User guide

5 - 13
PN 074-156N
Front Load Single and Dual Sensors Operating Manual
5.1.3.3 Feedthrough and In-Vacuum Cable Check
1 Refer to Figure 5-8 on page 5-11. Remove the in-vacuum cable from the sensor
head at point B (female coaxial connector).
2 Connect the Crystal Sensor Emulator to the in-vacuum cable.
 If the Crystal Fail message disappears after approximately five seconds,
check the electrical isolation of the coaxial connector on the sensor head
and the electrical continuity between the coaxial connector and the leaf
spring in the sensor head cavity (refer to section 5.1.2, Digital Multimeter,
on page 5-3).
 If the Crystal Fail message remains, check feedthrough electrical continuity
and isolation (refer to section 5.1.2, Digital Multimeter, on page 5-3). If the
feedthrough continuity and isolation checks pass, replace the in-vacuum
cable.
3 If the cause of the Crystal Fail cannot be determined, contact INFICON (refer
to section 1.3, How to Contact INFICON, on page 1-2).
5.1.3.4 Crystal Life Readings
The Crystal Sensor Emulator, PN 760-601-G2, contains a quartz crystal having a
fundamental frequency at 5.5 MHz. With the Crystal Sensor Emulator connected,
the percent Crystal Life display, for instruments incrementing Crystal Life from 0%,
should read:
 approximately 45% for deposition controllers or monitors which
allow a 1 MHz frequency shift.
 approximately 38% for deposition controllers or monitors which
allow a 1.25 MHz frequency shift.
 approximately 30% for deposition controllers or monitors which
allow a 1.5 MHz frequency shift.
With the Crystal Sensor Emulator connected, the percent Crystal Life (or Health)
display, for instruments that decrement from 100%, should read:
 approximately 50% for deposition controllers or monitors which allow a
1 MHz frequency shift.
 approximately 60% for deposition controllers or monitors which allow a
1.25 MHz frequency shift.
 approximately 66% for deposition controllers or monitors which allow a
1.5 MHz frequency shift.