O P E R A T I N G M A Sputtering Crystal Sensor IPN 074-157 N U A L
O P E R A T I N G M A Sputtering Crystal Sensor IPN 074-157L N U A L
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Sputtering Crystal Sensor Operating Manual Table Of Contents Chapter 1 Sensor Specifications 1.1 1.1.1 1.1.2 1.1.3 1.1.4 1.2 1.3 Specifications for the Sputtering Crystal Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 Unpacking Instructions .
Sputtering Crystal Sensor Operating Manual Chapter 4 Maintenance 4.1 4.1.1 4.1.2 4.1.3 4.1.4 4.1.5 4.1.6 4.2 4.3 4.4 4.5 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . .
Sputtering Crystal Sensor Operating Manual Chapter 1 Sensor Specifications 1.1 Specifications for the Sputtering Crystal Sensor Figure 1-1 Sputtering Crystal Sensor (IPN 750-618-G1) Maximum bakeout temp with no water: . . . . . . . . . . . . . . . . . . 105 °C Size (maximum envelope): . . . . . . . . 1.36" OD x 0.69" high (3.45 cm x 1.75 cm) Water, air and coax length:. . . . . . . . Standard 30" (76.2 cm) Crystal exchange:. . . . . . . . . . . . . . . Rear-loading Mounting: . . . . . . . . . . . . . . .
Sputtering Crystal Sensor Operating Manual 1.1.2 Materials Body and Holder . . . . . . . . . . . . . . . Au plated Be-Cu Springs, Electrical Contacts . . . . . . . Au plated Be-Cu Water tubes . . . . . . . . . . . . . . . . . . . Au plated Be-Cu, 0.125" (0.32 cm) O.D. Connector. . . . . . . . . . . . . . . . . . . . . 304 Stainless steel Insulators . . . . . . . . . . . . . . . . . . . . . 99% Al2O3 Wire . . . . . . . . . . . . . . . . . . . . . . . . . Teflon insulated copper Solder. . . . . . . . . . . .
Sputtering Crystal Sensor Operating Manual IPN 074-157L Figure 1-2 Sputtering Crystal Sensor Head 1-3
IPN 074-157L Figure 1-3 Sputtering Crystal Head Assembly Sputtering Crystal Sensor Operating Manual 1-4
Sputtering Crystal Sensor Operating Manual 1.2 Troubleshooting The most useful tool for diagnosing sensor head problems is the DVM (Digital Volt Meter). Disconnect the short oscillator cable from the feedthrough and measure the resistance from the center pin to ground. If the reading is less than 1-2 megohms the source of the leakage should be found and corrected.
Sputtering Crystal Sensor Operating Manual Table 1-2 Symptom - Cause - Remedy Chart (continued) SYMPTOM CAUSE Crystal ceases to oscillate during deposition before it reaches its “normal” life Crystal is being hit by small Use a shutter to shield the droplets of molten material sensor during initial period of from the evaporation source. evaporation; move the sensor further away. Damaged crystal. REMEDY Replace the crystal.
Sputtering Crystal Sensor Operating Manual IPN 074-157L Table 1-2 Symptom - Cause - Remedy Chart (continued) SYMPTOM CAUSE REMEDY Thermal instability: large changes in thickness reading during source warm-up (usually causes thickness reading to decrease) and after the termination of deposition (usually causes thickness reading to increase). Crystal not properly seated. Check and clean the crystal seating surface of the crystal holder. Excessive heat input to the crystal.
Sputtering Crystal Sensor Operating Manual 1.3 Specifications for the Shutter Assembly Figure 1-4 Pneumatic Shutter Module (750-005-G1) with Sputtering Sensor Materials: . . . . . . . . . . . . . . . . . . . . . 300 series stainless steel Pressure: . . . . . . . . . . . . . . . . . . . . . 90-95 PSIG (6.2-6.55 bar) [620-655 kPa] operation 110 PSIG (7.6 bar) [760 kPa] maximum Shutter:. . . . . . . . . . . . . . . . . . . . . . . Pneumatically operated Braze:. . . . . . . . . . . . . . . . . . . . . . . .
Figure 1-5 Sputtering Crystal Head w/Pneumatic Shutter IPN 074-157L Sputtering Crystal Sensor Operating Manual 1-9
1 - 10 IPN 074-157L Figure 1-6 Pneumatic Shutter Module for Sputtering Unit Assembly Sputtering Crystal Sensor Operating Manual
Sputtering Crystal Sensor Operating Manual Chapter 2 Sensor Installation 2.1 Introduction A choice of sensor type must be determined by the type of process to be performed, the type of material to be evaporated, and the physical characteristics of the process chamber. CAUTION The sensor head, water tubes, cable, etc., should be clean and grease free when installed in the vacuum chamber. These parts should be handled while wearing clean nylon gloves.
Sputtering Crystal Sensor Operating Manual 8 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display. When the moisture evaporates, the thickness indication should return to approximately zero. If the above conditions are observed, you can assume the sensor is in proper working order and may be installed. 2.2.
Sputtering Crystal Sensor Operating Manual 5 Connect the other end of the XIU cable to a sensor channel at the rear of the controller. 6 Install the crystal as instructed by section 4.2 on page 4-3. 7 Connect power to the controller and set the power switch to ON. Set density at 1.00 gm/cc, and zero thickness. The display should indicate 0 or ±001. Crystal life should read from 0 to 3%. 8 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display.
Sputtering Crystal Sensor Operating Manual 2.3 General Guidelines Figure 2-1 shows the typical installation of an INFICON® water-cooled crystal sensor in the vacuum process chamber. Use the illustration and the following guidelines to install your sensors for optimum performance and convenience.
Sputtering Crystal Sensor Operating Manual 2.3.1 Crystal Sensor Installation Generally, install the sensor as far as possible from the evaporation source (a minimum of 10" or 254 mm) while still being in a position to accumulate thickness at a rate proportional to accumulation on the substrate. Figure 2-2 shows proper and improper methods of installing sensors.
Sputtering Crystal Sensor Operating Manual CAUTION To prevent damage to the feedthrough or sensor during brazing, insure that at least one inch of water tube is left between the sensor and the feedthrough. After cutting the water and air tubes, verify that they are clear of metal particles by forcing compressed air through the tubing. Torch brazing is acceptable for connecting the sensor to the feedthrough water tube.
Sputtering Crystal Sensor Operating Manual IPN 074-157L Figure 2-3 Suggested Sensor Locations in Sputtering System Because of geometric factors, variations in surface temperature, and differences in electrical potential, the crystals and substrates often do not receive the same amount of material. If you want the thickness indication on the unit to represent the thickness on the substrates, calibration is required to determine the tooling. Refer to the instrument manual for calibration procedures.
Sputtering Crystal Sensor Operating Manual 3 The sensor contains a permanent magnet, see Figure 2-4. If the sensor is to be installed in a sputtering system which employs external magnetic fields, make sure the magnetic field direction of the sensor is not opposing the external magnetic field, see Figure 2-5. Figure 2-4 Sensor Magnet and Field Configuration Magnetic Field Direction Side View Magnetic Field Direction View From Inside Magnet can be rotated inside the cover.
Sputtering Crystal Sensor Operating Manual IPN 074-157L Figure 2-5 Orientation of Sensor Magnetic Field in a Sputtering System Employing External Magnetic Field The cancellation of magnetic fields near the sensing crystal may cause undesirable heating of the crystal. Use a small magnet to determine the field direction and rotate the magnet in the sensor to a desirable position.
Sputtering Crystal Sensor Operating Manual 2.5 Sensor Shutter Function Check Temporarily connect an air supply — (90-95 PSIG (6.2-6.55 bar) [620-655 kPa]; 110 PSIG (7.6 bar) [760 kPa] maximum) — to the actuator air line and test operation (10-15 cycles). When actuated, shutter movement should be smooth, rapid, and complete, and should contract completely from the crystal opening. When deactivated, the shutter should completely cover the crystal opening.
Sputtering Crystal Sensor Operating Manual 2.6 Sputtering Sensor Shutter Module Installation Instructions 2.6.1 Introduction The Sputtering Shutter Module installation kit was designed to facilitate the mounting of a pneumatic shutter module onto a sputtering sensor. The pneumatic shutter module is assembled and tested prior to shipment. To install the pneumatic shutter module, you must have the parts shown in Table 2-1. Table 2-1 Parts Required to Install the Pneumatic Shutter Module Qty.
Sputtering Crystal Sensor Operating Manual 2.6.2 Installation Before you begin the installation, refer to the illustrations to get an idea of how the parts are assembled. The shutter assembly may be installed onto a new Sputtering sensor or a used sensor in good condition. 1 Remove the actuator cover screw (4-40 x 3/16) on the shutter assembly and remove the actuator cover. See Figure 2-6.
Sputtering Crystal Sensor Operating Manual Figure 2-8 Bottom View Stop Screw Shutter Pivot Stop Screw Actuator Mounting Bracket Water Tube Clamp 4 Place the sensor cover on the shutter module assembly as shown in Figure 2-8. The sensor water lines will fit between the shutter pivot and the stop screw. Carefully bend the water lines as shown. 5 Position the water line clamp on the shutter assembly and install the two mounting screws. Tighten the screws finger tight.
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Sputtering Crystal Sensor Operating Manual Chapter 3 Installation of the Solenoid Valve Assembly 3.1 Introduction The solenoid valve assembly and the feedthrough should be installed at the same time. The same valve assembly is used for both the 1" and the (recommended) 2 3/4" feedthroughs. However, if the assembly is to be used with the 2 3/4" feedthrough, you will need to modify the valve bracket as follows. See Figure 5-6 on page 5-7.
Sputtering Crystal Sensor Operating Manual CAUTION Applicable to sensor 750-446 only: Use of more than 80" (2 meters) of 1/8" tubing between the valve and the bellows may cause switcher failure because of the time required to bleed out sufficient air during de-pressurization. If tubing greater than 1/8" is used, the maximum length must be reduced proportional to the additional volume. 8 Attach the valve’s intake (normally closed (NC) port) to the 80-90 PSIG (5.5-6.2 bar) [550-620 kPa] source of air.
Sputtering Crystal Sensor Operating Manual 3.4 Electrical and Pneumatic Connections 3.4.1 Electrical To complete installation of the assembly, make electrical connections where indicated in Figure 5-5 on page 5-6 to either 24 V(ac) or V(dc). Current required is approximately 70 mA. CAUTION Maximum applied voltage must not exceed 26 V(ac). 3.4.
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Sputtering Crystal Sensor Operating Manual Chapter 4 Maintenance 4.1 General Precautions 4.1.1 Handle the Crystal with Care Always use clean nylon lab gloves and clean plastic tweezers when handling the crystal. Handle the crystals only by their edges. Anything that comes in contact with the crystal surfaces may leave contamination, which may lead to poor film adhesion. Poor film adhesion will result in high rate noise and premature crystal failure. CAUTION Do not use metal tweezers to handle crystals.
Sputtering Crystal Sensor Operating Manual 4.1.4 Crystal Concerns when Opening the Chamber Thick deposits of some materials, such as SiO, Si and Ni will normally peel off the crystal when it is exposed to air, due to changes in film stress caused by gas absorption. When peeling material is observed, replace the crystal. 4.1.5 Care of the Ceramic Retainer CAUTION Do not use excessive force when handling the Ceramic Retainer Assembly since breakage may occur. Always use the crystal snatcher.
Sputtering Crystal Sensor Operating Manual 4.2 Crystal Replacement Instructions Follow the steps below to replace the crystals: (Refer to Figure 1-3 on page 1-4). Observe the general precautions (refer to section 4.1 on page 4-1) for replacing crystals. 1 Grip the crystal holder with your fingers and pull it straight out to separate it from the water-cooled front part. (You may have to disconnect the sensor cable in order to separate the parts.
Sputtering Crystal Sensor Operating Manual 4.3 Retainer Spring Adjustment Instructions Occasionally, you may become dissatisfied with the way the ceramic retainer is secured in the crystal holder. To alter the magnitude of the retaining force, use the following procedure. Tools Required Scribe or other pointed tool Needle nose pliers (two required) Procedure 1 Position the crystal holder with the crystal aperture oriented downward.
Sputtering Crystal Sensor Operating Manual 6 Use both pliers to form a new transition point according to Figure 4-3-b, thus returning the spring to a shape similar to the solid line delineation of Figure 4-3-c. 7 Reinstall the spring into the groove provided in the crystal cavity. 8 Determine if the retention force is acceptable and that the wire does not impede crystal insertion. Repeat these instructions if unacceptable retention forces persist. 4.
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Sputtering Crystal Sensor Operating Manual Chapter 5 Feedthrough Outline Drawings 5.1 List of Supplied Drawings The following Feedthrough Outline Drawings provide dimensions and other pertinent data necessary for planning equipment configurations. Figure 5-1 . . . . . . . . . . . . . . . . . . . . 1" Crystal Feedthrough (002-042) (contains one coaxial and two water tubes) Figure 5-2 . . . . . . . . . . . . . . . . . . . .
Sputtering Crystal Sensor Operating Manual Figure 5-1 1" Crystal Feedthrough (002-042) HEX NUT 1" WASHER MICRODOT CONNECTOR BNC CONN. SEAMLESS TUBE 0.188 O.D., 0.131 I.D. 0.75 0.75 5.00 2.00 5.00 1.50 0.2 0.4 0.156 IPN 074-157L 0.
Sputtering Crystal Sensor Operating Manual Figure 5-2 1" Crystal Feedthrough with Air Tube (750-030-G1) 1" CRYSTAL FEEDTHROUGH W/AIR TUBE BNC CONNECTOR MICRODOT CONNECTOR SEAMLESS TUBE 0.188 O.D., 0.131 I.D. # 10-32 INTERNAL THREAD 0.312 HEX 0.75 0.38 5.00 1.00 2.00 13.00 0.188 0.50 0.25 1. 5 0 0.125 IPN 074-157L 0.
Sputtering Crystal Sensor Operating Manual Figure 5-3 2 3/4" Single Coaxial Feedthrough (002-043 - Copper Gasket) (002-044 - Viton) 2-3/4 CONFLAT FLANGE BNC CONNECTOR CONNECTOR MICRODOT SEAMLESS TUBE (3) 0.188 O.D., 0.131 I.D. 0.5 5.00 9.00 0.265 DIA. (6) 2.75 0.20 0.40 0.30 IPN 074-157L 0.
Sputtering Crystal Sensor Operating Manual Figure 5-4 2 3/4" Dual Coax Feedthrough with Air Tube (002-080) 2-3/4 CONFLAT FLANGE BNC CONNECTOR CONNECTOR MICRODOT SEAMLESS TUBE (3) 0.188 O.D., 0.131 I.D. #10/32 INTERNAL THREAD 2.15 0.5 5.00 9.00 0.265 DIA. (6) 0.312 HEXAGONAL 0.90 0.45 2.75 0.40 0.20 0.45 IPN 074-157L 0.
5-6 IPN 074-157L Figure 5-5 2 3/4" Dual Coaxial Feedthrough and Valve Assembly Sputtering Crystal Sensor Operating Manual
IPN 074-157L Figure 5-6 Solenoid Valve Assembly Sputtering Crystal Sensor Operating Manual 5-7
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