SID-242 Thin Film Deposition Controller SQS-242 Deposition Control Software Version 3.00 User’s Guide © Copyright Sigma Instruments, Inc.
Sigma instruments
Safety Information Read this manual before installing, operating, or servicing equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. Safety Symbols WARNING: Calls attention to a procedure, practice, or condition that could possibly cause bodily injury or death.
Warranty Information This Sigma Instruments product is warranted against defects in material and workmanship for a period of 2 years from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective.
Table of Contents Chapter 1 1.0 1.1 1.2 1.3 1.4 Chapter 2 2.0 2.1 2.2 2.3 2.4 2.5 2.6 2.7 2.8 Introduction SID-242 Introduction ........................................................................................1-1 SRC Series Computer ......................................................................................1-1 SQM-242 Deposition Control Card ...................................................................1-2 SQS-242 CoDeposition Control Software ......................................
Chapter 3 SQS-242 Software (continued) 3.4.4 System ........................................................................................................3-17 Sensors ...................................................................................................3-17 Sources ...................................................................................................3-18 Digital I/O.................................................................................................3-19 PLC Setup ..
Chapter 1 Introduction 1.0 Introduction This manual covers both the hardware and software associated with the SID-242 Thin Film Deposition Controller. The SID-242 consists of four main elements, integrated into a complete deposition control system: SRC Series Rack-mount Computer SQM-242 PC Card(s) SQS-242 Windows CoDeposition Software PLC for Digital I/O (option) While the focus of this manual is on the SID-242 Controller package, it also covers each of these components separately.
Chapter 1 Introduction 1.2 SQM-242 Deposition Control Card Sigma’s SQM-242 is a PCI expansion card for use in computers running the Windows operating system. Each card measures up to four quartz sensors via BNC inputs, and supplies the control signal for two evaporation sources via a dual phone plug output. Up to two cards can be installed in a computer, creating an eight input, four output, codeposition controller.
Chapter 1 Introduction The six SoftKeys provide easy access to the common operating functions. A single tabbed dialog box provides all of the settings required for a thin film process. Material parameters, sensor/source setup, pre/post conditioning, and error conditions are all visible on a single screen. Process settings, numeric data, and graphical displays are displayed during all phases of deposition. The SQS-242 software stores process parameters in a Microsoft Access compatible database.
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Chapter 1 Quick Start 1-1
Chapter 2 Quick Start 2.0 Introduction This section covers the minimum system connections and initial setup required to run the SID-242 Deposition Controller. Consult later chapters of this manual for more detailed setup and operational instructions. 2.1 Installation All electrical connections to the SID-242 are made at the back panel of the instrument. WARNING: Care should be exercised to route SID-242 cables as far as practical from other cables that carry high voltages or generate noise.
Chapter 2 Quick Start 2.2 Front Panel Floppy Disk SoftKeys TouchPad Control Knob Front Panel Controls KeyLock Insert key and turn clockwise to enable the power and reset buttons. Turn counterclockwise to disable the power and reset. SoftKeys Provide basic instrument operations within the SQS-242 deposition program. The SoftKeys are functional only in programs written specifically for the SRC computer. TouchPad Provides mouse functions in all Windows programs, including the SQS-242 software.
Chapter 2 Quick Start 2.3 Program Startup This section will start the SID-242 and run the SQS-242 deposition control program. Power On the Computer Insert the and turn clockwise to enable the power and reset buttons. Push the power button to start the computer. Start the Program The SID-242 will boot Windows from the internal disk and start the SQS-242 deposition program. If the SQS-242 program does not start automatically, use the touchpad to double-click the desktop icon.
Chapter 2 Simulate Mode Quick Start Simulate mode allows you to familiarize yourself with SID-242 operation, and test process recipes. If the first SoftKey is labeled “START SIMULATE” then the Simulate mode is active. If the first SoftKey is labeled “START PROCESS" then normal mode is selected. Use the touchpad to select the Setup menu, then click System. On the SQM-242 tab, click the Simulate option button. Click the “Save” SoftKey label, or press the top SoftKey to activate Simulate mode.
Chapter 2 Quick Start 2.4 Single-Layer Process Setup A thin-film deposition process consists of one or more layers of material evaporated onto a substrate. Let’s build a simple single-layer process. Open Process Edit Use the touchpad to click on the “Edit” menu selection along the top of the display, then click “Process.” The Process Edit dialog will display the setup for the last process run. To better understand process setup, see section 3.4.1.
Chapter 2 Quick Start The diagram below illustrates a complete deposition cycle for a single layer. Refer to this diagram as we set the remaining process setup parameters. Edit Rate Ramps It may be desirable to vary the deposition rate during a layer. For example, to deposit slowly at first, then more quickly once the initial material is deposited. Click the “Rate Ramps” tab, then click “Insert Ramp.” Adjust the “Start Thickness” to 0.400 kÅ, “Ramp Time” to 5 seconds, and “New Rate” to 15 Å/s.
Chapter 2 Edit Deposition Quick Start Select the “Deposition” tab. This tab establishes the gain (P Term), time constant (I Term), and dead time (D Term) for your process. Set these values to 55, .7, and 0 respectively. Be sure Shutter Delay Enabled is not selected. Select Ignore for Control Error, and Continuous for Rate Sampling (see picture below).
Chapter 2 Quick Start Edit Source/Sensor Select the “Source/Sensor” tab. This tab contains parameters associated with the physical layout of your evaporation system. For now, be sure that “Output 1” is selected and “Max Power” and “Slew Rate” are set to 100. Set the “Tooling” value to 100. Leave the Source Index as it is. Save Edits Click “Close Form” or press the first SoftKey to save this onelayer process. If you are prompted “Do you want to change….,” answer Yes to make this the current process.
Chapter 2 Quick Start 2.5 Single-Layer Process Simulation If you have followed this chapter, you are ready to simulate a deposition process. Setup Displays Click the “View” menu and assure that these options are selected: Film Settings, Film Readings, and Automatic. Note that the settings “ribbon” along the right displays the preconditioning parameters you entered in the previous section. Start Process Verify that the top SoftKey label displays “START SIMULATE.
Chapter 2 Quick Start As shown below, the initial deposition rate was 10 Å/s until a thickness of .400 kÅ. Then the deposition rate was ramped up to 15 Å/s, and held until the desired final thickness of 1.000 kÅ is achieved. At this point, this single-layer process is finished. Deposition Phase with one Rate Ramp You should adjust the PID parameters on the setting ribbon, then Start/Stop the process several times to become familiar with their effect on control loop response.
Chapter 2 Quick Start 2.6 SoftKey Functions As you have seen, the SoftKey functions remain constant during deposition. Spend a few minutes to become familiar with each of these SoftKey functions. START PROCESS Starts the first layer of a process when START is pushed. If AUTO->MAN is shown on the third SofKey (AUTO Mode) the process starts PreConditioning. If MAN->AUTO is shown on the third Softkey (MANUAL mode) the process immediatly starts Deposition under PID loop control.
Chapter 2 Quick Start 2.7 Multi-Layer CoDeposition Process Our final example builds on the previous sections. If you have modified the setup of your process, return to Section 2.4 and adjust the process to those values. When your single-layer process matches Section 2.4, complete these steps: Duplicate a Layer Open the Edit Process dialog. Click on Layer 1, click the “Layer” tab, then click “Copy Layer.” Now click “Paste Layer.” A duplicate Gold Sample film will be added as Layer 2.
Chapter 2 Quick Start Hint: It’s usually best to copy a layer, then paste several temporary layers of that type. Next, assign the films that you want to each of the pasted layers. When selecting films for codeposition, remember that each film in a codeposited layer must be assigned to a different source output! Now use “Cut Layer” on the temporary layers, and “Paste CoDep” to assign the film to the desired codeposition layers. Review this example until you are comfortable with these concepts.
Chapter 2 Quick Start 2-14
Chapter 2 Quick Start Edit Silver Conditioning Select the “Condition” tab and the Silver Sample layer. Set each parameter to the values shown below. Save Edits Click “Close Form” or press the first SoftKey to save this twolayer codeposition process. Answer Yes if it displays the “Do you want to change….” message box to make this the current process. Press the “START SIMULATE” SoftKey to start the first layer preconditioning phases. Note that two outputs are displayed for this codeposition layer.
Chapter 2 Quick Start Your response should be similar to the graph shown below (your vertical scale may be slightly different). The slight ringing on the waveforms indicates some further tuning may be desired. However, this is an example of a reasonably well tuned loop. At .400kÅ thickness, the Silver Sample deposition rate ramps down from 15Å/s to 0. Similarly, at .400 kÅ thickness the Gold Sample film ramps to a higher deposition rate of 15Å/s.
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Chapter 3 SQS-242 Software 3.
Chapter 3 SQS-242 Software 3.1 Installation and Registration The SQS-242 install program is provided on CD-ROM. You can connect an external USB CDROM to the SID-242 for CDROM program installation. A 3 ½" diskette install is also possible by using another computer to copy the contents of each of the CD-ROM “Disk” subdirectories to blank 3 ½” diskettes. To install the program, start Windows, then insert the disk or CD-ROM into your computer.
Chapter 3 SQS-242 Software Note: If you enter a name of DEMO and Unlock Code of 5A8CAC8E5586268 the software will be placed in Demo mode. All features of the software are permanently available, except that readings from the SQM-242 card are only simulated. The Demo mode can be disabled by entering a valid Name and Unlock Code later. 3.2 Operation The SID-242 displays a progress bar during startup, then a User Login screen. Note: The SQS-242 software ships with one pre-assigned user.
Chapter 3 SQS-242 Software An Access Level is associated with each User Name. The Access Level controls which software functions are available to each user. For example, only users with an Access Level of Supervisor can assign users. See the Security section of this chapter for information on setting up users. The remainder of this chapter covers the purpose and operation of each software function, arranged by menu selections. For a more “operational” approach, consult the previous Quick Start chapter.
Chapter 3 SQS-242 Software 3.3 File Menu Note: The current process must be stopped for the File menu to be available. Process: Used to select a process from a list of all processes in the database. If the process selected is different than the current process, you are prompted to confirm the change. Open Database: Selects a process database to be used for deposition. Remember, a single process database may contain an unlimited number of processes, films, and materials.
Chapter 3 SQS-242 Software A number of “events” can trigger a data entry in the log file. “End Deposit Phase” records process data (rate, thickness, time, etc.) at the end of each layer’s deposit phase. Similarly, “End Each Phase” logs data at the end of each phase (conditioning, depositing, etc.). “I/O Events” logs data each time an external digital input or output changes. Finally, “Timed Logging” records data at the selected time intervals throughout the process. There are two formats for writing data.
Chapter 3 SQS-242 Software 3.4 Edit Menu 3.4.1 Edit: Process A process is a sequence of film layers. Multiple films deposited in the same layer are known as codeposition. A listing of each film in the selected process appears in the layers list box. Films in codeposition layers are listed with the same layer number, but a different output. Select a layer to edit its parameters in the tabbed dialog boxes.
Chapter 3 SQS-242 Software Layer Tab The layer tab provides the capabilities needed to add and delete process layers, as well as to edit the film, rate & thickness for each layer. Normally each film in a process is run sequentially, as layers. Codeposition represents different films that are deposited concurrently with other films, in the same layer. Cut Layer: Removes the layer selected in the Layers list box from the process, and places the layer on the clipboard.
Chapter 3 SQS-242 Software Hint: To add layers to a process, it is easiest to click an existing layer in the layers list then click Copy. Click Paste to insert several temporary layers of that type. Next, assign the proper film to each of the layers, using the Film dropdown box. When selecting a Film for a codeposition layer, remember that each film must be assigned to a different source output! To change an existing layer to a CoDep layer, highlight the existing layer and click “Cut Layer.
Chapter 3 SQS-242 Software Rate Ramps Tab Rate ramps cause changes to the deposition rate over time under PID control. Each rate ramp has a starting thickness, an elapsed time to ramp to the new rate, and a new rate setpoint. Each process layer can have an unlimited number of rate ramps. Insert Ramp: Inserts a new rate ramp for the selected layer, at the selected position in the rate ramps list. Existing rate ramps are shifted down. Delete Ramp: Deletes the selected rate ramp.
Chapter 3 SQS-242 Software Deposition Tab The deposition tab contains parameters that directly affect the deposition phase of the process cycle. P Term: Sets the gain of the control loop. High gains yield more responsive (but potentially unstable) loops. Try a value of 50, then gradually increase/decrease the value to respond to step changes in rate setpoint. I Term: The integral term controls the time constant of the loop response. A small I term, say .
Chapter 3 SQS-242 Software Shutter Delay: It is often desirable to assure stable process control before the substrate shutter opens. Enabling shutter delay requires that the system reach the programmed control accuracy, and maintain that accuracy for 5 seconds, before deposition begins. If the programmed accuracy is not reached, the process halts. If accuracy is reached, the substrate shutter opens and deposition begins once the accuracy has been maintained for 5 seconds.
Chapter 3 SQS-242 Software Condition Tab Before deposition begins, it is often necessary to precondition the source material. This places the system at the proper power level to achieve rapid PID control when deposition begins. Ramp 1: Ramp power sets the power level that is desired at the end of the ramp phase, in % of full scale. Ramp time sets the time to ramp with a linear rate from the initial power to the Ramp power. Soak time sets the time the output remains at the ramp power level.
Chapter 3 SQS-242 Software Source/Sensor Tab The Source/Sensor tab controls the physical setup of the deposition system. Material: Selects the physical deposition material Max Power: The maximum output power allowed for the selected output. The full scale output voltage is a function of the deposition power supply input specifications, and is set in the SQM-242 setup. Max Power controls the maximum % of the full scale power that can be used by this process layer.
Chapter 3 SQS-242 Software In codeposition, a layer may have multiple films, with each material using a different output and sensor(s) for control. However, no layer can have the same output assigned to more than one film. If you try to assign the same output to multiple films in a layer, an error message will be displayed. Reassigning a film to a different output to eliminate this error may impact other stored processes.
Chapter 3 SQS-242 Software 3.4.2 Edit: Films The Edit Films dialog provides a subset of the functions of the Edit Processes dialog. The functions are those that pertain only to a specific film. NOTE: Edits to a Film will affect all processes and layers that use that film! Film: A drop down box that selects the film parameters displayed in the edit film dialog box. Defaults to the current process film. Rename: Edits the name of the selected film. New: Creates a new film.
Chapter 3 SQS-242 Software 3.4.3 Edit: Materials The Edit Material dialog provides the functions needed to build a materials database. In addition to the functions listed below, the main screen function keys provide capabilities to add/edit/delete materials. Material: Selects a material to edit. Density: Sets the density for this material. Material density has a significant impact on deposition calculations.
Chapter 3 SQS-242 Software 3.4.4 Edit: System Sets the operation of system Sensors, Sources, Digital I/O, and SQM-242 measurement card(s). Sensors Tab Sensor Name: A meaningful name assigned to sensors 1 to 4 in single card systems; 1 to 8 in two card systems. For clear display, keep the name to less than 8 characters. Sensor Output: The source output that a sensor is positioned to measure. Typically each sensor measures deposition from a particular source.
Chapter 3 SQS-242 Software Sources Tab Output Name: A meaningful name assigned to SQM-242 outputs 1 and 2 in single card systems; 1 to 4 in two card systems. For clear display, keep the name to less than 8 characters. Full Scale: The input voltage required by the deposition source power supply to produce 100% output power. Positive or negative full scale values are possible.
Chapter 3 SQS-242 Software Digital IO Tab The SID-242 uses an inexpensive PLC to provide digital I/O capabilities. The Digital I/O tab assigns deposition events (i.e. open shutter, start deposit, final thickness, etc.) to the available relays and inputs on the PLC. Note: Omron CPM series PLCs number relays from 10.00 to 10.07, then 11.00 to 11.07. These correspond to Relays 1 to 16 on the Digital I/O tab. Similarly, inputs 0.00 to 0.11 on the Omron PLC correspond to inputs 1 to 12 on this screen.
Chapter 3 SQS-242 Software If Dual Sensor is not selected (i.e. a single sensor), the relay contacts are closed when you are in a layer with the sensor enabled. As an example, let’s say you have sensors 1 and 3 enabled for Film 1 and sensors 2 and 4 enabled for Film 2. When you start Film 1, the contacts for Sensor Relays 1 and 3 will close. When you start Film 2, these contacts open and the contacts for Sensor Relays 2 and 4 will close.
Chapter 3 SQS-242 Software Soak Hold Phase Relay This relay closes for the Soak and Hold phases after deposition. Manual Mode Relay Closes when the program is placed in Manual mode. Max Power Relay Closes when any control voltage output is at the programmed maximum power level. Thickness Setpoint Relay This relay will become active when the Thickness Setpoint is reached. This is a programmable process parameter. Time Setpoint Relay This relay will become active when the Time Setpoint has been reached.
Chapter 3 SQS-242 Software PLC Tab Comm Port: Selects the serial port used to communicate with the PLC. The Comm Port drop down lists the available ports. However, some of the ports may be used by other devices (modem, mouse, etc.). Select Disabled to prevent I/O from using the PLC. Address: Several PLCs can be controlled from a single computer Comm Port by connecting their expansion ports. The slave address of each such PLC is usually set by a rotary or dip switch, and must be unique.
Chapter 3 SQS-242 Software SQM-242 Tab Normal/Simulate: In Normal mode, the SQS-242 gets readings from the SQM-242 card(s). In Simulate mode, the SQS-242 generates simulated readings even if a card is not installed. Useful for testing new processes and learning the software. Note: In Simulate Mode, a deposition rate is not “measured” until the output power exceeds 50%. Period: Sets the measurement period between .2 seconds (5 readings per second) and 2 seconds.
Chapter 3 SQS-242 Software Comm Tab RS-232 Port: Selects the comm port used for serial communications with another computer. This is NOT the same port used by the PLC for I/O. The Comm Port drop down lists available ports. However, some of the ports may be used by other devices (PLC, modem, mouse, etc.). Baud Rate: Sets the baud rate used for serial communications. Ethernet Port: Sets the TCP/IP port used by the SQS-242 software for Ethernet communications, 1001 is a typical value.
Chapter 3 SQS-242 Software 3.4.5 Edit: Security The Security menu assigns Users, their Password, and their Access Level. It also provides a flexible way to assign program functions to different Access Levels. Note: The Security dialog is available only to users with Supervisor Access. Users Tab User: Drop down used to select an existing user, to edit their Access or Password. It is not possible to edit or add a user name in the User drop down. Use the New SoftKey to create a new User.
Chapter 3 SQS-242 Software Access Tab The Access tab allows Supervisors to assign which menu selections are available to each of the three Access Levels. When a program menu is assigned to a particular access level, it is automatically available to higher access levels. In the example below, every user has access to the File Process menu and the File Exit menu. Only Supervisors have access to the Edit System and Edit Security menus. The remaining menus are assigned TECH access.
Chapter 3 SQS-242 Software 3.5 View Menu The view menu controls the appearance of the main display. Film Settings: Displays/hides a ribbon of commonly accessed process settings along the right of the screen. Additional process parameters are available in the Edit menu. When displayed, the settings ribbon allows the user to easily modify process settings during deposition without leaving the main screen. Changes are made to the current process and the process database immediately.
Chapter 3 SQS-242 Software 3.6 Software Specifications Display Graphs ................................................................................. Rate, Deviation, Power Readouts .............................................................................. Rate,Dev,Thick,Power Process Parameters Name.................................................................................... 12 characters # Processes .........................................................................
Chapter 3 SQS-242 Software Material Parameters Name.................................................................................... 12 characters Density ................................................................................. .0.40 to 99.99 gm/cm3 Z-Factor................................................................................ 0.100 to 9.900 Computer Interface Type ..................................................................................... RS-232 Protocol ..................
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Chapter 3 SQS-142 Software 3-1
Chapter 4 SQM-142 Card 4.0 Introduction This section covers installation, operation, and programming of the SQM-242 card. The SQM-242 is a deposition controller on a PC card. Each SQM-242 card has four 110MHz quartz sensor inputs, and two 0-10V control outputs. Up to two cards can be installed in a computer. The diagram below shows a typical single-sensor deposition system. The SQM-242 receives sensor inputs via a BNC cable from each sensor oscillator.
Chapter 4 SQM-142 Card 4.1 Installation 4.1.1 PCI Model Installation of the SQM-242 PCI card requires the driver disk supplied with the card. If the card is the second of two SQM-242 PCI cards, a jumper must also be placed on the bottom two pins of JP5 of the card before installation. Driver Installation 1. Insert the Sigma Instruments Utilities CD-ROM. 2. In Windows select Start, then Run. 3. Browse to the \SQM-242 Card\Driver Install folder on the CD-ROM. 4. Run the Setup program.
Chapter 4 SQM-142 Card Card: Primary Slave Address: 180 140 1C0 220 580 540 5C0 620 JP3: • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 4-3
Chapter 4 SQM-142 Card • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 21 21 21 21 21 21 21 21 Reserve IRQ in the BIOS The computer BIOS is usually accessed by pressing a key during startup - consult your computer manual. In the BIOS, reserve the IRQ selected on JP2 of the SQM-242 for an ISA card. Be sure to save changes on exit.
Chapter 4 Reserve IRQ in Windows SQM-142 Card WIN 9X/ME: Open Control Panel, System, Device Manager, Properties. Select Reserve Resources and reserve the IRQ selected on JP2 of the SQM-242. WIN NT/2000: An NT Patch program is included on CD-ROM with the SQM-242 card. Follow these three steps for NT/2000 systems: 1. Run the SETUPNT.EXE program. 2 If IRQ 10 is NOT the selected interrupt, edit the \windows\sqm32swnt.inf file (a standard text file) to the proper interrupt. 3. Execute the \windows\sqm32swnt.
Chapter 4 SQM-142 Card 4.2 Sensor Connections Once the SQM-242 is installed in the PC, connect the cable from the sensor oscillator to the BNC jack on the SQM-242 card. Refer to the drawing in Section 4.0. Avoid running the sensor wires near high voltage or noisy lines. Control Outputs Sensor 1 Sensor 2 Sensor 3 Sensor 4 4.3 Power Supply Connection The connection to your evaporation power supply is done through a 1/4” Stereo Phone Jack on the SQM-242 card.
Chapter 4 SQM-142 Card Replace the quartz crystal. Crystals sometimes fail unexpectedly, or exhibit erratic frequency shifts before total failure. Depending on the material, crystals may fail well before the typical 5MHz value. If you find that crystals consistently fail early, you may want to set Min Frequency (see below) to a value higher then 5 MHz.
Chapter 4 SQM-142 Card The Sensor Readings display should show 5.5 MHz, very stable. If not, contact Sigma Instruments technical support. When a stable frequency reading is achieved with the test oscillator, reconnect the sensor and verify a stable reading. When stable sensor readings are achieved without deposition, reconnect the source supply. Start the deposition process in Manual mode with 0% output. The % Life readings should remain stable.
Chapter 4 SQM-142 Card 4.5 Demo Programs The CD-ROM supplied with each SQM-242 contains three demonstration programs: SQS-242 Demo is a demonstration version of the SQS-242 software described earlier in this manual. It is fully functional with two exceptions: 1) it operates only in Simulate mode, it will not actually take readings from an SQM-242 card; 2) it will not communicate with a PLC for digital I/O. SQM-242 VB (SQM32.
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Chapter 4 SQM-142 Card 4-1
Chapter 5 Digital IO 5.0 Introduction Digital I/O for the SQS-242 software is handled by an inexpensive Omron CPM2 series PLC. It is not necessary, however, to use external I/O with the SQS-242 software. There are several benefits to using an inexpensive external PLC for I/O. First, noisy high voltage wiring can be placed near the control sources, rather than routed into the controller’s equipment rack. Only a single serial cable runs from the PLC to the controller.
Chapter 5 Digital IO 5.1 PLC Installation CAUTION: The Omron PLC uses a special RS-232 cable as shown below. Do not use a standard serial cable. Damage to the SID-242 or the PLC could result. Mount the PLC controller near the devices it is controlling and sensing. Connect the PLC to a properly grounded power source. See the PLC User Manual on the SQS-242 CD-ROM for detailed PLC mounting and connection information. Connect the serial cable supplied from the PLC serial port to your computer serial port.
Chapter 5 Digital IO Input Wiring: The 0.0 to 0.11 inputs on Omron PLCs correspond to Input# 1 to 12 in the SQS-242 software. These physical inputs are mapped to input events in the SQS242 System Setup dialog. Omron PLC input wiring is illustrated below. Other Digital I/O: Depending on the PLC model used, additional I/O pin definitions are available for other I/O function, such as source indexer operation. PLC Model PLC Pins SQS-242 Function 900-004-8ER Output 11.0011.07 Source Index 1&2, Pockets 1-4.
Chapter 5 Digital IO Source Index 2, Pockets 1-4 Input 1.01 Source Index 2 Done 5.2 PLC Setup and Test In the SQS-242 software select Edit, Setup, then the PLC tab. Set the Address to match the PLC Address. Set the Comm Port to the serial port you are using. The Test section provides a means of testing your PLC communications and digital I/O wiring. To set a relay on the PLC, go to the Digital I/O tab and find which I/O event is assigned to that relay.
Chapter 5 11 12 13 14 15 16 17 Digital IO 02 Not Used Layer Stopped 03 Not Used Layer Starting 04 Process Stopped Not Used 05 Feed Ramp Phase 06 Feed Hold Phase 07 Idle Ramp Phase 08 Idle Phase Ramp1 Phase Soak1 Phase Ramp2 Phase Soak2 Phase 201 Sensors/Outputs Register (updated each layer) Bits 0-7 are sensors used (1=used, 0=unused) Bits 12-15 are outputs used, 12 is Out1, 13 is Out2, etc.
Chapter 5 Digital IO Source Done Flag (read at start of each layer) 1= Source Indexer Done, 0=Not Done 222 Outputs 1-16 Bit 0 is Relay 1, etc. 224 Inputs 1-12 Bit 0 is Input 1, etc.
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Chapter 5 Installation 5-1
Chapter 6 Computer Interface 6.0 Introduction The computer interface capabilities of the SQS-242 program allow operation from an external computer via Ethernet or RS-232 serial communications. The active process can be selected, process parameters read or changed, operation controlled, and data collected. Parameters may be read (Query commands) while the process is running, but can only be changed (Update commands) while the process is stopped. Changes to the “structure” of a process (e.g.
Chapter 6 Computer Interface 6.3 SQS-242 Comm Program SQS-242 Comm, found on the SQS-242 CDROM, is a simple Windows program to demonstrate SQS-242 computer interfacing concepts. With SQS-242 Comm you can easily send commands to, and read the responses returned by, the SQS-242 program. SQS-242 Comm is written in Visual Basic, and the source code is included as an example of programming concepts for computer interfacing. Make an RS-232 or Ethernet connection from the host computer to the SID-242.
Chapter 6 Computer Interface 6.4 Protocol The SQS-242 program never initiates communications. It only responds to commands from the host computer. SQS-242 computer Interface commands fall into two general categories. Query commands request data from the SQS-242 program. Update commands instruct the SQS-242 program to take an action. The SQS-242 responds to both Query and Update commands with a response that indicates the results of the command request.
Chapter 6 Computer Interface Update Command: @;;...
Chapter 6 Computer Interface CalcChkSum = Hex$(FCS) 6.5 Command Summary Note: Update Queries (except UP02-UP10) are only valid in Stop Mode Query Process: (Query) @QP; nse Response) @QP;O6;Respo (ACK @QP;21;ErrNu m (NAK Response) 01 Process Name @QP;01 (Query Process) @QP;06;MyProc MyProc) 02 Process Time @QP;02 (Query Process Time) @QP;06;32:45 45 sec.
Chapter 6 12 13 Computer Interface 03 Not Used Layer Starting 04 Process Stopped Not Used 05 Ramp1 Phase 14 Feed Ramp Phase 06 Soak1 Phase 15 Feed Hold Phase 07 Ramp2 Phase 16 Idle Ramp Phase 08 Soak2 Phase 17 Idle Phase 06 Phase Time 07 Run # 08 All Process Names (returns comma delimited list) 1n Source Shutter, n=1 to 4 (0=Open, 1 =Close) @QP;12 (Query Source Shutter 2) @QP;06;0 (Source Shutter 2 is Open) 2n Sensor Shutter, n=1 to 8 (0=Open, 1 =Close) 30 All Crystal Good (0=False, 1=True) 3n Crystal n
Chapter 6 Computer Interface (NAK Response) 01 Set Process @UP;01;MyProc (Select MyProc) @UP;06; 02 Start Process @UP;02 @UP;06 03 04 05 06 07 08 09 10 2n Stop Process Start Layer Stop Layer Start Next layer Auto Mode Manual Mode Zero Thickness Force Final Thickness Output n Power (Manual Mode Only) @UP;21;50 (Set Output 1 to 50%) Query/Update Layer: @QL;;;
Chapter 6 Computer Interface @UF;;;
Chapter 6 Query Utility: 01 SQM242 Version 02 SQM242 Mode (0/1) 03 SQM242 Period 04 SQM242 Filter 05 SQM242 Slave Enabled (0/1) 06 Front Panel Enabled (0/1) 11 SID242 Software Version 12 SID242 Operating System 13 SID-242 Computer Name Computer Interface @QU; 6-9
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Appendix
Appendix A.
Appendix Z-Factor is used to match the acoustic properties of the material being deposited to the acoustic properties of the base quartz material of the sensor crystal. Z-Factor is the ratio of the acoustic impedance of the sensor to that of the deposited material. If you know the acoustic impedance of your material, it is easy to calculate the Z-Factor. The sensor is basically silicon dioxide, and has an acoustic impedance of 8.83. For example, Gold has an acoustic impedance of 23.18, so: Gold ZFactor = 8.
