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OPERATING MANUAL

Front Load Single and Dual

Sensors

PN 074-156N

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Summary of content (90 pages)

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Cover Page O P E R A T I N G M A N U A Front Load Single and Dual Sensors PN 074-156N L
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Title Page O P E R A T I N G M A N U A Front Load Single and Dual Sensors PN 074-156N ® www.inficon.com ©2014 INFICON re achus@inficon.
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Trademarks The trademarks of the products mentioned in this manual are held by the companies that produce them. RateWatcher™ is a registered trademark of INFICON GmbH. Teflon® and Viton® are registered trademarks of E. I. duPont de Nemours Company or its affiliates. Swagelok® is a registered trademark of Swagelok Company. VCR®, VCO®, and Ultra-Torr® are registered trademarks of Cajon Company. ConFlat® is a registered trademark of Varian Corporation. FOMBLIN® is a registered trademark of Ausimont SpA.
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Warranty WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service.
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Front Load Single and Dual Sensors Operating Manual Table Of Contents Cover Page Title Page Trademarks Disclaimer Copyright Warranty Chapter 1 PN 074-156N Introduction 1.1 1.2 1.3 1.3.1 1.4 1.4.1 1.4.2 1.5 1.5.1 1.5.2 1.5.3 1.5.4 1.6 1.6.1 1.6.2 1.6.3 1.6.4 1.7 1.7.1 1.7.2 1.8 1.8.1 1.8.2 1.8.3 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .
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Front Load Single and Dual Sensors Operating Manua Chapter 2 Sensor Installation 2.1 2.1.1 2.1.2 2.1.3 2.1.4 2.2 2.3 2.3.1 2.4 2.4.1 2.4.2 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 Sensor Check with XTC/3, IC6, or Cygnus 2 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 Sensor Check with STM-2XM, STM-3, SQM-160, SQC-310, SQM-242, or IQM-233 Deposition Controller/Monitor . . . . . . .
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Front Load Single and Dual Sensors Operating Manual Chapter 5 Troubleshooting Troubleshooting Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1 Symptom, Cause, Remedy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1 Digital Multimeter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3 Electrical Isolation Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Front Load Single and Dual Sensors Operating Manua PN 074-156N This page is intentionally blank.
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Front Load Single and Dual Sensors Operating Manual Chapter 1 Introduction 1.1 Introduction INFICON Front Load Sensors (see Figure 1-1) offer proven reliability and durability combined with excellent thermal stability. The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side access. Because they are assembled mechanically rather than soldered, parts can conveniently be replaced in the field.
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Front Load Single and Dual Sensors Operating Manual 1.2 Definition of Notes, Cautions and Warnings Before using this manual, please take a moment to understand the Cautions and Warnings used throughout. They provide pertinent information that is useful in achieving maximum instrument efficiency while ensuring personal safety. NOTE: Notes provide additional information about the current topic. CAUTION Failure to heed these messages could result in damage to the instrument.
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Front Load Single and Dual Sensors Operating Manual 1.3.1 Returning Sensor to INFICON Do not return any sensor component to INFICON before speaking with a Customer Support Representative and obtaining a Return Material Authorization (RMA) number. Front Load Sensors will not be serviced without an RMA number. Packages delivered to INFICON without an RMA number will be held until the customer is contacted. This will result in delays in servicing the Front Load Sensor.
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Front Load Single and Dual Sensors Operating Manual 1.4.1 Single Sensor Configuration Overview and Parts Front Load Single Sensor . . . . . . . . . . . SL-XXXXX, see Figure 1-2. Figure 1-2 Front Load Single Sensor configurations S L – Type of Sensor (Includes in-vacuum cable. Crystals sold separately.
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Front Load Single and Dual Sensors Operating Manual 1.4.2 Dual Sensor Configuration Overview and Parts Front Load Dual Sensor . . . . . . . . . . . . . DL-AXXX, see Figure 1-3. Figure 1-3 Front Load Dual Sensor configurations D L – Type of Sensor (Includes in-vacuum cables. Crystals sold separately.
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Front Load Single and Dual Sensors Operating Manual 1.
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Front Load Single and Dual Sensors Operating Manual 1.5.1 Specifications Maximum bakeout temperature with no water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130°C Maximum operating isothermal environment temperature with minimum water flow . . . . . . . . . . . 400°C Maximum sensor body envelope without shutter . . . . . . . . . Standard Sensor 27.00 x 61.47 x 17.53 mm (1.06 x 2.42 x 0.69 in.) See Figure 1-6 on page 1-10. Right Angle Sensor 28.19 x 26.92 x 26.92 mm (1.11 x 1.06 x 1.06 in.
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Front Load Single and Dual Sensors Operating Manual 1.5.2 Materials Body and Holder . . . . . . . . . . . . . . . 304 stainless steel Springs, Electrical Contacts . . . . . . . Au plated Be-Cu Water Tubes . . . . . . . . . . . . . . . . . . . 304 stainless steel In-Vacuum Cable . . . . . . . . . . . . . . . Silver coated copper, Teflon® insulated Electrical Connector . . . . . . . . . . . . . Glass insulated Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al2O3 Braze . . . . . . . . . . . . . . .
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Front Load Single and Dual Sensors Operating Manual Water Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity. CAUTION Do not allow water tubes to freeze. This may happen if the tubes pass through a cryogenic shroud and the flow of fluid is interrupted. Air (SL-X1XXX only) . . . . . . . . . . . . . 70 psi (gauge) {85 psi (absolute)} (5.
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Front Load Single and Dual Sensors Operating Manual PN 074-156N Figure 1-6 Standard crystal sensor outline U 1 - 10
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Figure 1-7 PN 750-211-GX standard crystal sensor assembly PN 074-156N Front Load Single and Dual Sensors Operating Manual 1 - 11
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PN 074-156N Figure 1-8 Right angle crystal sensor outline Front Load Single and Dual Sensors Operating Manual 1 - 12
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Figure 1-9 PN 750-213-GX right angle crystal sensor assembly PN 074-156N Front Load Single and Dual Sensors Operating Manual , 1 - 13
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Front Load Single and Dual Sensors Operating Manual 1.6 Front Load Dual Sensor (PN DL-AXXX) Figure 1-10 Front Load Dual Sensor Sensor 1 (Primary) Sensor 2 (Secondary) Sensor 1 Sensor 2 1.6.1 Specifications Maximum bakeout temperature with no water . . . . . 130°C Maximum operating isothermal environment temperature with minimum water flow . . . . . . . . . . . 400°C Maximum sensor body envelope . . . . . . . . . . . . . . . 39.12 x 82.04 x 49.54 mm (1.54 x 3.23 x 1.95 in.
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Front Load Single and Dual Sensors Operating Manual 1.6.2 Materials Body and Holder . . . . . . . . . . . . . . . 304 stainless steel Springs, Electrical Contacts . . . . . . . Au plated Be-Cu Water Tubes and Air Tube . . . . . . . . 304 stainless steel In-Vacuum Cable . . . . . . . . . . . . . . . Silver coated copper, Teflon insulated Electrical Connector . . . . . . . . . . . . . Glass insulated Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al2O3 Other Mechanical Parts . . . . . . . . . .
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Front Load Single and Dual Sensors Operating Manual Water Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity. CAUTION Do not allow water tubes to freeze. This may happen if the tubes pass through a cryogenic shroud and the flow of fluid is interrupted. Air Pressure . . . . . . . . . . . . . . . . . . . 70 psi (gauge) {85 psi (absolute)} (5.
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PN 074-156N Figure 1-11 Dual crystal sensor outline Front Load Single and Dual Sensors Operating Manual 1 - 17
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1 - 18 PN 074-156N Figure 1-12 PN 750-212-GX dual crystal sensor assembly Front Load Single and Dual Sensors Operating Manual
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Front Load Single and Dual Sensors Operating Manual 1.7 Shutter Module (PN 750-210-G1 and 750-210-G3) Figure 1-13 Shutter module 1.7.1 Specifications Maximum bakeout temperature with no water . . . . . . . . . . . . . . . . . . 130°C Maximum operating isothermal environment temperature, properly attached to a sensor with minimum water flow . . . . . . . . . 400°C Air Tube . . . . . . . . . . . . . . . . . . . . . . 304-SS, 3.175 mm (1/8 in.) OD seamless stainless steel, 0.406 mm (0.016 in.
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Front Load Single and Dual Sensors Operating Manual 1.7.2 Shutter Module Drawings The following Shutter Module Assembly Drawings provide relevant data necessary for planning equipment configurations. Figure 1-14. . . . . . . . . . . . . . . . . . . . PN 750-210-G1, 76.2 cm (30 in.) Shutter Module PN 074-156N Figure 1-15. . . . . . . . . . . . . . . . . . . . PN 750-210-G3, 121.9 cm (48 in.
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Figure 1-14 PN 750-210-G1, 76.2 cm (30 in.
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1 - 22 PN 074-156N Figure 1-15 PN 750-210-G3, 121.9 cm (48 in.
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Front Load Single and Dual Sensors Operating Manual 1.8 Feedthroughs NOTE: Sensor/feedthrough combination temperature specifications are limited by lowest temperature specification of the component. 1.8.1 Specifications for 2.54 cm (1 in.) Bolt Mounting. . . . . . . . . . . . . . . . . . . . . . 25.781 mm (1.015 in.) ±0.254 mm (0.010 in.) diameter aperture Ultra-Torr O-ring compression fitting terminations Maximum operational environment temperature with no water . . . . . . . . . . . . . . . . . .
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Front Load Single and Dual Sensors Operating Manual 1.8.2 Specifications for CF40 (2-3/4 in. ConFlat) Mounting . . . . . . . . . . . . . . . . . . . . . Mates with 7 cm (2-3/4 in.) ConFlat® type flanges with 3.49 cm (1.375 in.) ID (minimum) Ultra-Torr O-ring compression fitting terminations Maximum operational environment temperature with no water . . . . . . . . . . . . . . . . . . 165°C Maximum operational environment temperature with minimum water flow . . . . . . . . . 300°C Materials. . . . . . . . .
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Front Load Single and Dual Sensors Operating Manual 1.8.3 Feedthrough Drawings The following Feedthrough Outline Drawings provide dimensions and other pertinent data necessary for planning equipment configurations. Figure 1-16 . . . . . 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax (PN 002-042) Figure 1-17 . . . . . 2.54 cm (1 in.) bolt feedthrough with three tubes, one coax (PN 750-030-G1) Figure 1-18 . . . . . 2.54 cm (1 in.
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Front Load Single and Dual Sensors Operating Manual Figure 1-16 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax (PN 002-042) 19.0 (0.75) 127.0 (5.00) A A Coax Connector 10.16 (0.400) 5.08 (0.200) 9.7 (0.38) 50.8 (2.00) 323.8 (12.75) 5.08 (0.200) Viton O-ring #2-122 #1-14-UNS Thread 3.96 (0.156) Washer View A-A 127.0 (5.00) Dimensions are shown millimeter (inch) PN 074-156N 19.0 (0.
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Front Load Single and Dual Sensors Operating Manual Figure 1-17 2.54 cm (1 in.) bolt feedthrough with three tubes, one coax (PN 750-030-G1) 19.0 (0.75) 127.0 (5.00) A A Coax Connector 12.70 (0.500) 6.35 (0.250) 9.7 (0.38) 7.11 (0.280) Viton O-ring #2-122 50.8 (2.00) 323.8 (12.75) 127.0 (5.00) Washer 4.78 (0.188) View A-A 3.18 (0.125) BNC Connector Mating air fitting (10-32) for PN 750-420-G1 Solenoid Valve Dimensions are shown millimeter (inch) PN 074-156N 19.0 (0.
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Front Load Single and Dual Sensors Operating Manual Figure 1-18 2.54 cm (1 in.) bolt feedthrough with three tubes, two coax (PN 750-707-G1) 304.80 (12.00) BNC Connector 75.31 (2.96) 50.80 (2.00) 127.00 (5.00) 9.65 (0.38) Coax Connector BNC Connector Washer 126.11 (4.96) # 25.4 (1.0) 1 - 14 UNS Thread 1.52 (0.06) 7.80 (0.31) 14.27 (0.56) 3.56 (0.14) PN 074-156N 7.14 (0.28) 7.11 (0.28) 7.11 (0.28) 38.19 (1.
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Front Load Single and Dual Sensors Operating Manual Figure 1-19 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax, with Ultra-Torr (PN 750-624-G1) 162.93 (6.41) 12.70 (0.50) 76.20 (3.00) 61.85 (2.44) BNC Connector 3.25 (0.13) Ultra-Torr Fittings (2) 50.80 (2.00) 251.83 (9.91) Coax Connector # 25.4 (1.0) 1-14 UNS Thread Washer 10.16 (0.40) 9.04 (0.36) 5.08 (0.20) 43.99 (1.73) Dimensions are shown millimeter (inch) PN 074-156N 38.10 (1.
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Front Load Single and Dual Sensors Operating Manual Figure 1-20 CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax (PN 002-043) 32.8 (1.29) 70 (2-3/4) ConFlat Flange Coax Connector BNC Connector 127.00 (5.00) Seamless Tube (3) 4.78 OD, 3.33 ID (0.188 OD), (0.131 ID) 12.70 (0.5) 228.60 (9.00) 6.73 (0.26) Diameter Six holes equally spaced on a 58.71 (2.31) diameter bolt circle 69.85 (2.75) 10.2 (0.40) 7.6 (0.30) 15.2 (0.60) 1 - 30 Dimensions are shown millimeter (inch) PN 074-156N 5.
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Front Load Single and Dual Sensors Operating Manual Figure 1-21 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one coax (PN 750-685-G1) 32.64 (1.29) CF40 70 (2-3/4) ConFlat Flange Coax Connector BNC Connector Mating air fitting (10-32) for PN 750-420-G1 Solenoid Valve 12.70 (0.50) 57.15 (2.25) 127.00 (5.00) 228.60 (9.00) PN 074-156N 0.26 (6.73) diameter Six holes equally spaced on a 2.31 (58.71) diameter bolt circle 15.24 (0.60) 7.66 (0.30) 8.89 (0.35) 69.85 (2.75) 8.89 (0.35) 12.70 (0.
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Front Load Single and Dual Sensors Operating Manual Figure 1-22 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, two coax (PN 002-080) CF40 70 (2-3/4) ConFlat Flange BNC Connector (2) Seamless Tube (3) 4.78 OD, 3.33 ID (0.188 OD), (0.131 ID) Mating air fitting (10-32) for PN 750-420-G1 Solenoid Valve 54.61 (2.15) Coax Connector (2) 127.00 (5.00) 12.70 (0.5) 228.60 (9.00) 6.73 (0.26) Diameter Six holes equally spaced on a 58.71 (2.31) diameter bolt circle 7.925 (0.312) Hexagonal 11.43 (0.
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Front Load Single and Dual Sensors Operating Manual Figure 1-23 CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax, with Ultra-Torr (PN 206-878-G2) 251.83 (9.91) CF40 70 (2-3/4) ConFlat Flange BNC Connector Ultra-Torr Fittings (2) 32.64 (1.29) Coax Connector 127.00 (5.00) 12.70 (0.50) 15.24 (0.60) 0.26 (6.73) Diameter Six holes equally spaced on a 2.31 (58.71) diameter bolt circle 7.62 (0.30) 5.08 (0.20) PN 074-156N 69.85 (2.75) 10.24 (0.
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Front Load Single and Dual Sensors Operating Manual Figure 1-24 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one coax, with Ultra-Torr (PN 750-685-G2) 32.64 (1.29) CF40 70 (2-3/4) ConFlat Flange Coax Connector BNC Connector Mating air fitting (10-32) for PN 750-420-G1 Solenoid Valve Ultra-Torr Fittings (3) 57.15 (2.25) 12.70 (0.50) 127.00 (5.00) 251.61 (9.91) 7.62 (0.30) 6.73 (0.26) Diameter Six holes equally spaced on a 58.71 (2.31) diameter bolt circle 15.24 (0.60) PN 074-156N 8.
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Front Load Single and Dual Sensors Operating Manual Figure 1-25 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, two coax, with Ultra-Torr (PN 206-890-G2) 57.15 (2.25) CF 40 70 (2-3/4) ConFlat Flange 32.64 (1.29) BNC Connector (2) Coax Connector (2) Ultra-Torr Fittings (3) Mating air fitting (10-32) for PN 750-420-G1 Solenoid Valve 38.10 (1.50) 32.64 (1.29) TYP 3 PLCS 12.70 (0.50) 165.10 (6.50) 251.83 (9.91) 10.16 (0.40) 6.73 (0.26) Diameter Six holes equally spaced on a 58.71 (2.
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Front Load Single and Dual Sensors Operating Manual Chapter 2 Sensor Installation 2.1 Pre-installation Sensor Check Prior to installing the sensor in the vacuum system, make certain that it is in proper working condition by following the appropriate procedure. 2.1.1 Sensor Check with XTC/3, IC6, or Cygnus 2 Deposition Controller 1 Connect the in-vacuum cable from the sensor head to the feedthrough or a coax adapter (Microdot/BNC). 2 Connect one end of the 15.2 cm (6 in.
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Front Load Single and Dual Sensors Operating Manual 2.1.2 Sensor Check with STM-2XM, STM-3, SQM-160, SQC-310, SQM-242, or IQM-233 Deposition Controller/Monitor 1 Connect the in-vacuum cable from the sensor head to the feedthrough or a coax adapter (Microdot/BNC). 2 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the BNC connector on the feedthrough. 3 Connect the other end of the 15.2 cm (6 in.
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Front Load Single and Dual Sensors Operating Manual 2.1.3 Sensor Check with Q-pod™ or STM-2 Deposition Monitor 1 Connect the in-vacuum cable from the sensor head to the feedthrough or a coax adapter (Microdot/BNC). 2 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the BNC connector on the feedthrough. 3 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector of the Q-pod or STM-2.
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Front Load Single and Dual Sensors Operating Manual 2.1.4 Sensor Shutter Check Temporarily connect an air supply to the actuator air tube. Use the manual override button on the solenoid valve (see Figure 3-2 on page 3-5 or Figure 3-3 on page 3-6), or other means, to activate and deactivate the pneumatic shutter several times. NOTE: The air supply must be 70 psi (gauge) {85 psi (absolute)} (5.8 bar (absolute) [584 kPa (absolute)] (minimum) to 80 psi (gauge) {95 psi (absolute)} (6.
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Front Load Single and Dual Sensors Operating Manual Figure 2-1 Typical installation Mounting Brackett In-Vacuum Cable (Routed with water tubes) Braze/Weld Joint or Compression Fittings Sensor Shutter Source to Sensor (25.4 cm (10 in.
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Front Load Single and Dual Sensors Operating Manual The sensor head must be installed such that the face of the crystal is perpendicular to the evaporant stream from the source (see Figure 2-2). Two effects may arise if the sensor head is not perpendicular to the evaporant stream, and the combination of these effects will have a negative effect on crystal life and increase the probability of mode hops:  The deposit will not be even across the crystal surface.
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Front Load Single and Dual Sensors Operating Manual In many cases installing multiple sensors to monitor one source can improve thickness accuracy. The rules for multiple sensors are the same as for a single sensor installation, and the locations chosen must be as defined above. Consult the monitor or controller manual for more information regarding the availability of this feature.
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Front Load Single and Dual Sensors Operating Manual 4 Form, measure, and mark the sensor tubes (see section 2.3.1 on page 2-10). NOTE: Use the Tube Bender Kit, PN 750-037-G1, provided with all non-welded sensors, to form the tubes. CAUTION Do not form the sensor tubes with a bend radius less than 8 mm (0.315 in.) from the inside of the bend or 9.5 mm (0.375 in.) from the center line of the tubes. Bends must be farther than 20 mm (0.79 in.) away from the braze joints on the tubes.
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Front Load Single and Dual Sensors Operating Manual CAUTION Excessive application of brazing material, or excessive heat due to brazing, may result in blockage of the water tube.  Verify that the tubes are not blocked with braze material by blowing compressed air through the tubes.  Thoroughly clean the braze joint and helium leak test before installing the sensor and feedthrough into the process chamber.
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Front Load Single and Dual Sensors Operating Manual 2.3.1 Tube Bending CAUTION Read this entire section before attempting to bend the tubes. Incorrect tube bending that damages the tubes voids the warranty. If it is necessary to bend the tubes to clear obstacles inside the chamber or to bring the sensor head into a proper mounting location, observe the following precautions:  Support the tubes where the bends will be placed to avoid a tube being collapsed or pinched.
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Front Load Single and Dual Sensors Operating Manual 2.4 Sensor Shutter Module Installation on Existing Equipment Installation of sensor shutters on existing equipment requires a Shutter Module (PN 750-210-G1 or 750-210-G3, refer to section 1.5.4 on page 1-9). The Shutter Module may be installed on either the standard crystal sensor (SL-A0XXX) or the right angle crystal sensor (SL-B0XXX). 2.4.
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Front Load Single and Dual Sensors Operating Manual Chapter 3 Solenoid Valve Assembly Installation 3.1 Introduction The solenoid valve assembly (PN 750-420-G1) and the feedthrough should be installed at the same time. The same solenoid valve is used for both the 2.54 cm (1 in.) bolt feedthrough and the CF40 (2-3/4 in. ConFlat) feedthrough.  For an Installation with a 2.54 cm (1 in.) Bolt Feedthrough, see section 3.2 on page 3-1.  For an Installation with a CF40 (2-3/4 in.
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Front Load Single and Dual Sensors Operating Manual 8 Connect the 3.175 mm (1/8 in.) air tube from the A port of the solenoid valve to the quick disconnect fitting installed in step 7, see section 3.4, Pneumatic Connections, on page 3-4. 9 Attach the P port of the solenoid valve to a source of air. The air supply must be 70 psi (gauge) {85 psi (absolute)} (5.8 bar (absolute)) [584 kPa (absolute)] (minimum) to 80 psi (gauge) {95 psi (absolute)} (6.
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Front Load Single and Dual Sensors Operating Manual INFICON CF40 (2-3/4 in. ConFlat) feedthroughs with air lines are equipped with a fitting adapter (PN 007-133). This adapter provides an easy way to attach a quick disconnect fitting (included with the 750-420-G1 Solenoid Valve) to the feedthrough air line. Follow the steps below: 1 Install the Feedthrough. 2 Add the valve bracket (modified) to the desired location (shown in Figure 3-3 on page 3-6) using two of the 6.35 mm (1/4 in.
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Front Load Single and Dual Sensors Operating Manual 3.4 Pneumatic Connections Figure 3-1 Pneumatic solenoid valve tube connections Exhaust (Normally Open) P Supply (Normally Closed) A Output Port Air Supply To Air Fitting Of Feedthrough Tube Fitting (Provided With Valve) 3.5 Electrical Connections To complete installation of the assembly, make electrical connections where indicated in Figure 3-3 on page 3-6 to either 24 V(ac) or V(dc). Current required is approximately 70 mA.
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PN 074-156N Figure 3-2 Solenoid valve Front Load Single and Dual Sensors Operating Manual 3-5
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3-6 PN 074-156N Figure 3-3 CF40 (2-3/4 in.
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Front Load Single and Dual Sensors Operating Manual Chapter 4 Maintenance and Spare Parts 4.1 General Precautions CAUTION Wear clean nylon or talc-free latex lab gloves when handling sensor components. If sensor components become contaminated, clean them thoroughly using a suitable solvent to avoid outgassing under vacuum. 4.1.
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Front Load Single and Dual Sensors Operating Manual 4.1.3 Maintain the Temperature of the Crystal Periodically measure the water flow rate leaving the sensor to verify that the flow rate meets or exceeds the flow rate value specified on page 1-8. Depending upon the condition of the cooling water used, the addition of an in-line water filtering cartridge system may be necessary to prevent flow obstructions. Many system coaters use parallel water supplies that provide high water flow rates.
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Front Load Single and Dual Sensors Operating Manual 2 Insert the tapered end of the crystal snatcher (PN 008-007) into the ceramic retainer, see Figure 4-1 (A), and apply a small amount of pressure. This locks the retainer to the snatcher and allows the retainer to be pulled straight out. See Figure 4-1 (B). Figure 4-1 Using the crystal snatcher (A) (B) 3 Invert the crystal holder and the crystal will drop out. 4 Prior to installing the new crystal, review section 4.1.
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Front Load Single and Dual Sensors Operating Manual Figure 4-2 Standard crystal sensor (exploded) Standard Crystal Holder (PN 750-172-G1) Crystal (PN 008-010-G10) Fully Coated Face (Gold) Crystal Retainer (PN 007-023) Finger Spring (PN 750-171-P1) Standard Crystal Sensor Body (PN 750-207-G1) In-Vacuum Cable to XIU Water Tubes Never deposit material on a sensor unless the crystal holder and crystal are installed.
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Front Load Single and Dual Sensors Operating Manual 4.3 Sensor Maintenance These maintenance requirements apply to the Front Load Single and Dual crystal sensors. 4.3.1 Adjusting the Leaf Spring Front Load sensors have two leaf springs with three prongs each:  a leaf spring inside the sensor head cavity that provides an electrical connection to the back of the ceramic retainer. This leaf spring is preformed and heat treated, and should not require adjustment.
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Front Load Single and Dual Sensors Operating Manual 4.3.2 Cleaning the Crystal Holder In dielectric coating applications, the crystal seating surface of the crystal holder may require periodic cleaning. Since most dielectrics are insulators, any material buildup on this surface from an evaporation process can cause a poor electrical contact between the crystal and the crystal holder. Material buildup will also cause a reduction in thermal transfer from the crystal to the sensor body.
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Front Load Single and Dual Sensors Operating Manual 4.3.3 Adjusting the Crystal Holder Retainer Spring If the ceramic retainer is not being retained securely by the crystal holder, or if the ceramic retainer if difficult to insert, the retention force of the retainer spring in the crystal holder can be adjusted by the following procedure. Tools required  Scribe or other pointed tool  Needle nose pliers (two required) Procedure 1 Position the crystal holder with the crystal aperture oriented downward.
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Front Load Single and Dual Sensors Operating Manual 4.3.4 Replacing the Finger Spring The finger spring (PN 750-171-P1) that retains the crystal holder in the sensor head cavity should be replaced when the crystal holder is no longer being held securely in the sensor head cavity, or after approximately 4000 crystal holder extractions. NOTE: The actual number of crystal holder extractions before the retention force is significantly reduced will vary based on process conditions.
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Front Load Single and Dual Sensors Operating Manual 4.3.5 Lubricating the Shutter Module The shutter module should be lubricated approximately every 2000 strokes at areas specified as shown in Figure 4-8. Failure to lubricate the shutter module may significantly reduce life of operation or cause assembly to become inoperative. For lubrication, use molybdenum disulfide (PN 750-191-G1), provided with each shuttered sensor, or use Fomblin® E25 (perfluorinated polyether), if appropriate for the process.
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Front Load Single and Dual Sensors Operating Manual 4.4 Spare Parts and Accessories Single Body Assembly with Tubing Standard 76 cm (30 in.) . . . . . . . PN 750-207-G1 Standard 122 cm (48 in.) . . . . . . PN 750-207-G2 Right Angle 76 cm (30 in.) . . . . . PN 750-209-G1 Right Angle 122 cm (48 in.) . . . . PN 750-209-G2 Dual Body Assembly with Tubing Standard 76 cm (30 in.) . . . . . . . PN 750-208-G1 Standard 122 cm (48 in.) . . . . . . PN 750-208-G2 Ceramic Retainer . . . . . . . . . . . . . . .
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Front Load Single and Dual Sensors Operating Manual In-Vacuum Cable 15.2 cm (6 in.). . . . . . . . . . . . . . . PN 321-039-G12 25.4 cm (10 in.) . . . . . . . . . . . . . PN 783-500-023 30.5 cm (12 in.). . . . . . . . . . . . . . PN 007-252 61.0 cm (24 in.). . . . . . . . . . . . . . PN 321-039-G11 76.2 cm (30 in.) . . . . . . . . . . . . . PN 783-500-024 78.1 cm (30.75 in.) . . . . . . . . . . . PN 007-044 91.4 cm (36 in.). . . . . . . . . . . . . . PN 007-059 121.9 cm (48 in.). . . . . . . . . . . . .
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Front Load Single and Dual Sensors Operating Manual Chapter 5 Troubleshooting 5.1 Troubleshooting Tools If the Front Load Sensor fails to function, or appears to have diminished performance, diagnose the sensor using one or more of the following:  Symptom, Cause, Remedy chart (see section 5.1.1)  Digital Multimeter (see section 5.1.2 on page 5-3)  Crystal Sensor Emulator (see section 5.1.3 on page 5-10) 5.1.
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Front Load Single and Dual Sensors Operating Manual Table 5-1 Symptom, Cause, Remedy (continued) SYMPTOM CAUSE REMEDY Crystal ceases to oscillate during deposition before it reaches its “normal” life. Crystal is being hit by small Use a shutter to shield the droplets of molten material from sensor during initial period of the evaporation source. evaporation. Move the sensor farther from the source. Damaged crystal. Replace the crystal.
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Front Load Single and Dual Sensors Operating Manual Table 5-1 Symptom, Cause, Remedy (continued) SYMPTOM CAUSE Thermal instability: large Crystal not properly seated. changes in thickness reading during source warm-up (usually causes thickness reading to decrease) and after the Excessive heat applied to the termination of deposition crystal. (usually causes thickness reading to increase). REMEDY Check and clean the crystal seating surface of the crystal holder. Refer to section 4.3.2 on page 4-6.
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Front Load Single and Dual Sensors Operating Manual 5.1.2.1 Electrical Isolation Check 1 Remove the Crystal Holder from the sensor head. 2 Disconnect the short BNC cable from the feedthrough. 3 Select the DMM ohmmeter function and high resistance (MΩ) scale. 4 At the feedthrough, measure resistance between center contact and shield of the BNC connector (shown by Figure 5-1).  If resistance is more than 10 MΩ, electrical isolation is good. Go to section 5.1.2.2, Electrical Continuity Check, on page 5-6.
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Front Load Single and Dual Sensors Operating Manual Figure 5-2 Sensor head isolation check 7 Disconnect the in-vacuum cable from the feedthrough. 8 Measure resistance between center contact and shield of the BNC.  If resistance is less than 10 MΩ, continue to step 8a.  If resistance is more than 10 MΩ, continue to step 9. 8a Examine the feedthrough for the cause of the low resistance. Contact INFICON if cause of low resistance is not found (refer to section 1.3, How to Contact INFICON, on page 1-2).
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Front Load Single and Dual Sensors Operating Manual 5.1.2.2 Electrical Continuity Check 1 Select the DMM ohmmeter function and a low resistance scale. NOTE: The resistance specifications in the following steps do not take into account the resistance of the Digital Multimeter probes. Touch the probe tips together and note the resistance reading. Compensate for probe resistance by subtracting probe resistance from resistance measurements, or by zeroing the ohmmeter while the probes are touching.
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Front Load Single and Dual Sensors Operating Manual 5 At the feedthrough, measure resistance between center contact and shield of the BNC connector (refer to Figure 5-1).  If resistance is less than 1 Ω, electrical continuity is good.  If resistance is more than 1 Ω, check the following before continuing to step 6:  Verify that in-vacuum cable connections to sensor head and feedthrough are tight. Do not overtighten.
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Front Load Single and Dual Sensors Operating Manual 9 Measure resistance between the center contact of the coaxial connector and leaf spring (shown by Figure 5-5) being careful to place the probe at the base of the leaf spring to prevent damage to the prongs of the leaf spring.  If resistance is more than 0.3 Ω, continue to step 9a.  If resistance is less than 0.3 Ω, continue to step 10. 9a Examine the solder connection between the leaf spring and coaxial connector.
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Front Load Single and Dual Sensors Operating Manual 10 Disconnect the in-vacuum cable from the feedthrough. 11 At the feedthrough, measure resistance between the center contacts of the BNC and coaxial connectors (shown by Figure 5-6). Figure 5-6 Feedthrough Resistance  If resistance is more than 0.3 Ω, contact INFICON (refer to section 1.3, How to Contact INFICON, on page 1-2).  If resistance is less than 0.3 Ω, continue to step 12. 12 Replace the in-vacuum cable.
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Front Load Single and Dual Sensors Operating Manual 5.1.3 Crystal Sensor Emulator A very useful tool for rapidly evaluating the cause of a persistent Crystal Fail message is the optional Crystal Sensor Emulator (PN 760-601-G2) used in conjunction with a thin film deposition controller or monitor (see Figure 5-7). The Crystal Sensor Emulator contains a known "good" 5.5 MHz crystal that may be attached at various points in the measurement system to isolate the cause of a Crystal Fail.
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Front Load Single and Dual Sensors Operating Manual Figure 5-8 Crystal Sensor Emulator attachment points Sensor Head B In-Vacuum cable Thin Film Controller Crystal Interface Unit (Oscillator) A BNC Cable C Crystal Holder 5.1.3.1 Measurement System Check 1 Refer to Figure 5-8. Remove the 15.2 cm (6 in.) BNC cable from the feedthrough at point A. 2 Connect the Crystal Sensor Emulator to the 15.2 cm (6 in.) BNC cable at point A.
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Front Load Single and Dual Sensors Operating Manual 5.1.3.2 Crystal Holder and Ceramic Retainer Check NOTE: The crystal holder connector on the Crystal Sensor Emulator will not fit the sensor head cavity of older style INFICON sensors that have “soldered” finger springs. NOTE: Removal of the shutter may be required with a Front Load Dual sensor. 1 Remove the Crystal Holder from the sensor head. 2 Refer to Figure 5-8. Connect the Crystal Sensor Emulator to the sensor head at point C (sensor head cavity).
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Front Load Single and Dual Sensors Operating Manual 5.1.3.3 Feedthrough and In-Vacuum Cable Check 1 Refer to Figure 5-8 on page 5-11. Remove the in-vacuum cable from the sensor head at point B (female coaxial connector). 2 Connect the Crystal Sensor Emulator to the in-vacuum cable.
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