O P E R A T I N G M A N U A L A L incl. Declaration of Conformity tina42e1 VSC150 Part Number 399-005 Vacuum Switch O P E R A T I N G M A N U incl.
General Note The right of alterations in the design and the technical data is reserved. The illustrations are not binding. 2 tina42e1 (2005-03) VSC150.ga tina42e1 (2005-03) VSC150.ga General Note The right of alterations in the design and the technical data is reserved. The illustrations are not binding.
Contents 1 1.1 1.1.1 1.2 1.2.1 1.2.2 1.3 1.3.1 1.3.2 1.3.3 1.4 1.4.1 1.4.2 Page Description . . . . . . . . . . . . . . . . . . . . . . . . 4 General . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Technical Data . . . . . . . . . . . . . . . . . . . . . . 5 VSC150 Vacuum Switch . . . . . . . . . . . . . . . 5 SV Switching Amplifier . . . . . . . . . . . . . . . . 6 Technical Description . . . . . . . . . . . . . . . . . 6 Design . . .
1 Description 1.1 General These Operating Instructions contain important information on the functions, installation, operation, and maintenance of the Vacuum Switch and the switching amplifier. Important remarks concerning operational safety and protection are emphasized as follows: Warning Indicates procedures that must be strictly observed to prevent hazards to persons. immediately after delivery, even if they are to be put into operation at a later date.
The Vacuum Switch VSC150 can also be used as a differential pressure switch. Note the Technical Data given in section 1.2. 1.2 Technical Data 1.2.1 VSC150 Vacuum Switch Switching range 0.5 to 2000 mbar Overload limit 3000 mbar Response sensitivity 0.1 mbar Switching hysteresis 0.5 mbar Temperature coefficient 0.4 % / K of switching value Ambient temperature, briefly (max. 8 h) continuous 120 °C 90 °C Switching voltage 24 V Switching current 10 mA Connector Weight 1.
1.2.2 SV Switching Amplifier Mains supply 1.3 110 to 130 VAC 220 to 240 VAC Mains frequency 50 / 60 Hz Power consumption 3 VA Output relay Switching voltage, max. Switching current, max. Switching capacity, max. 250 V 5A 500 VA Response time 30 ms Release time 7 ms Control circuit 24 V / 10 mA 1.3.1 Design The VSC150 is a diaphragm absolute pressure switch. He can also be used as a differential pressure switch.
1.3.3 Switching Amplifier Mode of Operation A switching amplifier is required for each Vacuum Switch. The output relay supplied with heavy-duty change-over contact is energized when the pressure drops below the value preset on the Vacuum Switch, i.e. if the contact between diaphragm and contact pin in the reference chamber opens by flexing of the diaphragm. The built-in slide switch (Fig. 5) must be set to the connected type of Vacuum Switch. Key to Fig.
1.4 Equipment 1.4.1 Scope of Delivery Part Number Vacuum Switch VSC150 or 399-005 Switching amplifier SV 399-008 Operating Instructions tina42d1 tina42e1 1.4.2 Accessories Clamping ring DN 16 KF, made of plastic *) Centering ring DN 16 KF, made of PTFE, with FPM O-ring *) For pressure systems (1000 to max. 3000 mbar abs.) Outer centering ring Clamping ring for ultrahigh vacuum disk DN 16 KF *) For floating installation 8 1.4 tina42e1 (2005-03) VSC150.ga tina42e1 (2005-03) VSC150.
2 Operation 2.1 Connection to the Vacuum System The Vacuum Switch is mounted vertically. This ensures that condensate can escape. Flange and gaskets must be free of dust and grease. If the Vacuum Switch is to be floated (electrically) it has to be separated from the vacuum system by an insulating piece (Equipment see Section 1.4.2). Key to Fig. 2 1 Name plate 2 Label giving the switching threshold 18 21 1 Height with differential pressure adapter 133.5 mm 105 19 50 119 2 DN 16 KF 85 Fig.
2.2 Electrical connection Warning The terminals of the Vacuum Switch must not be connected under any circumstances to the mains voltage. DANGER TO LIFE! The housing potential may not exceed the levels of protective low voltages referred to ground. 55,5 121 109 15 4,2 21 80 50,5 Pg 9 Pg 9 21,5 163 Fig. 3 SV Switching amplifier (dimensional drawing) 10 2.2 tina42e1 (2005-03) VSC150.ga (2005-03) VSC150.
2.2.1 Connection of the Vacuum Switch The Vacuum Switch is connected as follows: - Unscrew fastening screw completely (4/3); lift-off connecting box and gasket (4/2) from the Vacuum Switch. - Detach insert (4/4) applying a screwdriver at (4/5). Note Socket contact 3 (4/4) and protective ground conductor are not connected! See Fig. 5 for connection cables.
2.2.2 SV Switching Amplifier The diaphragm contact in the Vacuum Switch is unilaterally connected to ground and designed for a maximum load of 24 V / 10 mA. The built-in slide switch (5/1) must be set to the connected type of pressure switch. For electrical installation the switching amplifier SV 110 is delivered set for 220 ... 240 VAC. For mains voltages of 110 ... 130 VAC 1 2 AB Key to fig.
2.3 Design Versions and Switch Point Setting A suitable vacuum gauge or pressure gauge is required for switch point setting. The adjusting valve (1/4) resp. (6/4) is freely accessible and the user may set the switching pressure to any value within the whole range. Note To avoid switching errors, pressure settings below 20 mbar should only be made under clean conditions and using dry gas. 2.3.1 VSC150 Vacuum Switch With adjustable switching pressure in the range from 0.5 to 2000 mbar.
2.3.1.1 Setting Switching Pressures Higher than 20 mbar Condition: Correct basic adjustment of the Vacuum Switch. Basic adjustment of the switch in the factory provided that at equal pressure in sensing and reference chamber the contact is just closed. The diaphragm (1/3) touches the contact pin (1/6) in the reference chamber (1/5). Check this basic adjustment. Open adjusting valve (1/4) resp. (6/4) using an Allan key (size across flats 5 mm) by 2 anticlockwise turns.
Then admit dry protective gas to the Vacuum Switch up to a pressure of 20 mbar, check basic adjustment of the Vacuum Switch as described in 2.3.1.1. To increase the switching pressure turn adjusting screw (6/2) counterclockwise. Close adjusting valve turning clockwise with the dynamometric key. Note The amount of torque for the adjustment valve is Md = 3.5 to 4 Nm. Now produce desired pressure - between 0.5 and 20 mbar.
Caution Only the sensing chamber can be opened for cleaning. The reference chamber can not be opened and must therefore be protected from contaminaton. 2.5 Typical Applications 2.5.1 Protection of a Gate Valve which must only be Operated when Pressure on both Sides Becomes Equal 2.4.2 Switching Logic Assembly as shown in the diagram, Fig. 7. With correct basic adjustment of the switch (see section 2.3.1.
2.5.2 In a Vacuum System it must be Prevented that in Case of Failure Gas Flows into the Vacuum Chamber M VSC 150 Assembly as shown in the diagram, Fig. 7. Also in this case, as in 2.5.1, the contact setting of the Vacuum Switch should correspond to the basic adjustment. Control the electrically operated valve (normally closed) via the break-contact, terminals 12 and 13 (see Fig. 5), of the SV switching amplifier. In case of power failure this valve closes.
max. turning the adjusting screw (6/2) clockwise. M VSC 150 2.5.4 Automatic Venting of a Vacuum Chamber to a Slight Overpressure SV Assembly as in Fig. 9. R Loop the control circuit of the venting valve via the break contact of the switching amplifier relay, terminals 12 and 13 (see Fig. 5). The switching pressure can be raised by 20 mbar max. above atmospheric pressure by turning the adjusting screw (6/2) clockwise. Fig. 9 Automatic venting between atmospheric pressure and + 20 mbar 2.5.
contact, terminals 12 and 13, of the two SV switching amplifiers. 3 As soon as during pump down or venting the differential pressure between annealing pot and vacuum furnace in either direction exceeds 10 mbar, the respective pump valve or venting valve is closed. The valves open again as soon as the differential pressure has dropped below the set switching pressure. Switching pressures can be varied between 0.5 and 20 mbar by means of the adjusting screw (6/2).
Note - Reassemble the setting machanism in the order compression spring, ball and adjusting screw. - When screwing in the adjusting screw grease the O-ring slightly with Lithelen. Reassemble Vacuum Switch. Set adjusting screw (6/2) as described in section 2.3. 3.2 Cleaning the reference chamber Cleaning of the reference chamber is only possible in the VSC150 Vacuum Switch if the latter is used as a differential pressure switch.
4 Disposal Warning Contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Warning Contaminated components Contaminated components (radioactive, toxic, caustic or biological hazard etc.
EEC Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 73/23/EEC and the Directive relating to electromagnetic compatibility 89/336/EEC.
tina42e1 (2005-03) VSC150.ga q yes q no no no no no no 1) or not containing any amount of hazardous residues that exceed the permissible exposure limits toxic caustic biological hazard explosive radioactive other harmful substances q 1) q 1) q q q q 1) 2) Products thus contaminated will not be accepted without written evidence of decontamination.
INFICON Ltd. LI-9496 Balzers, Principality of Liechtenstein Tel.: +423 388 3111 Fax: +423 388 3700 E-mail: reachus@inficon.com UNITED STATES FRANCE GERMANY LIECHTENSTEIN UNITED KINGDOM CHINA JAPAN KOREA SINGAPORE TAIWAN SINGAPORE TAIWAN Due to INFICON s continuing program of product improvements, specifications are subject to change without notice. Vi s i t o u r w e b s i t e f o r c o n t a c t i n f o r m a t i o n a n d o t h e r s a l e s o ff i c e s w o r l d w i d e . w w w.
