Datasheet

TEK.COM 9
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument
Current Measurement Specifications
Current Measurement Accuracy
Range Display Resolution
Accuracy (1 Year)
23 °C ± 5 °C
± (% rdg. + amps)
1
1 A 1 µA 0.12% + 0.5 mA
5 A 1 µA 0.12% + 1 mA
10 A 10 µA 0.12% + 1 mA
Current Measure Settling Time Time required to reach specified accuracy of after source level command is processed on a fixed range.
Current Range: 1 A – 10 A.
Settling Time: < 9 µs (typical).
Temperature Coefficient (0°–18 °C and 28°–50 °C)
± (0.15 × accuracy specification)/°C.
Additional Pulser Characteristics
Maximum Load Inductance 3 µH (cable plus device under test (DUT)), measured at 100 kHz.
Common Mode Isolation >1 GΩ, <4500pF.
Overrange 100% of bias range, 101% of source range, 102% of measure range.
Maximum Source/Sense
Lead Resistance 0.5 Ω / 1 kΩ per lead.
Sense High/Low Input Impedance 2 MΩ (typical).
SMU-to-Pulser Transition Time <7 ms.
A/D Aperture Characteristics
A/D Converter Speed 1 µs 10 µs 100 µs
Effective Number of
Conversions
1 10 100
Effective Number
of Bits (ENOB)
Current 12 14 15
Voltage 14 16 18
Additional Measure Current
Noise Uncertainty
±1.5 mA 0 A 0 A
Additional Measure Voltage
Noise Uncertainty
±0.03% of measure
voltagerange
0% 0%
NOTES
1. Accuracies valid for 10 µs aperture, measurement beginning at the end of the settling time. Refer to A/D Aperture Characteristics for other apertures.