Datasheet

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The new 2601B-PULSE System SourceMeter 10µs

Pulser/SMU Instrument with PulseMeter

™

technology is

an industry-leading high current/high speed pulser with

measure plus the full functionality of a traditional SMU.

This new pulser offers leading 10A current pulse output

at 10V with a pulse width minimum of 10 µs, perfect for

testing vertical cavity surface emitting lasers (VCSEL)

used in LIDAR and facial recognition, LEDs for lighting

and displays, semiconductor device characterization,

surge protection testing, and so much more. The pulser’s

built-in dual 1Megasample/second (MS/s), 18-bit

digitizers make it possible to acquire both pulse current

and voltage waveforms simultaneously without the need

to use a separate instrument. The 2601B-PULSE is a

powerful solution that signiﬁcantly boosts productivity

in applications ranging from benchtop characterization

through highly automated pulsed I-V production test. For

automated system applications, the 2601B-PULSE’s Test

Script Processor (TSP

) runs complete test programs

from inside the instrument for industry-best throughput. In

larger, multi-channel applications, the Keithley TSP-Link

technology works together with TSP technology to enable

high-speed, pulser/SMU-per-pin parallel testing. Because

the 2601B-PULSE offers full isolation that does not require

a mainframe, it can be easily reconﬁgured and re-deployed

as your test applications evolve.

Key Features

• Industry leading 10A @ 10V, 10microsecond

pulseoutput

• No tuning required for inductive loads up to 3 µH

• Dual 1 Megasample/second digitizers for high speed

I/V pulse measurements (pulser function only)

• DC capability up to ±40V @ ±1.0A, 40 Watt

• TSP technology embeds complete test programs inside

the instrument for best-in-class system-level throughput

• TSP-Link expansion technology for multi-channel

parallel test without a mainframe

• USB 2.0, LXI Core, GPIB, RS-232, and digital

I/Ointerfaces

• Supported in the Keithley KickStart non-programming

software tool

2601B-PULSE System SourceMeter

10µs Pulser/SMU Instrument

Datasheet

SMU (I or V Source)

Full DC Operation

Pulse Operation:

Pulse Width >150 µs, typical

Dual Integrating ADCs:

One each for V and I

PULSER (I Source only)

DC Bias

Pulse Operation:

10 µs ≤ Pulse Width ≤ 500 µs

Dual 1 MS/s High-speed ADCs:

One each for V and I

External Interlock/Connector box included with 2601B-PULSE

Summary of content (20 pages)

PAGE 1
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument ® Datasheet in applications ranging from benchtop characterization through highly automated pulsed I-V production test. For automated system applications, the 2601B-PULSE’s Test Script Processor (TSP®) runs complete test programs from inside the instrument for industry-best throughput.
PAGE 2
Datasheet Pulsed Testing for Device Characterization Testing real device operation and minimizing the heating effects with on-wafer testing just got easier with the 2601B-PULSE SMU. Thermal management is critical during the testing of many devices, especially those at the semiconductor wafer level, such as VCSELs, laser diodes, and LEDs. Pulsed I-V testing minimizes the heating effects of the current in the device, especially if tested at the wafer level when devices have no temperature control circuitry.
PAGE 3
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Unmatched Throughput for Automated Test with TSP Technology For test applications that demand the highest levels of automation and throughput, the 2601B-PULSE’s TSP technology delivers industry-best performance. TSP technology goes far beyond traditional test command sequencers — it fully embeds, then executes, complete test programs from within the SMU instrument itself.
PAGE 4
Datasheet SMU-Per-Pin Parallel Testing with TSP-Link Technology TSP-Link is a channel expansion bus that enables multiple 2601B-PULSE SMUs to be inter-connected and function as a single, tightly-synchronized, multi-channel system. The 2601B-PULSE’s TSP-Link technology works together with its TSP technology to enable high-speed, SMU-perpin parallel testing.
PAGE 5
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Comprehensive Built-in Connectivity Rear panel access to rear-input connectors, remote control interfaces (GPIB, USB 2.0, and LXI/ethernet), D-sub 25-pin digital I/O port (for internal/external trigger signals and handler control), and TSP-Link connectors make it simple to configure multiple instrument test solutions and eliminate the need to invest in additional adapter accessories.
PAGE 6
Datasheet Specifications Specification Conditions This document contains specifications and supplemental information for the 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument. Specifications are the standards against which the 2601B-PULSE is tested. Upon leaving the factory, the 2601B-PULSE meets these specifications. Supplemental and typical values are non-warranted, apply at 23 °C, and are provided solely as useful information.
PAGE 7
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Additional Pulser Source Specifications Rise Time (10% to 90%) <1.7 µs for a full-scale step of current into any load voltage (10 V maximum). Additional Zero-Crossing Delay 200 (ns × A) 1 μs + _______________________ Pulse Current (in Amps) Pulse Current and Duty Cycle Maximum duty cycle is given by: 0.3125 – |Ibias| ||Ipulse| – |Ibias|| * 100% For Ibias ≤ 10 mA: Pulse Current Max.
PAGE 8
Datasheet Bias Current Source Specifications Current Programming Accuracy Range Programming Resolution Accuracy (1 Year) ±(% rdg. + amps) Typical Noise (RMS) 0.1 Hz–100 kHz 250 mA 10 µA 0.17% + 1 mA 200 µA Temperature Coefficient (0°–18 °C and 28°–50 °C) ± (0.15 × accuracy specification)/°C. Pulse Width Programming Resolution 1 µs. Pulse Width Programming Maximum 500 µs. Pulse Width Programming Minimum 10 µs. Pulse Width Programming Accuracy ±200 ns. Pulse Width Jitter 110 ns (typical).
PAGE 9
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Current Measurement Specifications Current Measurement Accuracy Current Measure Settling Time Range Display Resolution Accuracy (1 Year) 23 °C ± 5 °C ± (% rdg. + amps)1 1A 1 µA 0.12% + 0.5 mA 5A 1 µA 0.12% + 1 mA 10 A 10 µA 0.12% + 1 mA Time required to reach specified accuracy of after source level command is processed on a fixed range. Current Range: 1 A – 10 A. Settling Time: < 9 µs (typical).
PAGE 10
Datasheet SMU Specifications Voltage Source Specifications Voltage Accuracy1 Range Programming Resolution Accuracy (1 Year) ±(% rdg. + volts) Typical Noise (peak-peak) 0.1 Hz–10 Hz 100 mV 5 µV 0.02% + 250 µV 20 µV 1V 50 µV 0.02% + 400 µV 50 µV 6V 50 µV 0.02% + 1.8 mV 100 µV 40 V 500 µV 0.02% + 12 mV 500 µV Temperature Coefficient (0°–18 °C and 28°–50 °C) 2 ±(0.15 × accuracy specification)/ °C. Applicable for normal mode only. Not applicable for High Capacitance Mode.
PAGE 11
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Additional Source Characteristics Noise, 10 Hz to 20 MHz <20 mV peak-peak, < 3 mVRMS. 6 V range. Transient Response Time < 70 μs for the output to recover to within 0.1% for a 10% to 90% step change in load. Overshoot Voltage <±0.1% + 10 mV. Step size = 10% to 90% of range, resistive load, maximum current limit/compliance. Current <±0.1%. Step size = 10% to 90% of range, resistive load.
PAGE 12
Datasheet Meter Specifications Voltage Measurement Accuracy 1 Accuracy (1 Year)2, ±(% rdg. + volts) Range Default Display Resolution 100 mV 100 nV 0.015% + 150 µV 1V 1 µV 0.015% + 200 µV 6V 10 µV 0.015% + 1 mV 40 V 10 µV 0.015% + 8 mV Temperature Coefficient (0°–18 °C and 28°–50 °C) 3 ±(0.15 × accuracy specification)/ °C. Current Measurement Accuracy Accuracy (1 Year)2, ±(% rdg. + amps) Range Default Display Resolution 100 nA 100 fA 0.08% + 100 pA 1 µA 1 pA 0.025% + 500 pA 0.
PAGE 13
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Additional Characteristics Maximum Load Impedance Normal Mode 10 nF. High Capacitance Mode 50 µF. Overrange 101% of source range, 102% of measure range. Maximum Sense Lead Resistance 1 kW for rated accuracy. Sense High Input Impedance >10 GW. High Capacitance Mode 1, 2, 3 Accuracy Specifications Accuracy specifications are applicable in both Normal and High Capacitance Modes. Voltage Source Output Settling Time Time required to reach 0.
PAGE 14
Datasheet SMU Pulse Characteristics Region Maximum Current Limit Maximum Pulse Width 1 Maximum Duty Cycle 2 1 1 A @ 40 V DC, no limit 100% 1 3A@6V DC, no limit 100% 2 1.5 A @ 40 V 100 ms 25% 3 5 A @ 35 V 4 ms 4% 4 10 A @ 20 V 1.8 ms 1% 5 5A@6V 10 ms 10% +10A 4 +5A 5 +3A 3 +1.5A +1A 3 2 2 DC Pulse 0A 1 Pulse Pulse –1A –1.5A 3 –3A Pulse 2 2 3 5 –5A 4 –10A –40V –35V –20V –6V 0V +6V +20V +35V +40V Minimum Programmable Width 1, 3 100 µs.
PAGE 15
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument SMU Measurement Speed Characteristics 1 Maximum Sweep Operation Rates (operations per second) for 60 Hz (50 Hz) Source Measure To Memory Using User Scripts Source Measure To USB Using User Scripts Source Measure To Memory Using Sweep API Trigger Origin Measure To Memory Using User Scripts 0.001 Internal 20000 (20000) 9800 (9600) 6700 (6700) 6600 (6600) 13400 (13400) 6450 (6450) 0.
PAGE 16
Datasheet General IEEE-488 IEEE-488.1 compliant. Supports IEEE Std 488.2 common commands and status model topology. USB Control (rear) USB 2.0 device, USB-TMC488 protocol. RS-232 Baud rates from 300 bps to 115200 bps. Ethernet RJ-45 connector, 10/100BaseT, Auto-MDIX. Expansion Interface The TSP-Link expansion interface allows TSP-enabled instruments to trigger and communicate with each other. Cable Type: Category 5e or higher LAN crossover cable. 3 meters (9.
PAGE 17
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument USB File System (Front) USB 2.0 Host: Mass storage class device. Power Supply 100 V to 240 VAC, 50–60 Hz (auto sensing), 240 VA maximum. Cooling Forced air. Side intake and rear exhaust. One side must be unobstructed when rack mounted. EMC Conforms to European Union EMC Directive. Safety NRTL listed to UL61010-1:2008 and CSA C22.2 No. 61010-1. Conforms to European Union Low Voltage Directive.
PAGE 18
Datasheet Ordering Information 2601B-PULSE 2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Supplied Accessories Operators and Programming Manuals Available at www.tek.
PAGE 19
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument Digital I/O, Trigger Link, and TSP-Link 2600-TLINK Digital I/O to TLINK Adapter Cable, 1 m 17469460X TSP-Link/Ethernet Cable (two per unit) CA-126-1A Digital I/O and Trigger Cable, 1.5 m Test Fixtures and Adapters 7078-TRX-GND 3-slot make triax to female BNC adapter (guard removed). Used with 8101-PIV and 8101-4TRX test fixtures.
PAGE 20
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