O P E R A T I N G M ™ Crystal12 Sensor IPN 074-398-P1 A N U A L
O P E R A T I N G M Crystal12 ™ Sensor IPN 074-398-P1A A N U A L
Trademarks The trademarks of the products mentioned in this Operating Manual are held by the companies that produce them. INFICON®, Crystal12™, and Composer® are trademarks of INFICON Inc. ConFlat® is a registered trademark of Varian Associates. Teflon® is a registered trademark of Dupont. Scotch-Brite™ is a trademark of 3M. SWAGELOK® and CAJON® are registered trademarks of Swagelok, Co. Inconel® is a registered trademark of International Nickel Co. Microdot® is a registered trademark of Microdot Corp.
Registration Card Thank you for selecting INFICON® instrumentation. Please fill out and return this postage paid card as soon as possible. Serial # Model Name Title Company Bldg./MS Address Phone # State City Zip Fax# Country Email Your help is very important in our continuing efforts to improve our manuals. Using the table below, please circle the appropriate rank for each aspect. In the Importance column, please indicate the importance of each aspect.
BUSINESS REPLY MAIL FIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORK POSTAGE WILL BE PAID BY ADDRESSEE INFICON INC.
Warranty WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service.
Contact List For Customer Support, contact the INFICON office nearest to you. Customer Support information is also available at www.inficon.com. North America USA — East Syracuse, NY Phone: +1.315.434.1100 Fax: +1.315.437.3803 Email: service.usa@inficon.com USA — Santa Clara, CA Phone: +1.408.361.1200 Fax: +1.408.362.1556 Email: service.usa@inficon.com USA — Austin, TX Phone: +1.512.448.0488 Fax: +1.512.448.0398 Email: service.usa@inficon.com Europe Germany — Koeln Phone: +49.221.347.42222 Fax: +49.221.
Crystal12 Sensor Operating Manual Table Of Contents Chapter 1 Sensor Specifications 1.1 1.1.1 1.1.1.1 Specifications for Crystal12 Sensor 750-667-G1 . . . . . . . . . . . . . . . . . . . . . 1-1 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.1.1.2 Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Crystal12 Sensor Operating Manual Chapter 3 Installation of the Solenoid Valve Assembly 3.1 3.2 3.3 3.3.1 3.3.2 Installation with 1” Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 Installation with 2 3/4” Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 Electrical and Pneumatic Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Crystal12 Sensor Operating Manual Chapter 1 Sensor Specifications 1.1 Specifications for Crystal12 Sensor 750-667-G1 The Crystal12 sensor is a twelve crystal quartz crystal deposition monitor transducer. When the monitor crystal being used fails, a new crystal is advanced into position, fully replacing the failed crystal’s function. The mechanism used for providing this motion is pneumatically powered. The logic for automatic operation of this transducer is provided with the Cygnus™ Deposition Controller.
Crystal12 Sensor Operating Manual 1.1.1 Installation Requirements 1.1.1.1 Feedthrough Qty (1) 2-3/4" ConFlat® with two coaxial feedthroughs, two pass water, one air IPN 002-080, See Figure 5-2 on page 5-2 or, Qty (1) 1" bolt with 1 coaxial feedthrough, two pass water, one air IPN 750-030-G1, see Figure 5-1 on page 5-1. User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position.
Crystal12 Sensor Operating Manual 1.1.2 Materials Table 1-2 Materials Plate, Material Shield, Mechanical Parts, 304 type stainless steel Body and Carousel Springs, Electrical Contacts Au plated Be-Cu, Au Plate 302 stainless steel Water and air tubes S-304, 0.125" (3.2 mm) O.D. x .016" (0.4 mm) Wall Thickness x 30" Long (762 mm) Seamless Stainless Steel Tubing Connector Stainless steel Insulators Teflon®, Peek® Cable Teflon insulated copper plated steel Crystal 0.550" (13.97 mm) Diameter 1.1.
Crystal12 Sensor Operating Manual 1.1.4 Inventory 1.1.4.1 Standard In addition to the basic transducer, the complete shipping package includes an accessory kit (IPN 750-268-G3) which consists of the following: Table 1-3 Contents of Accessory Kit Qty IPN Description X 750-268-G3 Accessory Kit, Crystal12 Sensor 1 750-254-G2 Assembly, Alignment Tool 1 074-5000 CD, Thin Film Manuals 2 008-010-G10 Sensor Crystal 6 MHz (10 crystals per package) 1 059-189 CC-1010-0225 Orifice 0.
074-398-P1A Figure 1-2 Outline of Crystal12 Sensor - Page 1 of 2 Crystal12 Sensor Operating Manual 1-5
074-398-P1A Figure 1-3 Outline of Crystal12 Sensor - Page 2 of 2 Crystal12 Sensor Operating Manual 1-6
074-398-P1A Figure 1-4 Assembly Crystal12 Sensor - Page 1 of 4 Crystal12 Sensor Operating Manual 1-7
074-398-P1A Figure 1-5 Assembly Crystal12 Sensor - Page 2 of 4 Crystal12 Sensor Operating Manual 1-8
074-398-P1A Figure 1-6 Assembly Crystal12 Sensor - Page 3 of 4 Crystal12 Sensor Operating Manual 1-9
074-398-P1A Figure 1-7 Assembly Crystal12 Sensor - Page 4 of 4 Crystal12 Sensor Operating Manual 1 - 10
Crystal12 Sensor Operating Manual Figure 1-8 Crystal Carousel 4 Locating Hole 3 Alignment Hole 2 6 MHz Crystals 1 074-398-P1A Pin 1 - 11
Crystal12 Sensor Operating Manual 1.2 Using this Manual Please take a moment to read the following. 1.2.1 Symbols and their Definitions NOTE: Notes provide additional information about the current topic. HINT: Hints provide insight into product usage. CAUTION This caution paragraph cautions against actions which may bring about a malfunction or the loss of data. WARNING This warning paragraph warns of actions that may result in physical injury to the user.
Crystal12 Sensor Operating Manual 1.3 How to Contact Customer Support If you need assistance with your sensor, please read this Operating Manual before contacting Customer Support. If you can not find the answer in this manual, decide whether: Your sensor functions, but it does not work for your application — request Application Assistance. Your sensor functions, but you need to know how to use it — request Technical Support. Your sensor does not function (it’s broken) — request Repair Services.
Crystal12 Sensor Operating Manual 074-398-P1A This page is intentionally blank.
Crystal12 Sensor Operating Manual Chapter 2 Sensor Installation Successful operation of any crystal sensor depends on proper placement, compatibility of its construction with its operating environment and connection to proper utilities. NOTE: The sensor head, water tubes, cable, etc. should be clean and grease free when installed in the vacuum chamber. These parts should be handled while wearing clean nylon gloves.
Crystal12 Sensor Operating Manual position 12 is displayed as the assumed current position until the change-out is complete and a rotate head or crystal switch function is performed. At the end of the rotate head function, the sensor will be at position number 1. Replacement of the twelve monitor crystals requires the removal of the two fasteners (item 4, Figure 1-8 on page 1-11) that secure the two halves (items 1 and 3) of the assembly.
Crystal12 Sensor Operating Manual 2.2.1 Cygnus Deposition Controller 1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter (Microdot/BNC). 2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector of the feedthrough. 3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN 760-600-G1). 4 Connect one end of the XIU cable (IPN 600-1039-Gxx) to the mating connector of the XIU.
Crystal12 Sensor Operating Manual Figure 2-1 Typical Cystal12 Installation for Cygnus Crystal12 IPN 750-667-G1 AIR 80-90 PSIG CHANNEL 1 or 2 (STANDARD) CYGNUS 2-4 074-398-P1A IPN 750-420-G1
Crystal12 Sensor Operating Manual 2.3.1 Crystal Sensor Installation Generally, install the sensor as far as possible from the evaporation source (a minimum of 10" or 25.4 cm) while still being in a position to accumulate thickness at a rate proportional to accumulation on the substrate. Figure 2-2 shows proper and improper sensor positioning.
Crystal12 Sensor Operating Manual Build the Sensor/Feedthrough Assembly. Remove the sensor and the feedthrough, cut the water cooling tubes and air tubes to the proper length and connect them directly to the feedthrough or use vacuum rated couplings. CAUTION To prevent damage to the feedthrough or sensor during welding or brazing, insure that at least one inch of water tube is left between the sensor and the feedthrough.
Crystal12 Sensor Operating Manual Because of geometric factors, variations in surface temperature, and differences in electrical potential, the crystal and substrates often do not receive the same amount of material. If you want the thickness indication on the controller to represent the thickness on the substrates, calibration is required to determine the tooling. Consult your controller’s manual for the proper procedure for obtaining the tooling factor.
Crystal12 Sensor Operating Manual 2 Select Sensor Type: 1 (Single); 2 (CrystalTwo); 6 (CrystalSix); 12 (Crystal12). See Figure 2-4. Figure 2-4 Selecting Sensor Type Example 3 If a Sensor Type 2, 6 or 12 is selected, a Switch Output field appears. Select the relay output number to be used to activate the crystal switch. See Figure 2-5.
Crystal12 Sensor Operating Manual 2.4.2 Wiring the Relay Outputs with Relay I/O Boards 760-162-G1 or 760-162-G1/G2 On the relay connector, connect the leads of the solenoid valve across the one side of a 24 volt supply and one side of a relay (1-8, 1-16, or 1-24; whichever was programmed). See Table 2-1.
Crystal12 Sensor Operating Manual Table 2-2 Input/Relay Pin Connections Relay # Pins TTL Input # Pin Relay I/O Board #1 Pins TTL Input # Pin I/O Board #3 1 7, 6 1 15 17 7, 6 25 9 2 9, 8 2 14 18 9, 8 26 10 3 11, 10 3 13 19 11, 10 27 11 4 13, 12 4 12 20 13, 12 28 12 5 5, 4 5 11 21 5, 4 29 13 6 3, 2 6 10 22 3, 2 30 14 7 1, 14 7 9 23 1, 14 31 15 8 15, 16 8 8 24 15, 16 32 1 9 7 33 2 10 6 34 3 11 5 35 4 12 4 36 5 13 3 37
Crystal12 Sensor Operating Manual 2.5 Crystal12 Operation when used with a Cygnus 2.5.1 Initialization An automatic Rotate Head function occurs when the Cygnus is first powered on, assuming that a channel's crystal Sensor Type is configured as a Crystal12. HINT: It is important to perform a Rotate Head function after a carousel change-out, or after changing the crystal sensor type. Whenever a Rotate Head function is initiated, the Cygnus will advance the Crystal 12 carousel until it locates Position 1.
Crystal12 Sensor Operating Manual If a crystal switch is initiated while the Cygnus Channel is in Deposit, the Crystal12 will advance to the next "good" crystal, skipping the failed crystals. If a crystal switch is initiated and the Channel is not in Deposit, the Crystal12 will advance to the next position regardless of the status (good or failed) of the crystal in this position.
Crystal12 Sensor Operating Manual Chapter 3 Installation of the Solenoid Valve Assembly The solenoid valve assembly (IPN 750-420-G1) and the feedthrough should be installed at the same time. The same valve assembly is used for both the 1" and the (recommended) 2 3/4" feedthroughs. However, if the assembly is to be used with the 2 3/4" feedthrough, you will need to modify the valve bracket as follows. For the following steps, see Figure 3-2 on page 3-4. (DWG.
Crystal12 Sensor Operating Manual 6 Add the air fitting to the tube which has the female thread adapter installed. 7 Connect 1/8" diameter tubing from the valve output (A) to the feedthrough fitting. CAUTION Use of more than 80" (2 meters) of 1/8" tubing between the valve with the orifice and the bellows may cause a switcher failure because of the time required to bleed out sufficient air during de-pressurization.
Crystal12 Sensor Operating Manual 3.3 Electrical and Pneumatic Connections 3.3.1 Electrical To complete installation of the assembly, make electrical connections where indicated in Figure 3-3 on page 3-5 to either 24 V(ac) or V(dc). Current required is approximately 70 mA. CAUTION Maximum applied voltage must not exceed 26 V(ac) 3.3.
074-398-P1A Figure 3-2 Solenoid Valve Assembly Crystal12 Sensor Operating Manual 3-4
Figure 3-3 2 3/4” Dual Coaxial Feedthrough & Valve Assembly 074-398-P1A Crystal12 Sensor Operating Manual 3-5
Crystal12 Sensor Operating Manual 074-398-P1A This page is intentionally blank.
Crystal12 Sensor Operating Manual Chapter 4 Maintenance 4.1 General Precautions 4.1.1 Maintain the Temperature of the Crystal Periodically measure the water flow rate through the crystal sensor to verify that it meets or exceeds the value specified in chapter one. Depending upon the condition of the cooling water used, the addition of an inline water filtering cartridge system may be necessary to prevent flow obstructions. Many coating systems use parallel water supply taps that provide high total flows.
Crystal12 Sensor Operating Manual 4.2 Crystal Seat Maintenance In dielectric and organic material coating applications, the surface where the crystal contacts the crystal seat may require periodic cleaning. Since most dielectrics are insulators, any buildup due to blow-by will eventually cause erratic or poor electrical contact between the crystal and the sensor body. This buildup will also cause a reduction in thermal transfer from the crystal to the sensor body.
Crystal12 Sensor Operating Manual Alignment tool assembly 750-254-G2 (Included in 750-268 kit) Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa] NOTE: 75 PSIG (5.2 bar) [520 kPa] is for alignment purposes only. 4.3.2 Procedure With the required equipment at hand, proceed as follows: 1 Temporarily connect an air supply to the bellows assembly (item 37, Figure 1-5 on page 1-8) supply tube. Regulate the air pressure to 75 PSIG (5.2 bar) [520 kPa]. 2 Insert the 0.
Crystal12 Sensor Operating Manual 6 Actuate the bellows assembly by applying 24 volts to the leads of the solenoid valve of the solenoid valve assembly. Consult Figure 3-3 on page 3-5 for wiring assignments. The air pressure must be sustained. 7 Rotate the ratchet (item 29, Figure 1-5 on page 1-8) counterclockwise until one tooth contacts the pin of the pawl and actuator stem assembly (item 18, Figure 1-4 on page 1-7). Secure the ratchet to the 0.
Crystal12 Sensor Operating Manual Figure 4-3 Setting the Detent Ratchet Detent Spacer Detent 10 Remove the detent spacing tool. 11 Release air pressure from the bellows assembly (item 37, Figure 1-5 on page 1-8). 12 Remove the 0.09375" diameter alignment pin of the 750-254-G2 alignment tool assembly from the hole. 074-398-P1A 13 Press the crystal switch button on the handheld controller or the instrument front panel. The sensor will advance to the next crystal position.
Crystal12 Sensor Operating Manual 4.3.3 Replacing the Bellows Assembly (750-286-P2) Replace the bellows assembly with INFICON part number 750-286-P2. This will require the removal of the used bellows assembly and reattachment of the replacement bellows assembly to the feedthrough airline (refer to section 1.1.1, Installation Requirements, on page 1-2). 4.3.3.1 Equipment required: 1/16" Allen wrench (Included in 750-268 kit) 3/32" Allen wrench (Included in 750-268 kit) 4.3.3.
Crystal12 Sensor Operating Manual 9 Fasten the replacement bellows assembly to the carousel housing weldment (item 14, Figure 1-5 on page 1-8) utilizing the two #4-40 x 1.125 long screws (item 9, Figure 1-4 on page 1-7). Do not tighten the screws. Position the Bellows assembly in such a fashion as to allow the actuator stem to come in contact with the ball bearings (item 19, Figure 1-4 on page 1-7) as illustrated in Figure 4-2 on page 4-4). Tighten the screws.
Crystal12 Sensor Operating Manual 4.4 Cygnus Status and Error Messages CAROUSEL CHANGE-OUT The crystal carousel assembly has been removed from a Crystal12 sensor. SWITCH IN PROGRESS The manual state can not be exited while a crystal switch is in progress. XTAL SWITCH ERROR This message indicates a CrystalSix or Crystal12 sensor switcher failure. The instrument did not detect the proper position after having attempted to rotate the sensor head. XTAL SWITCHING Indicates a crystal switch is in progress. 4.
Crystal12 Sensor Operating Manual Table 4-1 Troubleshooting (continued) Symptom Cause Remedy Crystal not centered in aperture. Improper alignment. Realign per alignment instructions in Chapter 4. Install orifice where shown 0.0225” diameter orifice not installed inline to the on Figure 3-1 on page 3-3. supply side of the solenoid valve assembly. Large jumps of thickness Mode hopping due to reading during deposition damaged crystal. Replace crystal. Crystal near the end of its Replace crystal. life.
Crystal12 Sensor Operating Manual Table 4-1 Troubleshooting (continued) Symptom Cause Remedy Thermal instability: large changes in thickness reading during source warm-up (usually causes thickness reading to decrease) and after the termination of deposition (usually causes thickness reading to increase) Poor thickness reproducibility Excessive moisture accumulation on the crystal. Turn off cooling water to sensor before opening it to air; flow hot water through the sensor when the chamber is open.
Crystal12 Sensor Operating Manual Table 4-1 Troubleshooting (continued) Symptom Cause Resistor is open at While in Ready or Stop, initiating a Crystal Switch bypassed position(s). function causes unit to index more than once. Unit indexes twelve times and displays Xtal Switch Error, Xtal Fail, and Carousel Change-Out message. Loss of electrical signal Resistor #1 is open / shorted. No carousel installed Remedy Repair resistor at bypassed position of 750-652-G1 (item 15 of Figure 1-5 on page 1-8).
Crystal12 Sensor Operating Manual 074-398-P1A This page is intentionally blank.
Crystal12 Sensor Operating Manual Chapter 5 Feedthrough Outline Drawings The following Feedthrough Outline Drawings provide dimensions and other pertinent data necessary for planning equipment configurations.
Crystal12 Sensor Operating Manual 074-398-P1A Figure 5-2 Standard 2 3/4" CONFLAT® flange (002-080) (contains two coaxials, two water tubes and one air tube) 5-2
