per-pin parallel testing. Because

Series 2600B SourceMeter SMU Instruments have fully

isolated channels that do not require a mainframe, they

can be easily reconﬁgured and re-deployed as your test

applications evolve.

Key Features

• Tightly integrated, 4-quadrant voltage/current

source and measure instruments offer best in class

performance with 6½-digit resolution

• Family of models offer industry’s widest dynamic range:

10A pulse to 0.1fA and 200V to 100nV

• Built-in web browser based software enables remote

control through any browser, on any computer, from

anywhere in the world

• Compatibility with the Keithley IVy mobile app enables

true plug & play I/V characterization and test through

any Android device

• TSP (Test Script Processing) technology embeds

complete test programs inside the instrument for best-

in-class system-level throughput

• TSP-Link expansion technology for multi-channel

parallel test without a mainframe

• Software emulation for Keithley’s 2400 SourceMeter

SMU Instrument

• USB 2.0, LXI-C, GPIB, RS-232, and digital I/O interfaces

• Free software drivers and development/debug tools

• Optional ACS-Basic semiconductor component

characterization software

Perform Quick I-V characterization with

Android

™

Devices

The Series 2600B is compatible with the Keithley IVy

application that is the fastest and easiest way to perform

current-voltage (I-V) characterization, troubleshoot your

2600B System SourceMeter

SMU Instruments

Datasheet

Perform quick I-V characterization with ﬁngertip control to gain insight into your DUT.

Summary of content (35 pages)

PAGE 1
2600B System SourceMeter SMU Instruments ® Datasheet Key Features • Tightly integrated, 4-quadrant voltage/current source and measure instruments offer best in class performance with 6½-digit resolution • Family of models offer industry’s widest dynamic range: 10A pulse to 0.
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Datasheet device under test (DUT), and share the measurement results with others. It allows you to visualize, interact with, and share measurement results without programming, while gaining a deeper understanding of your DUT. These unique capabilities boost productivity across a wide range of applications in R&D, education, QA/FA, and more.
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2600B System SourceMeter ® SMU Instruments Third-generation SMU Instrument Design Ensures Faster Test Times Simplify Semiconductor Component Test, Verification, and Analysis Based on the proven architecture of earlier Series 2600 instruments, the Series 2600B’s SMU instrument design enhances test speed in several ways.
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Datasheet Three New Dual-Channel Bench-Top Models of Series 2600B Offer IndustryBest Value and Performance For applications that do not require leading-edge system-level automation capabilities, Keithley has expanded the Series 2600B to include 3 new value-priced “bench-top” models – the 2604B, 2614B, and 2634B. These models offer similar performance to Models 2602B, 2612B, and 2636B, respectively, however do not include TSPLink, Contact Check, and Digital I/O capabilities.
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2600B System SourceMeter ® SMU Instruments In the first and third quadrants, Series 2600B SMU instruments operate as a source, delivering power to a load. In the second and fourth quadrants, they operate as a sink, dissipating power internally. +10A +5A +3A 2604B/2614B rear panel (Single channels 2601B, 2611B, 2635B not shown) +1.5A +1A DC 0A Pulse –1A –1.5A –3A –5A –10A –40V –35V –20V –6V 0V +6V +20V +35V +40V Models 2601B, 2602B, and 2604B I-V capability +10A 2636B rear panel +1.
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Datasheet Specification Conditions (2601B, 2602B, 2604B) This document contains specifications and supplemental information for the Models 2601B, 2602B, and 2604B System SourceMeter® SMU instruments. Specifications are the standards against which the Models 2601B, 2602B, and 2604B are tested. Upon leaving the factory, the 2601B, 2602B, and 2604B meet these specifications. Supplemental and typical values are non-warranted, apply at 23°C, and are provided solely as useful information.
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2600B System SourceMeter ® SMU Instruments Current Source Specifications Current Programming Accuracy Range Programming Resolution Accuracy (1 Year), 23°C ±5°C ±(% rdg. + amps) Typical Noise (peak-peak) 0.1Hz–10Hz 100 nA 2 pA 0.06% + 100 pA 5 pA 1 µA 20 pA 0.03% + 800 pA 25 pA 10 µA 200 pA 0.03% + 5 nA 60 pA 100 µA 2 nA 0.03% + 60 nA 3 nA 1 mA 20 nA 0.03% + 300 nA 6 nA 10 mA 200 nA 0.03% + 6 µA 200 nA 600 nA 100 mA 2 µA 0.03% + 30 µA 1A1 20 µA 0.05% + 1.
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Datasheet Current Source Output Settling Time Time required to reach within 0.1% of final value after source level command is processed on a fixed range. Values below for Iout × Rload = 1 V unless noted. 3 A Range <80 µs typical (current less than 2.5 A, Rload >2 Ω). 1 A–10 mA Ranges <80 µs typical (Rload >6 Ω). 1 mA Range <100 µs typical. 100 µA Range <150 µs typical. 10 µA Range <500 µs typical. 1 µA Range <2.5 ms typical. 100 nA Range <25 ms typical.
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2600B System SourceMeter ® SMU Instruments Pulse Specifications Region Maximum Current Limit Maximum Pulse Width 1 Maximum Duty Cycle 2 1 1 A @ 40 V DC, no limit 100% 1 3A@6V DC, no limit 100% 2 1.5 A @ 40 V 100 ms 25% 3 5 A @ 35 V 4 ms 4% 4 10 A @ 20 V 1.8 ms 1% Minimum Programmable Pulse Width 3, 4 100 µs. Note: Minimum pulse width for settled source at a given I/V output and load can be longer than 100 µs. Pulse Width Programming Resolution 1 µs.
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Datasheet Meter Specifications (2601B, 2602B, 2604B) Voltage Measurement Accuracy 1, 2 Accuracy (1 Year), 23°C ±5°C ±(% rdg. + volts) Range Default Display Resolution 3 Input Resistance 100 mV 100 nV >10 GW 0.015% + 150 µV 1V 1 µV >10 GW 0.015% + 200 µV 6V 10 µV >10 GW 0.015% + 1 mV 40 V 10 µV >10 GW 0.015% + 8 mV Temperature Coefficient (0°–18°C and 28°–50°C) 4 ±(0.15 × accuracy specification)/°C. Applicable for normal mode only. Not applicable for high capacitance mode.
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2600B System SourceMeter ® SMU Instruments Contact Check 1 (not available on Model 2604B) Speed Maximum Measurement Time To Memory For 60Hz (50Hz) Accuracy (1 Year), 23°C ±5°C ±(%rdg. + ohms) FAST 1 (1.2) ms 5% + 10 W MEDIUM 4 (5) ms 5% + 1 W SLOW 36 (42) ms 5% + 0.3 W NOTES 1. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances. Additional Meter Specifications Maximum Load Impedance Normal Mode: 10 nF (typical). High Capacitance Mode: 50 µF (typical).
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Datasheet Noise, 10 Hz–20 MHz (6 V Range) <30 mV peak-peak (typical). Voltage Source Range Change Overshoot <400 mV + 0.1% of larger range (typical). Overshoot into a 100 kΩ load, 20 MHz BW. General (2601B, 2602B, 2604B) IEEE-488 IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology. USB Control (rear) USB 2.0 device, TMC488 protocol. RS-232 Baud rates from 300 bps to 115200 bps. Ethernet RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
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2600B System SourceMeter ® SMU Instruments USB File System (Front) USB 2.0 Host: Mass storage class device. Power Supply 100 V to 250 VAC, 50–60 Hz (auto sensing), 240 VA max. Cooling Forced air. Side intake and rear exhaust. One side must be unobstructed when rack mounted. EMC Conforms to European Union Directive 2004/108/EEC, EN 61326-1. Safety Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.
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Datasheet Specification Conditions (2611B, 2612B, 2614B) This document contains specifications and supplemental information for the 2611B, 2612B, and 2614B System SourceMeter® SMU instruments. Specifications are the standards against which the 2611B, 2612B, and 2614B are tested. Upon leaving the factory the 2611B, 2612B, and 2614B meet these specifications. Supplemental and typical values are non-warranted, apply at 23°C, and are provided solely as useful information.
PAGE 15
2600B System SourceMeter ® SMU Instruments Current Source Specifications Current Programming Accuracy 1 Range Programming Resolution Accuracy (1 Year), 23°C ±5°C ±(% rdg. + amps) Typical Noise (peak-peak) 0.1Hz–10Hz 100 nA 2 pA 0.06% + 100 pA 5 pA 1 µA 20 pA 0.03% + 800 pA 25 pA 60 pA 10 µA 200 pA 0.03% + 5 nA 100 µA 2 nA 0.03% + 60 nA 3 nA 1 mA 20 nA 0.03% + 300 nA 6 nA 10 mA 200 nA 0.03% + 6 µA 200 nA 100 mA 2 µA 0.03% + 30 µA 600 nA 1A2 20 µA 0.05% + 1.
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Datasheet Current Source Output Settling Time Time required to reach within 0.1% of final value after source level command is processed on a fixed range. Values below for Iout × Rload = 1 V unless noted. 3 A Range <80 µs typical (current less than 2.5 A, Rload >2 Ω). 1 A–10 mA Ranges <80 µs typical (Rload >6 Ω). 1 mA Range <100 µs typical. 100 µA Range <150 µs typical. 10 µA Range <500 µs typical. 1 µA Range <2.5 ms typical. 100 nA Range <25 ms typical.
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2600B System SourceMeter ® SMU Instruments Quadrant Diagram +10A 4 +1.5A +1A 3 3 2 +0.1A 0A –0.1A –1A –1.5A 2 DC 1 Pulse 2 2 3 Pulse 3 Pulse 4 –10A –200V –180V –20V –5V 0V +5V +20V +180V +200V NOTES 1. Times measured from the start of pulse to the start off-time; see figure below. Pulse Level 90% Start toff Start ton 10% Bias Level 10% ton toff 2. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C.
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Datasheet Meter Specifications (2611B, 2612B, 2614B) Voltage Measurement Accuracy 1, 2 Range Default Display Resolution 3 Input Resistance Accuracy (1 Year), 23°C ±5°C ±(% rdg. + volts) 200 mV 100 nV >10 GW 0.015% + 225 µV 2V 1 µV >10 GW 0.02% + 350 µV 20 V 10 µV >10 GW 0.015% + 5 mV 200 V 100 µV >10 GW 0.015% + 50 mV Temperature Coefficient (0°–18°C and 28°–50°C) 4 ±(0.15 × accuracy specification)/°C. Applicable for normal mode only. Not applicable for high capacitance mode.
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2600B System SourceMeter ® SMU Instruments Contact Check 11 (not available on 2614B) Speed Maximum Measurement Time to Memory For 60 Hz (50 Hz) Accuracy (1 Year), 23°C ±5°C ±(%rdg. + ohms) FAST 1 (1.2) ms 5% + 10 Ω MEDIUM 4 (5) ms 5% + 1 Ω SLOW 36 (42) ms 5% + 0.3 Ω NOTES 1. Add 50 µV to source accuracy specifications per volt of HI lead drop. 2. Derate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term using table below.
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Datasheet Mode Change Delay 100 μA Current Range and Above Delay into High Capacitance Mode: 10 ms. Delay out of High Capacitance Mode: 10 ms. 1 μA and 10 μA Current Ranges Delay into High Capacitance Mode: 230 ms. Delay out of High Capacitance Mode: 10 ms. Voltmeter Input Impedance 30 GΩ in parallel with 3300 pF. Noise, 10 Hz–20 MHz (20 V Range) <30 mV peak-peak (typical). Voltage Source Range Change Overshoot (for 20 V range and below) <400 mV + 0.1% of larger range (typical).
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2600B System SourceMeter ® SMU Instruments Absolute Maximum Sink Current (flowing into Digital I/O pin) –11 mA. 5 V Power Supply Pins Limited to 250 mA total for all three pins, solid state fuse protected. Safety Interlock Pin Active high input. >3.4 V @ 24 mA (absolute maximum of 6 V) must be externally applied to this pin to ensure 200 V operation. This signal is pulled down to chassis ground with a 10 kΩ resistor. 200 V operation will be blocked when the INTERLOCK signal is <0.
PAGE 22
Datasheet Specification Conditions (2634B, 2635B, 2636B) This document contains specifications and supplemental information for the 2634B, 2635B, and 2636B System SourceMeter® SMU instruments. Specifications are the standards against which the 2634B, 2635B, and 2636B are tested. Upon leaving the factory, the 2634B, 2635B, and 2636B meet these specifications. Supplemental and typical values are non-warranted, apply at 23°C, and are provided solely as useful information.
PAGE 23
2600B System SourceMeter ® SMU Instruments Current Source Specifications Current Programming Accuracy Programming Resolution Accuracy (1 Year), 23°C ±5°C ±(% rdg. + amps) Typical Noise (peak-peak) 0.1Hz–10Hz 1 nA 20 fA 0.15% + 2 pA 800 fA 10 nA 200 fA 0.15% + 5 pA 2 pA Range 100 nA 2 pA 0.06% + 50 pA 5 pA 1 µA 20 pA 0.03% + 700 pA 25 pA 10 µA 200 pA 0.03% + 5 nA 60 pA 100 µA 2 nA 0.03% + 60 nA 3 nA 1 mA 20 nA 0.03% + 300 nA 6 nA 10 mA 200 nA 0.
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Datasheet Current Source Output Settling Time Time required to reach within 0.1% of final value after source level command is processed on a fixed range. Values below for Iout × Rload = 1 V unless noted. Range Settling Time 1.
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2600B System SourceMeter ® SMU Instruments Quadrant Diagram +10A 4 +1.5A +1A 3 3 2 +0.1A 0A –0.1A –1A –1.5A 2 DC 1 Pulse 2 2 3 Pulse 3 Pulse 4 –10A –200V –180V –20V –5V 0V +5V +20V +180V +200V NOTES 1. Times measured from the start of pulse to the start off-time; see figure below. Pulse Level 90% Start toff Start ton 10% Bias Level 10% ton toff 2. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C.
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Datasheet Meter Specifications (2634B, 2635B, 2636B) Voltage Measurement Accuracy 1, 2 Range Default Display Resolution 3 Input Resistance Accuracy (1 Year), 23°C ±5°C ±(% rdg. + volts) 200 mV 100 nV >1014 W 0.015% + 225 µV 2V 1 µV >1014 W 0.02% + 350 µV 20 V 10 µV >1014 W 0.015% + 5 mV 200 V 100 µV >10 W 0.015% + 50 mV 14 Temperature Coefficient (0°–18°C and 28°–50°C) 4 ±(0.15 × accuracy specification)/°C. Applicable for normal mode only. Not applicable for high capacitance mode.
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2600B System SourceMeter ® SMU Instruments Additional Meter Specifications Maximum Load Impedance Normal Mode: 10 nF (typical). High Capacitance Mode: 50 µF (typical). Common Mode Voltage 250 VDC. Common Mode Isolation >1 GΩ, <4500 pF. Overrange 101% of source range, 102% of measure range. Maximum Sense Lead Resistance 1 kΩ for rated accuracy. Sense Input Impedance >1014Ω.
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Datasheet General (2634B, 2635B, 2636B) IEEE-488 IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology. USB Control (rear) USB 2.0 device, TMC488 protocol. RS-232 Baud rates from 300bps to 115200bps. Programmable number of data bits, p arity type, and flow control (RTS/CTS hardware or none). Ethernet RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
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2600B System SourceMeter ® SMU Instruments Safety Interlock Pin Active high input. >3.4 V @ 24 mA (absolute maximum of 6 V) must be externally applied to this pin to ensure 200 V operation. This signal is pulled down to chassis ground with a 10 kΩ resistor. 200 V operation will be blocked when the INTERLOCK signal is <0.4 V (absolute minimum –0.4 V).
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Datasheet Measurement Speed Specifications 1, 2, 3 (All Instruments) Maximum Sweep Operation Rates (operations per second) for 60Hz (50Hz): Source Measure To Memory Using User Scripts Source Measure To GPIB Using User Scripts Source Measure To Memory Using Sweep API Source Measure To GPIB Using Sweep API Trigger Origin Measure To Memory Using User Scripts 0.001 NPLC Internal 20000 (20000) 10500 (10500) 7000 (7000) 6200 (6200) 12000 (12000) 5900 (5900) 0.
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2600B System SourceMeter ® SMU Instruments Supplemental Information (All Instruments) Front Panel Interface Two-line vacuum fluorescent display (VFD) with keypad and rotary knob. Display Show error messages and user defined messages. Display source and limit settings. Show current and voltage measurements. View measurements stored in dedicated reading buffers. Keypad Operations Change host interface settings. Save and restore instrument setups. Load and run factory and user defined test scripts (i.e.
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Datasheet TIMER Free running 47-bit counter with 1 MHz clock input. Reset each time instrument powers up. Rolls over every 4 years. Timestamp TIMER value automatically saved when each measurement is triggered. Resolution 1 µs. Accuracy ±100 ppm. Supplied Accessories (All Instruments) Operators and Programming Manuals 2600-ALG-2 Low Noise Triax Cable with Alligator Clips, 2m (6.6 ft.
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2600B System SourceMeter ® SMU Instruments GPIB Interfaces and Cables 7007-1 Double Shielded GPIB Cable, 1 m (3.3 ft.) 7007-2 Double Shielded GPIB Cable, 2 m (6.6 ft.) KPCI-488LPA IEEE-488 Interface/Controller for the PCI Bus Digital I/O, Trigger Link, and TSP-Link 2600-TLINK Digital I/O to TLINK Adapter Cable, 1 m CA-126-1A Digital I/O and Trigger Cable, 1.
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Datasheet Ordering Information (All Instruments) 2601B Single-channel System SourceMeter SMU Instrument (3 A DC, 10 A Pulse) 2602B Dual-channel System SourceMeter SMU Instrument (3 A DC, 10 A Pulse) 2604B Dual-channel System SourceMeter SMU Instrument (3 A DC, 10 A Pulse, Benchtop Version) 2611B Single-channel System SourceMeter SMU Instrument (200 V, 10 A Pulse) 2612B Dual-channel System SourceMeter SMU Instrument (200 V, 10 A Pulse) 2614B Dual-channel System SourceMeter SMU Instrument (200 V,
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Contact Information: Australia* 1 800 709 465 Austria 00800 2255 4835 Balkans, Israel, South Africa and other ISE Countries +41 52 675 3777 Belgium* 00800 2255 4835 Brazil +55 (11) 3759 7627 Canada 1 800 833 9200 Central East Europe / Baltics +41 52 675 3777 Central Europe / Greece +41 52 675 3777 Denmark +45 80 88 1401 Finland +41 52 675 3777 France* 00800 2255 4835 Germany* 00800 2255 4835 Hong Kong 400 820 5835 India 000 800 650 1835 Indonesia 007 803 601 5249 Italy 00800 2255 4835 Japan 81 (3) 6714 3010